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    • 2. 发明授权
    • Implementation of avalanche photo diodes in (Bi)CMOS processes
    • (Bi)CMOS工艺中雪崩光电二极管的实现
    • US07759650B2
    • 2010-07-20
    • US12298206
    • 2007-04-10
    • Anco HeringaThomas FrachPrabhat Agarwal
    • Anco HeringaThomas FrachPrabhat Agarwal
    • G01T1/24
    • H01L31/115H01L27/1446H01L31/107H01L31/1804Y02E10/547Y02P70/521
    • A radiation detector (46) includes a semiconductor layer(s) (12) formed on a substrate (14) and a scintillator (30) formed on the semiconductor layer(s) (12). The semiconductor layer(s) (12) includes an n-doped region (16) disposed adjacent to the substrate (14), and a p-doped region (18) disposed adjacent to the n-doped region (16). A trench (20) is formed within the semiconductor layer(s) (12) and around the p-doped region (18) and is filled with a material (22) that reduces pn junction curvature at the edges of the pn junction, which reduces breakdown at the edges. The scintillator (30) is disposed over and optically coupled to the p-doped regions (18). The radiation detector (46) further includes at least one conductive electrode (24) that electrically contacts the n-doped region.
    • 辐射检测器(46)包括形成在衬底(14)上的半导体层(12)和形成在半导体层(12)上的闪烁体(30)。 半导体层(12)包括邻近衬底(14)设置的n掺杂区域(16)和邻近于n掺杂区域(16)设置的p掺杂区域(18)。 沟槽(20)形成在半导体层(12)内并且围绕p掺杂区域(18)并且填充有减小pn结边缘处的pn结曲率的材料(22),其中 减少边缘的破坏。 闪烁体(30)设置在p掺杂区域(18)上并且光耦合到p掺杂区域(18)。 辐射检测器(46)还包括与n掺杂区域电接触的至少一个导电电极(24)。
    • 5. 发明申请
    • Semiconductor Device with a Bipolar Transistor and Method of Manufacturing Such a Device
    • 具有双极晶体管的半导体器件及其制造方法
    • US20080203434A1
    • 2008-08-28
    • US12088719
    • 2006-09-22
    • Philippe Meunier-BeillardRaymond James DuffyPrabhat AgarwalGodfridus Adrianus Maria Hurkx
    • Philippe Meunier-BeillardRaymond James DuffyPrabhat AgarwalGodfridus Adrianus Maria Hurkx
    • H01L29/737H01L21/331
    • H01L29/7378H01L29/0817H01L29/66242
    • The invention relates to a semiconductor device (10) with a substrate and a semiconductor body of silicon comprising a bipolar transistor with an emitter region (1), a base region (2) and a collector region (3) which are respectively of the N-type conductivity, the P-type conductivity and the N-type conductivity by the provision of suitable doping atoms, wherein the base region (2) comprises a mixed crystal of silicon and germanium, the base region (2) is separated from the emitter region by an intermediate region (22) of silicon having a doping concentration which is lower than the doping concentration of the emitter region (1) and with a thickness smaller than the thickness of the emitter region (1) and the emitter region (1) comprises a sub-region comprising a mixed crystal of silicon and germanium which is positioned at the side of emitter region (1) remote from the intermediate region (22). According to the invention, the sub-region comprising the mixed crystal of silicon and germanium extend substantially through the whole emitter region (1) up to the interlace with the intermediate region (22) and the doping atoms of the emitter region (1) are arsenic atoms. Such a device has a very steep n-type doping profile (50) and a very steep p-type doping profile (20) at or within the intermediate region (22) and thus excellent high-frequency behavior with a high cut-off frequency (fr). Preferably the emitter region (1) is doped with an arsenic implantation (I) in its upper half, the final doping profile being formed after an RTA. The invention also comprises a method of manufacturing a device (10) according to the invention.
    • 本发明涉及一种具有衬底和硅半导体本体的半导体器件(10),其包括具有发射极区(1),基极区(2)和集电极区(3)的双极晶体管,所述发射极区分别为N 通过提供合适的掺杂原子,P型导电性和N型导电性,其中基区(2)包括硅和锗的混合晶体,基极区(2)与发射极分离 通过具有低于发射极区域(1)的掺杂浓度的掺杂浓度并且具有小于发射极区域(1)和发射极区域(1)的厚度的厚度的硅的中间区域(22) 包括位于远离中间区域(22)的发射极区域(1)侧的硅和锗的混合晶体的子区域。 根据本发明,包括硅和锗的混合晶体的子区域基本上延伸穿过整个发射极区域(1)直到与中间区域(22)交错,并且发射极区域(1)的掺杂原子是 砷原子 这种器件在中间区域(22)处或中间区域(22)内具有非常陡峭的n型掺杂分布(50)和非常陡的p型掺杂分布(20),因此具有高截止频率的极好的高频特性 (fr)。 优选地,发射极区域(1)在其上半部分掺杂有砷注入(I),最后的掺杂分布在RTA之后形成。 本发明还包括一种制造根据本发明的装置(10)的方法。
    • 7. 发明申请
    • Digital Voltage Level Shifter
    • 数字电压电平变换器
    • US20070279091A1
    • 2007-12-06
    • US11663406
    • 2004-09-22
    • Mayank GoelPrabhat Agarwal
    • Mayank GoelPrabhat Agarwal
    • H03K3/356
    • H03K3/356147H03K17/102
    • A digital voltage level shifter for converting an input signal with a low voltage swing to an output signal with a high voltage swing comprises a first inverter stage for generating an inverted signal from an input signal, the inverted signal having a voltage swing between a core voltage and ground, and a second inverter stage for producing an anti-phase signal from the inverted input signal, the anti-phase signal having a voltage swing between the core voltage and ground. The first and second inverters each drive a respective thin gate NMOS transistor connected in cascode with a respective NMOS transistor. The sources of the first and second thin gate NMOS transistors are connected to ground. The gates of the NMOS transistors are connected to the output of the respective inverters through a respective capacitor and are referenced to the core voltage through a respective resistor. The drains of the NMOS transistors are connected to an output circuit to provide an output signal having a voltage higher than the core voltage.
    • 用于将具有低电压摆幅的输入信号转换为具有高电压摆幅的输出信号的数字电压电平移位器包括用于从输入信号产生反相信号的第一反相器级,反相信号具有在核心电压 以及用于从反相输入信号产生反相信号的第二反相器级,反相信号在核心电压和地之间具有电压摆幅。 第一和第二反相器各自驱动以共源共栅连接的相应的薄栅极NMOS晶体管与相应的NMOS晶体管。 第一和第二薄栅NMOS晶体管的源极连接到地。 NMOS晶体管的栅极通过相应的电容器连接到各个反相器的输出,并且通过相应的电阻器参考核心电压。 NMOS晶体管的漏极连接到输出电路,以提供具有高于核心电压的电压的输出信号。