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1. 发明授权

US07800371B2 Portable NMR device and method for making and using the same 有权
标题翻译：便携式NMR装置及其制造和使用方法
公开(公告)号：US07800371B2
公开(公告)日：2010-09-21
申请号：US11851291
申请日：2007-09-06
申请人： Chang-Min Park , Shriram Ramanathan , Patrick Morrow , Kenneth Cadien
发明人： Chang-Min Park , Shriram Ramanathan , Patrick Morrow , Kenneth Cadien
IPC分类号： G01V3/00
CPC分类号： G01N24/08 , B82Y30/00 , G01R33/302
摘要： An embodiment of the invention relates to a portable or handheld device for performing NMR analysis. The device comprises a console and a strip which can be placed into the console through a slot or other means. The strip comprises a sample holding place and a microcoil for generating an excitation magnetic field across a sample in the sample holding space. A permanent magnet is provided either by the console or the strip and generates a static magnetic field which, together with the excitation magnetic field, creates NMR within the sample. Other embodiments of the invention also encompass method of performing NMR analysis using the portable device and method of making such devices.
摘要翻译：本发明的实施例涉及用于执行NMR分析的便携式或手持式装置。该装置包括控制台和条，其可以通过槽或其他方式放置到控制台中。条带包括用于在样品保持空间中的样品上产生激发磁场的样品保持位置和微线圈。永久磁铁由控制台或条带提供，并产生一个静磁场，与磁场一起在样品内产生NMR。本发明的其他实施方案还包括使用便携式装置进行NMR分析的方法和制造这种装置的方法。

2. 发明申请

US20070296413A1 PORTABLE NMR DEVICE AND METHOD FOR MAKING AND USING THE SAME 有权
标题翻译：便携式NMR装置及其制造和使用方法
公开(公告)号：US20070296413A1
公开(公告)日：2007-12-27
申请号：US11851291
申请日：2007-09-06
申请人： Chang-Min Park , Shriram Ramanathan , Patrick Morrow , Kenneth Cadien
发明人： Chang-Min Park , Shriram Ramanathan , Patrick Morrow , Kenneth Cadien
IPC分类号： G01R33/44
CPC分类号： G01N24/08 , B82Y30/00 , G01R33/302
摘要： An embodiment of the invention relates to a portable or handheld device for performing NMR analysis. The device comprises a console and a strip which can be placed into the console through a slot or other means. The strip comprises a sample holding place and a microcoil for generating an excitation magnetic field across a sample in the sample holding space. A permanent magnet is provided either by the console or the strip and generates a static magnetic field which, together with the excitation magnetic field, creates NMR within the sample. Other embodiments of the invention also encompass method of performing NMR analysis using the portable device and method of making such devices.
摘要翻译：本发明的实施例涉及用于执行NMR分析的便携式或手持式装置。该装置包括控制台和条，其可以通过槽或其他方式放置到控制台中。条带包括用于在样品保持空间中的样品上产生激发磁场的样品保持位置和微线圈。永久磁铁由控制台或条带提供，并产生一个静磁场，与磁场一起在样品内产生NMR。本发明的其他实施方案还包括使用便携式装置进行NMR分析的方法和制造这种装置的方法。

3. 发明申请

US20060141222A1 Introducing nanotubes in trenches and structures formed thereby 失效
标题翻译：在由此形成的沟槽和结构中引入纳米管
公开(公告)号：US20060141222A1
公开(公告)日：2006-06-29
申请号：US11026320
申请日：2004-12-29
申请人： Paul Fischer , Anne Miller , Kenneth Cadien , Chris Barns
发明人： Paul Fischer , Anne Miller , Kenneth Cadien , Chris Barns
IPC分类号： B32B3/00
CPC分类号： B82Y10/00 , B82Y30/00 , H01L51/0012 , H01L51/0048 , H01L51/0052 , Y10S977/72 , Y10T428/24562 , Y10T428/24612 , Y10T428/24744
摘要： Methods of forming a microelectronic structure are described. Embodiments of those methods include providing a substrate comprising at least one opening, and then applying a nanotube slurry comprising at least one nanotube to the substrate, wherein the at least one nanotube is substantially placed within the at least one opening.
摘要翻译：描述形成微电子结构的方法。这些方法的实施方案包括提供包含至少一个开口的基底，然后将包含至少一个纳米管的纳米管浆料施加到所述基底，其中所述至少一个纳米管基本上放置在所述至少一个开口内。

