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1. 发明申请

US20150293243A1 CLOSED LOOP CONTROL TECHNIQUES FOR DISPLACEMENT SENSORS WITH OPTICAL READOUT 有权
标题翻译：用于光读出的位移传感器闭环控制技术
公开(公告)号：US20150293243A1
公开(公告)日：2015-10-15
申请号：US14434006
申请日：2013-03-15
申请人： Bradley Dean AVENSON , Matthew Raymon CHRISTENSEN , Caesar Theodore GARCIA , Neal Allen HALL , Abiden Guclu ONARAN , James Coe SCHLICHER , Ahmed ZAATARI , SILICON AUDIO INC.
发明人： Bradley Dean Avenson , Matthew Raymon Christensen , Caesar Theodore Garcia , Neal Allen Hall , Abidin Guclu Onaran , James Coe Schlicher , Ahmad Zaatari
IPC分类号： G01V1/18 , G01V13/00 , G01H9/00
CPC分类号： G01V1/181 , G01B11/00 , G01B21/16 , G01D5/20 , G01H9/00 , G01H9/006 , G01P15/093 , G01P15/132 , G01R27/2611 , G01V1/18 , G01V1/182 , G01V13/00
摘要： In one aspect, an apparatus is disclosed comprising: a housing; a proof mass movable within the housing; an optical element mounted on one of the housing and the proof mass; a reflective element on the other one of the housing and the proof mass; a light source configured to illuminate grating and minor; and one or more detectors configured to detect light incident from the reflective element and the diffractive element and generate a signal indicative of the relative displacement of proof mass and the housing.
摘要翻译：一方面，公开了一种装置，包括：壳体; 在壳体内可移动的证明物质; 安装在所述壳体和所述检测质量块中的一个上的光学元件; 在另一个壳体和检验质量块上的反射元件; 配置为照亮光栅并且稍微的光源; 以及一个或多个检测器，被配置为检测从反射元件和衍射元件入射的光，并产生指示证明物质和壳体的相对位移的信号。

2. 发明授权

US08488973B2 Signal processing within an optical microphone 有权
标题翻译：光学麦克风内的信号处理
公开(公告)号：US08488973B2
公开(公告)日：2013-07-16
申请号：US13025066
申请日：2011-02-10
申请人： Brad D. Avenson , Caesar T. Garcia , Neal Allen Hall , Abidin Guclu Onaran
发明人： Brad D. Avenson , Caesar T. Garcia , Neal Allen Hall , Abidin Guclu Onaran
IPC分类号： H04B10/02 , H04B10/12
CPC分类号： H04R23/008 , H04R1/086 , H04R31/00 , H04R2410/00 , H04R2499/11
摘要： Method for performing signal processing for an optical microphone. First and second signals corresponding to at least two beams may be generated or received. The first and second signals may be complementary, and may be based on signals provided by one or more photo detectors that receive the at least two beams after the beams return from a sensing structure. The first signal and the second signal may be subtracted to produce a third signal. A position of the sensing structure may be adjusted to cause the third signal to reach a first value, where the adjusting may be performed based on the third signal, and an audio output signal may be provided based on the third signal.
摘要翻译：用于执行光学麦克风的信号处理的方法。可以生成或接收与至少两个波束对应的第一和第二信号。第一和第二信号可以是互补的，并且可以基于在从感测结构返回的光束之后接收至少两个光束的一个或多个光电检测器提供的信号。可以减去第一信号和第二信号以产生第三信号。可以调整感测结构的位置以使第三信号达到第一值，其中可以基于第三信号进行调整，并且可以基于第三信号提供音频输出信号。

3. 发明授权

US09702992B2 Closed loop control techniques for displacement sensors with optical readout 有权
公开(公告)号：US09702992B2
公开(公告)日：2017-07-11
申请号：US14434006
申请日：2013-03-15
申请人： SILICON AUDIO SEISMIC, LLC , Bradley Dean Avenson , Matthew Raymon Christensen , Caesar Theodore Garcia , Neal Allen Hall , Abiden Guclu Onaran , James Coe Schlicher , Ahmad Zaatari
发明人： Bradley Dean Avenson , Matthew Raymon Christensen , Caesar Theodore Garcia , Neal Allen Hall , Abidin Guclu Onaran , James Coe Schlicher , Ahmad Zaatari
IPC分类号： G01V1/18 , G01H9/00 , G01B11/00 , G01D5/20 , G01R27/26 , G01B21/16 , G01P15/093 , G01P15/13 , G01V13/00
CPC分类号： G01V1/181 , G01B11/00 , G01B21/16 , G01D5/20 , G01H9/00 , G01H9/006 , G01P15/093 , G01P15/132 , G01R27/2611 , G01V1/18 , G01V1/182 , G01V13/00
摘要： In one aspect, an apparatus is disclosed comprising: a housing; a proof mass movable within the housing; an optical element mounted on one of the housing and the proof mass; a reflective element on the other one of the housing and the proof mass; a light source configured to illuminate grating and minor; and one or more detectors configured to detect light incident from the reflective element and the diffractive element and generate a signal indicative of the relative displacement of proof mass and the housing.

