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    • 2. 发明授权
    • High speed piezoelectric optical system with tunable focal length
    • 具有可调谐焦距的高速压电光学系统
    • US07826144B2
    • 2010-11-02
    • US12115142
    • 2008-05-05
    • Mark J. Mescher
    • Mark J. Mescher
    • G02B1/06
    • G02B3/14G02B26/0825G02B26/0875
    • A varifocal optical system includes a substantially circular membrane deposited on a substrate, and a ring-shaped PZT thin film deposited on the outer portion of the circular membrane. The membrane may be a MEMS-micromachined membrane, made of thermal oxide, polysilicon, ZrO2 and SiO2. The membrane is initially in a buckled state, and may function as a mirror or a lens. Application of an electric voltage between an inner and outer electrode on the piezoelectric thin film induces a lateral strain on the PZT thin film, thereby altering the curvature of the membrane, and thus its focal length. Focal length tuning speeds as high as 1 MHz have been demonstrated. Tuning ranges of several hundred microns have been attained. The varifocal optical system can be used in many applications that require rapid focal length tuning, such as optical switching, scanning confocal microscopy, and vibration compensation in optical storage disks.
    • 变焦光学系统包括沉积在基底上的基本圆形的膜和沉积在圆形膜的外部上的环形PZT薄膜。 膜可以是由热氧化物,多晶硅,ZrO 2和SiO 2制成的MEMS微加工膜。 膜最初处于弯曲状态,并且可以用作镜子或透镜。 在压电薄膜上的内部和外部电极之间的电压施加在PZT薄膜上引起横向应变,从而改变膜的曲率,从而改变其焦距。 焦距调谐速度高达1 MHz已被证明。 达到数百微米的调谐范围。 变焦光学系统可用于需要快速焦距调谐的许多应用中,例如光学切换,扫描共焦显微镜和光学存储盘中的振动补偿。