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    • 3. 发明授权
    • Detector and energy analyzer for energetic-hydrogen in beams and plasmas
    • 梁和等离子体中能量氢的检测器和能量分析仪
    • US4782302A
    • 1988-11-01
    • US925590
    • 1986-10-31
    • Robert J. BastaszRobert C. HughesWilliam R. Wampler
    • Robert J. BastaszRobert C. HughesWilliam R. Wampler
    • G01N27/414G01T1/24H01L31/118G01N27/40G01N27/12
    • G01N27/129G01T1/24H01L31/118
    • A detector for detecting energetic hydrogen ions and atoms ranging in energy from about 1 eV up to 1 keV in an evacuated environment includes a Schottky diode with a palladium or palladium-alloy gate metal applied to a silicondioxide layer on an n-silicon substrate. An array of the energetic-hydrogen detectors having a range of energy sensitivities form a plasma energy analyzer having a rapid response time and a sensitivity for measuring fluxes of energetic hydrogen. The detector is sensitive to hydrogen and its isotopes but is insensitive to non-hydrogenic particles. The array of energetic-hydrogen detectors can be formed on a single silicon chip, with thin-film layers of gold metal applied in various thicknesses to successive detectors in the array. The gold layers serve as particle energy-filters so that each detector is sensitive to a different range of hydrogen energies.
    • 在真空环境中检测能量氢离子和能量范围从约1eV到1keV的检测器包括施加到n硅衬底上的二氧化硅层上的钯或钯合金栅极金属的肖特基二极管。 具有一定范围的能量敏感度的能量 - 氢气检测器的阵列形成等离子体能量分析仪,其具有快速响应时间和测量能量氢通量的灵敏度。 检测器对氢及其同位素敏感,但对非氢的颗粒不敏感。 能量氢检测器阵列可以形成在单个硅芯片上,金属金属薄膜层以不同厚度施加到阵列中的连续检测器。 金层用作粒子能量过滤器,使得每个检测器对不同范围的氢能敏感。