4. 发明授权

US07485847B2 Displacement sensor employing discrete light pulse detection 有权
标题翻译：采用离散光脉冲检测的位移传感器
公开(公告)号：US07485847B2
公开(公告)日：2009-02-03
申请号：US11297097
申请日：2005-12-08
申请人： Fahrettin Levent Degertekin , Wook Lee , Neal Allen Hall
发明人： Fahrettin Levent Degertekin , Wook Lee , Neal Allen Hall
IPC分类号： G01D5/36 , G02B27/42 , G02B5/18 , G01J1/32 , G01B11/02
CPC分类号： G01D5/38 , B33Y80/00 , G01D5/285
摘要： Optical sensors, and methods for operating optical sensors, are disclosed. One such sensor may include: a reflector positioned a distance from a reflective diffraction grating and a light source for providing light. A first portion of the light can be reflected from the reflective diffraction grating and a second portion of the light passes through the grating to the reflector and is reflected back through the diffraction grating. The sensor may further include a detector for sensing an intensity of light in an interference pattern formed by the first portion of the light reflected from the diffraction grating and the second portion of the light reflected from the reflector. The sensor includes a controller configured to modulate an emission of the light.
摘要翻译：公开了用于操作光学传感器的光学传感器和方法。一个这样的传感器可以包括：与反射衍射光栅相距一定距离的反射器和用于提供光的光源。光的第一部分可以从反射衍射光栅反射，并且光的第二部分通过光栅到达反射器并通过衍射光栅被反射回来。传感器还可以包括用于感测由从衍射光栅反射的光的第一部分和从反射器反射的光的第二部分形成的干涉图案中的光强度的检测器。传感器包括配置成调制光的发射的控制器。

5. 发明授权

US07116430B2 Highly-sensitive displacement-measuring optical device 有权
标题翻译：高灵敏度位移测量光学器件
公开(公告)号：US07116430B2
公开(公告)日：2006-10-03
申请号：US10704932
申请日：2003-11-10
申请人： Fahrettin Levent Degertekin , Neal Allen Hall , Wook Lee
发明人： Fahrettin Levent Degertekin , Neal Allen Hall , Wook Lee
IPC分类号： G01B11/02 , G01B9/02
CPC分类号： G01B11/026 , G01B9/02023 , G01B2290/30
摘要： The present invention relates to micron-scale displacement measurement devices. A first embodiment is a device that includes a substrate and a rigid structure suspended above the substrate to form a backside cavity. Formed in the rigid structure is a reflective diffraction grating positioned to reflect a first portion of an incident light and transmit a second portion of the incident light such that the second portion of the incident light is diffracted. The device also includes a membrane positioned a distance d above the reflective diffraction grating and at least a first photo-detector for receiving interference patterns produced from the first portion of the incident light reflected from the diffraction grating and the second portion of the incident light reflected from the membrane.
摘要翻译：本发明涉及微米级位移测量装置。第一实施例是一种装置，其包括基板和悬挂在基板上方的刚性结构以形成背侧空腔。形成在刚性结构中的反射衍射光栅被定位成反射入射光的第一部分并透射入射光的第二部分，使得入射光的第二部分被衍射。该装置还包括位于反射衍射光栅上方距离d处的膜和至少第一光电检测器，用于接收从衍射光栅反射的入射光的第一部分产生的干涉图案，并将入射光的第二部分反射从膜。