4. 发明授权

US06825117B2 High PH slurry for chemical mechanical polishing of copper 失效
标题翻译：高PH浆料用于化学机械抛光铜
公开(公告)号：US06825117B2
公开(公告)日：2004-11-30
申请号：US09461158
申请日：1999-12-14
申请人： Anne E. Miller , A. Daniel Feller , Kenneth Cadien
发明人： Anne E. Miller , A. Daniel Feller , Kenneth Cadien
IPC分类号： H01L21302
CPC分类号： H01L21/3212 , C09K3/1463 , H01L21/7684
摘要： A slurry for copper polishing has a pH between 7.5 and 12. In a particular embodiment of the present invention, a slurry for polishing copper has a pH between 8 and 11.5, and includes a SiO2 abrasive, a (NH4)2S2O8 oxidizer, a benzotriazole corrosion inhibitor, and a K3PO4/K2HPO4 buffer. A copper polish slurry, in accordance with the present invention, operates with a high pH of greater than approximately 7.5. In this range the slurry has a low static etch due to formation of a robust, protective layer. This slurry may additionally have S2O8−2 or Fe(CN)6−3 as an oxidizer and can thus offer a high polish rate on the order of 7,000 to 10,000 angstroms per minute which does not decrease significantly during polishing. Such an inventive slurry offers a wide CMP process window such that the slurry and process parameters can be optimized to yield low recess, erosion, and dishing on patterned wafers.
摘要翻译：用于铜抛光的浆料的pH为7.5至12.在本发明的一个具体实施方案中，用于抛光铜的浆料的pH为8至11.5，并且包括SiO 2研磨剂，（NH 4）2 S 2 O 8氧化剂，苯并三唑缓蚀剂和K3PO4 / K2HPO4缓冲液。根据本发明的铜抛光浆料以大于约7.5的高pH操作。在该范围内，由于形成坚固的保护层，浆料具有低静态蚀刻。该浆液可另外具有作为氧化剂的S2O8或Fe（CN）6-3，因此能够提供每分钟7000至10,000埃的高抛光速率，这在抛光过程中不会显着降低。这种本发明的浆料提供了广泛的CMP工艺窗口，使得浆料和工艺参数可以被优化以在图案化的晶片上产生低的凹陷，侵蚀和凹陷。

5. 发明申请

US20130043393A1 NON-CONTACT MEASUREMENT OF THE DOPANT CONTENT OF SEMICONDUCTOR LAYERS 有权
标题翻译：非接触式测量半导体层的掺杂物含量
公开(公告)号：US20130043393A1
公开(公告)日：2013-02-21
申请号：US13696056
申请日：2011-05-03
申请人： E. Michael Heaven , Gordon Matthew Deans , Kenneth Cadien , Stephen Warren Blaine
发明人： E. Michael Heaven , Gordon Matthew Deans , Kenneth Cadien , Stephen Warren Blaine
IPC分类号： G01J5/08
CPC分类号： H01L22/12 , G01N21/3563 , G01N21/9501 , H01L2924/0002 , H01L2924/00
摘要： A system and method of non-contact measurement of the dopant content of semiconductor material by reflecting infrared (IR) radiation off of the material and splitting the radiation into two beams, passing each beam through pass band filters of differing wavelength ranges, comparing the level of energy passed through each filter and calculating the dopant content by referencing a correlation curve made up of known wafer dopant content for that system.
摘要翻译：通过将红外（IR）辐射反射离开材料并将辐射分解成两束，将每个光束通过不同波长范围的通带滤光片，来对半导体材料的掺杂剂含量进行非接触式测量的系统和方法，的能量通过每个滤波器并且通过参考由该系统的已知晶片掺杂剂含量组成的相关曲线来计算掺杂剂含量。

