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    • 2. 发明授权
    • Safety system for overhead transport vehicle
    • 架空运输车辆安全系统
    • US06779760B2
    • 2004-08-24
    • US10324407
    • 2002-12-19
    • Cheng-Chang ChangLi-Ren LinChien-Jung Huang
    • Cheng-Chang ChangLi-Ren LinChien-Jung Huang
    • G01N900
    • H01L21/6773G01S17/88G01V8/10H01L21/67259H01L21/67733H01L21/67736
    • A safety system for an overhead transport (OHT) vehicle. In one embodiment, the safety system may include a pair of safety panels provided on opposite sides of the load and unload ports on a tool or stocker. An overhead sensor is provided on the OHT and is operably connected to a light curtain on the tool. In the event that the overhead sensor detects an obstruction in the travel path of the OHT during loading of a pod or cassette into the tool or stocker, the light curtain transmits an emergency stop signal to the tool or stocker controller, which terminates further loading operation of the OHT. In another embodiment, the light curtain assumes the look-down sensing function of the overhead sensor in the event that tool components interfere with the look-down function of the overhead sensor.
    • 架空运输(OHT)车辆的安全系统。 在一个实施例中,安全系统可以包括设置在工具或储料器上的负载和卸载端口的相对侧上的一对安全面板。 在OHT上设置一个顶置式传感器,并可操作地连接到工具上的光幕。 如果架空传感器检测到将货舱或卡盘装载到工具或储料架内的OHT的行进路径中的障碍物,则光幕将紧急停止信号传送到工具或储料柜控制器,从而终止进一步的装载操作 的OHT。 在另一个实施例中,在工具部件干扰架空传感器的俯视功能的情况下,光幕采用架空传感器的俯视感测功能。
    • 5. 发明授权
    • Method for aligning a loadport to an overhead hoist transport system
    • 将负载运动对准起重运输系统的方法
    • US07261508B2
    • 2007-08-28
    • US10127111
    • 2002-04-22
    • Li-Ren LinShi-Ming WangCheng-Chang Chang
    • Li-Ren LinShi-Ming WangCheng-Chang Chang
    • H21L21/677
    • H01L21/67775
    • A method for aligning a loadport of a process machine to an overhead hoist transport (OHT) system which can be carried out by first providing an OHT rail overhanging a cleanroom floor; setting a reference point in the cleanroom in proximity to the OHT rail; marking on the cleanroom floor boundary reference lines for each row of process machines based on the reference point; positioning a process machine on the cleanroom floor with a boundary line of the machine aligned to the boundary reference line; mounting a loadport onto the process machine; and fine tuning a center line of the loadport to a reference line on the floor that is 200 mm apart from and parallel to the boundary reference line.
    • 一种用于将加工机器的加载口与顶置式起重机运输(OHT)系统对准的方法,其可以通过首先提供悬挂在净室地板上的OHT导轨来执行; 在OHT铁路附近的无尘室设置参考点; 基于参考点,对每行加工机床的洁净室地板边界参考线进行标记; 将加工机器放置在洁净室地板上,机器的边界线与边界参考线对齐; 将加载端口安装到加工机器上; 并将负载端口的中心线微调到距离边界参考线200平方米的地板上的参考线。
    • 8. 发明授权
    • Method for controlling lots dispatches of tool groups
    • 控制工具组批量分配的方法
    • US06256548B1
    • 2001-07-03
    • US09074539
    • 1998-05-08
    • Li-Ren Lin
    • Li-Ren Lin
    • G06F1900
    • G05B19/418G05B2219/31266G06Q10/08Y02P90/02Y02P90/20Y02P90/28
    • The present invention discloses a method for controlling lots' dispatch of tool groups, and all the lots can be transferred to correct places for further processing. The lots are transferred to the storage places of the tool when there is only a single tool for the next process. A decision step is performed for deciding whether the storage places of the next tool group and the next-next tool group overlap when the next process contains a tool group. If there are overlapped storage places, then the lots will be moved to the overlapped storage place having minimum loading. When there is no overlapped storage place, the lots will be dispatched to the storage place having minimum loading among the next tool group. All the lots can be processed with at minimum moving steps, and all the tools perform their processes under balance loading whenever the productions increase or decrease.
    • 本发明公开了一种用于控制工具组批量分配的方法,所有批次都可以转移到正确的位置进行进一步处理。 当只有一个工具用于下一个过程时,批次将被转移到工具的存储位置。 执行决定步骤,用于当下一个进程包含工具组时,决定下一个工具组和下一个下一个工具组的存储位置是否重叠。 如果存在重叠的存放位置,则批次将被移动到具有最小负载的重叠存储位置。 当没有重叠的存放位置时,批次将被分派到下一个工具组中具有最小装载量的存储位置。 所有的批次可以以最小的移动步骤进行处理,并且所有工具在生产增加或减少的情况下均衡加载。
    • 10. 发明授权
    • Wireless wafer carrier identification and enterprise data synchronization
    • 无线晶圆载体识别和企业数据同步
    • US07158850B2
    • 2007-01-02
    • US10172089
    • 2002-06-14
    • Chien-Fei ChengBruce ChenYuan-Ching LuLi-Ren LinShi-Ming WangPei-Chen Yeh
    • Chien-Fei ChengBruce ChenYuan-Ching LuLi-Ren LinShi-Ming WangPei-Chen Yeh
    • G06F19/00
    • G06Q10/06
    • A semiconductor fabrication enterprise includes fabrication equipment, transportable containers for work—in—process and an enterprise information system. The transportable containers have associated radio frequency tags having identification codes uniquely identifying the carriers in the fabrication process. The enterprise information system contains data corresponding to each such identification code. The identification codes are read by a radio frequency interrogation device, and the radio frequency interrogation device carries out transactions with the enterprise data system to transfer the data corresponding to the identification codes to the radio frequency interrogation device. The radio frequency tags may be adapted for read/write functionality allowing for writing data to the radio frequency tags and synchronization of radio frequency tag data and enterprise information system data.
    • 半导体制造企业包括制造设备,在制品运输容器和企业信息系统。 可移动容器具有相关联的射频标签,其具有唯一地识别制造过程中的载体的识别码。 企业信息系统包含与每个这样的识别码对应的数据。 识别码由射频询问装置读取,射频询问装置与企业数据系统进行交易,将与识别码对应的数据传送给射频询问装置。 射频标签可以适于读/写功能,允许向射频标签写入数据,并且对射频标签数据和企业信息系统数据进行同步。