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    • 6. 发明授权
    • Dual channel d.c. low noise measurement system and test methodology
    • 双通道直流 低噪声测量系统和测试方法
    • US5563517A
    • 1996-10-08
    • US442556
    • 1995-05-16
    • Glenn A. BieryDaniel M. BoyneKenneth P. RodbellRichard G. SmithMichael H. Wood
    • Glenn A. BieryDaniel M. BoyneKenneth P. RodbellRichard G. SmithMichael H. Wood
    • G01R31/26G01R29/26H01L21/66
    • G01R29/26
    • A test system having an improved physical layout and electrical design allows the 1/f noise of metal interconnects to be measured at levels close to that of Johnson or thermal noise. A detailed description of examples of operation of the test system provides evidence of the effectiveness of the test system in minimizing system noise to a level significantly lower than Johnson noise. This permits quantitative measurment of the noise contribution attributable to variations in cross-sectional area of connections for various applications and for qualitative prediction of electromigration lifetimes of metal films, particularly aluminum, having different microstructures. The test system includes an enclosure which includes several nested groups of housings including a sample oven within a device under test box which is, in turn, contained within the system enclosure. Wire wound resistors powered by a DC power supply are used to provide heating without interfering with measurement of 1/f noise of a device under test (D.U.T.). A biasing circuit and a bank of batteries are also provided with separate enclosures within the system enclosure.
    • 具有改进的物理布局和电气设计的测试系统允许以接近Johnson或热噪声的水平测量金属互连的1 / f噪声。 测试系统操作示例的详细描述提供了测试系统在将系统噪声降至明显低于约翰逊噪声水平的有效性的证据。 这允许由于各种应用的连接的横截面积的变化以及用于定性预测具有不同微结构的金属膜,特别是铝的电迁移寿命的噪声贡献的定量测量。 该测试系统包括一个外壳,该外壳包括若干嵌套的外壳组,其中包括在被测箱的设备内的样品烘箱,该烘箱也被包含在系统外壳内。 由直流电源供电的绕线电阻器用于提供加热,而不会干扰被测器件(D.U.T.)的1 / f噪声的测量。 偏置电路和电池组还在系统外壳内设置有单独的外壳。