6. 发明授权

US07345479B2 Portable NMR device and method for making and using the same 有权
标题翻译：便携式NMR装置及其制造和使用方法
公开(公告)号：US07345479B2
公开(公告)日：2008-03-18
申请号：US11319773
申请日：2005-12-29
申请人： Chang-Min Park , Shriram Ramanathan , Patrick Morrow , Kenneth Cadien
发明人： Chang-Min Park , Shriram Ramanathan , Patrick Morrow , Kenneth Cadien
IPC分类号： G01V3/00
CPC分类号： G01N24/08 , B82Y30/00 , G01R33/302
摘要： An embodiment of the invention relates to a portable or handheld device for performing NMR analysis. The device comprises a console and a strip which can be placed into the console through a slot or other means. The strip comprises a sample holding place and a microcoil for generating an excitation magnetic field across a sample in the sample holding space. A permanent magnet is provided either by the console or the strip and generates a static magnetic field which, together with the excitation field, creates NMR within the sample. Other embodiments of the invention also encompass method of performing NMR analysis using the portable device and method of making such devices.
摘要翻译：本发明的实施例涉及用于执行NMR分析的便携式或手持式装置。该装置包括控制台和条，其可以通过槽或其他方式放置到控制台中。条带包括用于在样品保持空间中的样品上产生激发磁场的样品保持位置和微线圈。永久磁铁由控制台或条带提供，并产生静磁场，与磁场一起在样品内产生NMR。本发明的其他实施方案还包括使用便携式装置进行NMR分析的方法和制造这种装置的方法。

7. 发明授权

US07319323B2 Device and method using magnetic pattern on disk 有权
标题翻译：在磁盘上使用磁性图案的设备和方法
公开(公告)号：US07319323B2
公开(公告)日：2008-01-15
申请号：US11394160
申请日：2006-03-31
申请人： Chang-Min Park , Shriram Ramanathan , Kenneth Cadien
发明人： Chang-Min Park , Shriram Ramanathan , Kenneth Cadien
IPC分类号： G01V3/00
CPC分类号： G01N24/08 , G01N24/10 , G01R33/3806 , G01R33/3808 , G01R33/383
摘要： An embodiment of the invention relates to a device for performing NMR or ESR analysis. The device comprises a detection unit, a magnet, and a disk having a magnetic pattern. The detection unit comprises a sample holding space for holding a sample and a microcoil for detecting NMR or ESR signals generated within the sample. The magnet generates a static magnetic field within the sample. The disk and magnetic pattern, when rotating, generate an excitation magnetic field, which, together with the static magnetic field, creates an NMR or ESR within the sample. Other embodiments of the invention encompass methods for performing NMR or ESR analysis using the device and methods of making such devices.
摘要翻译：本发明的一个实施方案涉及用于进行NMR或ESR分析的装置。该装置包括检测单元，磁体和具有磁性图案的盘。检测单元包括用于保持样品的样品保持空间和用于检测在样品内产生的NMR或ESR信号的微线圈。磁体在样品内产生静态磁场。盘和磁图在旋转时产生激励磁场，其与静磁场一起在样品内产生NMR或ESR。本发明的其它实施方案包括使用该装置进行NMR或ESR分析的方法和制备这种装置的方法。