6. 发明申请

US20110194857A1 Signal Processing Within an Optical Microphone 有权
标题翻译：光学麦克风内的信号处理
公开(公告)号：US20110194857A1
公开(公告)日：2011-08-11
申请号：US13025066
申请日：2011-02-10
申请人： Brad D. Avenson , Caesar T. Garcia , Neal Allen Hall , Abidin Guclu Onaran
发明人： Brad D. Avenson , Caesar T. Garcia , Neal Allen Hall , Abidin Guclu Onaran
IPC分类号： H04B10/02
CPC分类号： H04R23/008 , H04R1/086 , H04R31/00 , H04R2410/00 , H04R2499/11
摘要： An optical microphone that may include a first substrate with one or more acoustic entry ports and a die over the one or more acoustic entry ports. The die may include a sensing structure for detecting acoustic vibrations received via the acoustic entry port(s) and may form a first cavity between the first substrate and the sensing structure. The microphone may include a light source within the first cavity, which may transmit laser light. The optical microphone may include photo detector(s) within the first cavity. The one or more photodetectors may be configured to receive the laser light after reflection from the sensing diaphragm to measure the acoustic vibrations of the sensing diaphragm. The microphone may also include a circuit and a lid, where the die, light source, photo detectors, and circuit are comprised within the cavity of the microphone. The circuit may perform signal processing signals from the photodetector(s).
摘要翻译：一种光学麦克风，其可以包括具有一个或多个声学输入端口的第一基板和一个或多个声学输入端口上的管芯。管芯可以包括用于检测通过声学入口接收的声振动的感测结构，并且可以在第一衬底和感测结构之间形成第一空腔。麦克风可以包括第一腔内的光源，其可以传输激光。光学麦克风可以包括第一腔内的光电探测器。一个或多个光电检测器可以被配置为在从感测膜片反射之后接收激光以测量感测膜片的声振动。麦克风还可以包括电路和盖子，其中管芯，光源，光电检测器和电路包括在麦克风的空腔内。电路可以执行来自光电探测器的信号处理信号。

7. 发明授权

US08391517B2 Optical microphone packaging 有权
标题翻译：光学麦克风包装
公开(公告)号：US08391517B2
公开(公告)日：2013-03-05
申请号：US13025054
申请日：2011-02-10
申请人： Brad D. Avenson , Caesar T. Garcia , Neal Allen Hall , Abidin Guclu Onaran
发明人： Brad D. Avenson , Caesar T. Garcia , Neal Allen Hall , Abidin Guclu Onaran
IPC分类号： H04R25/00
CPC分类号： H04R23/008 , H04R1/086 , H04R31/00 , H04R2410/00 , H04R2499/11
摘要： An optical microphone that may include a first substrate with one or more acoustic entry ports and a die over the one or more acoustic entry ports. The die may include a sensing structure for detecting acoustic vibrations received via the acoustic entry port(s) and may form a first cavity between the first substrate and the sensing structure. The microphone may include a light source within the first cavity, which may transmit laser light. The optical microphone may include photo detector(s) within the first cavity. The one or more photodetectors may be configured to receive the laser light after reflection from the sensing diaphragm to measure the acoustic vibrations of the sensing diaphragm. The microphone may also include a circuit and a lid, where the die, light source, photo detectors, and circuit are comprised within the cavity of the microphone. The circuit may perform signal processing signals from the photodetector(s).
摘要翻译：一种光学麦克风，其可以包括具有一个或多个声学输入端口的第一基板和一个或多个声学输入端口上的管芯。管芯可以包括用于检测经由声学入口接收的声振动的感测结构，并且可以在第一衬底和感测结构之间形成第一空腔。麦克风可以包括第一腔内的光源，其可以传输激光。光学麦克风可以包括第一腔内的光电探测器。一个或多个光电检测器可以被配置为在从感测膜片反射之后接收激光以测量感测膜片的声振动。麦克风还可以包括电路和盖子，其中管芯，光源，光电检测器和电路包括在麦克风的空腔内。电路可以执行来自光电探测器的信号处理信号。

8. 发明授权

US07518737B2 Displacement-measuring optical device with orifice 有权
标题翻译：带孔的位移测量光学装置
公开(公告)号：US07518737B2
公开(公告)日：2009-04-14
申请号：US11405053
申请日：2006-04-17
申请人： Neal Allen Hall , Fahrettin Levent Degertekin
发明人： Neal Allen Hall , Fahrettin Levent Degertekin
IPC分类号： G01B9/02 , G01B11/02
CPC分类号： G01B11/026 , G01B9/02051 , G01B2290/30 , G01D5/266 , H04R23/008
摘要： Micron-scale displacement measurement devices having enhanced performance characteristics are disclosed. One embodiment of a micron-scale displacement measurement device includes a phase-sensitive reflective diffraction grating for reflecting a first portion of an incident light and transmitting a second portion of the incident light such that the second portion of the incident light is diffracted. The device can further include a mechanical structure having a first region and a second region, the mechanical structure positioned a distance d above the diffraction grating and forming a wall of a cavity, the second portion of the incident light is reflected off of the first region of the structure such that an interference pattern is formed by the reflected first portion and the reflected second portion of the incident light. The device can further include an orifice formed in the cavity to provide for the passage of air between the inside and outside of the cavity.
摘要翻译：公开了具有增强的性能特性的微米尺度位移测量装置。微米尺度位移测量装置的一个实施例包括用于反射入射光的第一部分并透射入射光的第二部分的相敏反射衍射光栅，使得入射光的第二部分被衍射。该装置还可以包括具有第一区域和第二区域的机械结构，机械结构定位在衍射光栅上方的距离d并形成空腔的壁，入射光的第二部分被反射离开第一区域的结构，使得由入射光的反射的第一部分和反射的第二部分形成干涉图案。该装置还可以包括形成在空腔中的孔口，以在空腔的内部和外部之间提供空气的通过。

