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    • 5. 发明申请
    • STRUCTURES AND METHODS FOR HIGH-EFFICIENCY PYRAMIDAL THREE-DIMENSIONAL SOLAR CELLS
    • 高效率三维太阳能电池的结构和方法
    • US20110108098A1
    • 2011-05-12
    • US12615383
    • 2009-11-10
    • Pawan Kapur
    • Pawan Kapur
    • H01L31/0352
    • H01L31/022425H01L31/02167H01L31/02363H01L31/02366H01L31/035281H01L31/03529H01L31/0445H01L31/068H01L31/182H01L31/1896Y02E10/546Y02E10/547Y02P70/521
    • The present disclosure enables high-volume cost effective production of three-dimensional thin film solar cell (3-D TFSC) substrates. First, the present disclosure discloses pyramid-like unit cell structure 16 and 50 which enable epitaxial growth through their open pyramidal structure. The present disclosure than gives four 3-D TFSC embodiments 70, 82, 100, and 110 which may combined as necessary. A basic 3-D TFSC having a substrate, emitter, oxidation on the emitter, front and back metal contacts allows simple processing. Other embodiments disclose a selective emitter, selective backside metal contact, and front-side SiN ARC layers. Several processing methods including process flows 150, 200, 250, 300, and 350 enable production of these 3-D TFSC. Further, the present disclosure enables higher throughput through the use of dual sided template 400. By processing the substrate in the template, the present disclosure increases yield and reduces processing steps.
    • 本公开使得能够大量成本有效地生产三维薄膜太阳能电池(3-D TFSC)基板。 首先,本公开公开了金字塔形单元结构16和50,其能够通过其开放金字塔形结构进行外延生长。 本公开不是给出可以根据需要组合的四个三维TFSC实施例70,82,100和110。 在发射器,前后金属触点上具有衬底,发射极,氧化的基本3-D TFSC允许简单的处理。 其他实施例公开了选择性发射极,选择性背侧金属接触和前侧SiN ARC层。 包括工艺流程150,200,250,300和350的几种处理方法使得能够生产这些3-D TFSC。 此外,本公开通过使用双面模板400可实现更高的生产量。通过在模板中处理衬底,本公开增加了产量并降低了处理步骤。