8. 发明申请

US20070152670A1 Portable NMR device and method for making and using the same 有权
标题翻译：便携式NMR装置及其制造和使用方法
公开(公告)号：US20070152670A1
公开(公告)日：2007-07-05
申请号：US11319773
申请日：2005-12-29
申请人： Chang-Min Park , Shriram Ramanathan , Patrick Morrow , Kenneth Cadien
发明人： Chang-Min Park , Shriram Ramanathan , Patrick Morrow , Kenneth Cadien
IPC分类号： G01V3/00
CPC分类号： G01N24/08 , B82Y30/00 , G01R33/302
摘要： An embodiment of the invention relates to a portable or handheld device for performing NMR analysis. The device comprises a console and a strip which can be placed into the console through a slot or other means. The strip comprises a sample holding place and a microcoil for generating an excitation magnetic field across a sample in the sample holding space. A permanent magnet is provided either by the console or the strip and generates a static magnetic field which, together with the excitation field, creates NMR within the sample. Other embodiments of the invention also encompass method of performing NMR analysis using the portable device and method of making such devices.
摘要翻译：本发明的实施例涉及用于执行NMR分析的便携式或手持式装置。该装置包括控制台和条，其可以通过槽或其他方式放置到控制台中。条带包括用于在样品保持空间中的样品上产生激发磁场的样品保持位置和微线圈。永久磁铁由控制台或条带提供，并产生静磁场，与磁场一起在样品内产生NMR。本发明的其他实施方案还包括使用便携式装置进行NMR分析的方法和制造这种装置的方法。

9. 发明申请

US20070152669A1 INTEGRATED ON-CHIP NMR AND ESR DEVICE AND METHOD FOR MAKING AND USING THE SAME 有权
标题翻译：集成的片上NMR和ESR装置及其制造和使用方法
公开(公告)号：US20070152669A1
公开(公告)日：2007-07-05
申请号：US11319755
申请日：2005-12-29
申请人： Chang-Min Park , Shriram Ramanathan , Patrick Morrow , Kenneth Cadien
发明人： Chang-Min Park , Shriram Ramanathan , Patrick Morrow , Kenneth Cadien
IPC分类号： G01V3/00
CPC分类号： G01R33/302 , B82Y30/00 , G01N24/08 , G01N24/10
摘要： An embodiment of the invention relates to an integrated on-chip NMR or ESR device for performing chemical analysis and medical diagnostics. Specifically, the device contains, on a single substrate, a sample holding space, a magnet for generating a static magnetic field across the sample holding space and a microcoil for generating an excitation magnetic field across sample holding space. The magnetic fields are able to create NMR or ESR within a sample in the sample holding space and collect and/or process the signals from the NMR or ESR. The substrate may comprise an array of microcoils and sample holding spaces for performing multiple NMR or ESR analysis, such as multiple DNA analysis. Other embodiments of the invention relate methods for fabrication such devices and methods for performing NMR or ESR analysis using such devices.
摘要翻译：本发明的实施例涉及用于进行化学分析和医学诊断的集成的片上NMR或ESR装置。具体地，该装置在单个基板上包含样品保持空间，用于在样品保持空间上产生静态磁场的磁体和用于在样品保持空间上产生激励磁场的微线圈。磁场能够在样品保持空间中的样品内产生NMR或ESR，并收集和/或处理来自NMR或ESR的信号。底物可以包括用于进行多个NMR或ESR分析的微量线圈和样品保持空间的阵列，例如多重DNA分析。本发明的其它实施例涉及制造这种装置的方法和使用这种装置进行NMR或ESR分析的方法。

10. 发明申请

US20060128144A1 Interconnects having a recessed capping layer and methods of fabricating the same 审中-公开
标题翻译：具有凹陷封盖层的互连件及其制造方法
公开(公告)号：US20060128144A1
公开(公告)日：2006-06-15
申请号：US11013891
申请日：2004-12-15
申请人： Hyun-Mog Park , Kenneth Cadien
发明人： Hyun-Mog Park , Kenneth Cadien
IPC分类号： H01L21/4763
CPC分类号： H01L21/76849 , H01L21/7684 , H01L21/76865 , H01L21/76883
摘要： Apparatus and methods of fabricating an interconnect having a recessed capping layer. An embodiment of the present invention relates to the fabrication of an interconnect for a microelectronic device which includes a recessed capping layer, which substantially eliminates topography issues present in the known devices and provides improved encapsulation of the interconnect to prevent electromigration of the conductive material thereof.
摘要翻译：制造具有凹陷封盖层的互连的装置和方法。本发明的实施例涉及一种用于微电子器件的互连的制造，其包括凹陷封盖层，其基本上消除了已知器件中存在的形貌问题，并且提供了互连的改进的封装以防止其导电材料的电迁移。

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