9. 发明授权

US07440117B2 Highly-sensitive displacement-measuring optical device 有权
标题翻译：高灵敏度位移测量光学器件
公开(公告)号：US07440117B2
公开(公告)日：2008-10-21
申请号：US11405051
申请日：2006-04-17
申请人： Fahrettin Levent Degertekin , Neal Allen Hall , Wook Lee
发明人： Fahrettin Levent Degertekin , Neal Allen Hall , Wook Lee
IPC分类号： G01B11/02 , G01B9/02
CPC分类号： G01B11/02 , G01D5/266
摘要： Micron-scale displacement measurement devices having enhanced performance characteristics are disclosed. One embodiment of a micron-scale displacement measurement device includes a phase-sensitive reflective diffraction grating for reflecting a first portion of an incident light and transmitting a second portion of the incident light such that the second portion of the incident light is diffracted. The device further includes a mechanical structure having a first region and a second region, the mechanical structure positioned a distance d above the diffraction grating, the second portion of the incident light is reflected off of the first region of the structure such that an interference pattern is formed by the reflected first portion and the reflected second portion of the incident light. The device can further include an electrode extending toward, but spaced a distance away from, the second region of the mechanical structure.
摘要翻译：公开了具有增强的性能特性的微米尺度位移测量装置。微米尺度位移测量装置的一个实施例包括用于反射入射光的第一部分并透射入射光的第二部分的相敏反射衍射光栅，使得入射光的第二部分被衍射。该装置还包括具有第一区域和第二区域的机械结构，机械结构定位在衍射光栅上方的距离d处，入射光的第二部分被反射离开结构的第一区域，使得干涉图案由反射的第一部分和入射光的反射的第二部分形成。该装置还可以包括延伸到机械结构的第二区域的距离但间隔开距离的电极。

10. 发明申请

US20110194711A1 Optical Microphone Packaging 有权
标题翻译：光学麦克风包装
公开(公告)号：US20110194711A1
公开(公告)日：2011-08-11
申请号：US13025054
申请日：2011-02-10
申请人： Brad D. Avenson , Caesar T. Garcia , Neal Allen Hall , Abidin Guclu Onaran
发明人： Brad D. Avenson , Caesar T. Garcia , Neal Allen Hall , Abidin Guclu Onaran
IPC分类号： H04R1/00
CPC分类号： H04R23/008 , H04R1/086 , H04R31/00 , H04R2410/00 , H04R2499/11
摘要： An optical microphone that may include a first substrate with one or more acoustic entry ports and a die over the one or more acoustic entry ports. The die may include a sensing structure for detecting acoustic vibrations received via the acoustic entry port(s) and may form a first cavity between the first substrate and the sensing structure. The microphone may include a light source within the first cavity, which may transmit laser light. The optical microphone may include photo detector(s) within the first cavity. The one or more photodetectors may be configured to receive the laser light after reflection from the sensing diaphragm to measure the acoustic vibrations of the sensing diaphragm. The microphone may also include a circuit and a lid, where the die, light source, photo detectors, and circuit are comprised within the cavity of the microphone. The circuit may perform signal processing signals from the photodetector(s).
摘要翻译：一种光学麦克风，其可以包括具有一个或多个声学输入端口的第一基板和一个或多个声学输入端口上的管芯。管芯可以包括用于检测通过声学入口接收的声振动的感测结构，并且可以在第一衬底和感测结构之间形成第一空腔。麦克风可以包括第一腔内的光源，其可以传输激光。光学麦克风可以包括第一腔内的光电探测器。一个或多个光电检测器可以被配置为在从感测膜片反射之后接收激光以测量感测膜片的声振动。麦克风还可以包括电路和盖子，其中管芯，光源，光电检测器和电路包括在麦克风的空腔内。电路可以执行来自光电探测器的信号处理信号。

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