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    • 5. 发明授权
    • Seal configuration for a system for continuous deposition of a thin film layer on a substrate
    • 用于在衬底上连续沉积薄膜层的系统的密封构造
    • US08361229B2
    • 2013-01-29
    • US12765316
    • 2010-04-22
    • Max William ReedRussell Weldon BlackScott Daniel Feldman-PeabodyMark Jeffrey Pavol
    • Max William ReedRussell Weldon BlackScott Daniel Feldman-PeabodyMark Jeffrey Pavol
    • C23C16/00
    • H01L31/1876C23C14/0629C23C14/24C23C14/562H01L31/1828Y02E10/543Y02P70/521
    • An apparatus and associated method of operation is provided for vapor deposition of a sublimated source material, such as CdTe, as a thin film on discrete photovoltaic (PV) module substrates that are conveyed in a continuous, non-stop manner through the apparatus. The apparatus includes a deposition head configured for receipt and sublimation of the source material. The deposition head has a distribution plate at a defined distance above a horizontal conveyance plane of an upper surface of the substrates conveyed through a deposition area within the apparatus. The sublimated source material moves through the distribution plate and deposits onto the upper surface of the substrates as they are conveyed through the deposition area. The substrates move into and out of the deposition area through entry and exit slots that are defined by transversely extending entrance and exit seals. The seals are disposed at a gap distance above the upper surface of the substrates that is less than the distance or spacing between the upper surface of the substrates and the distribution plate. The seals have a ratio of longitudinal length (in the direction of conveyance of the substrates) to gap distance of from about 10:1 to about 100:1.
    • 提供了一种装置和相关联的操作方法,用于将升华的源材料(例如CdTe)蒸发沉积在离散的光伏(PV)模块衬底上,该薄膜以连续且不间断的方式通过该设备输送。 该装置包括被配置为用于接收和升华源材料的沉积头。 沉积头具有在通过设备内的沉积区域输送的基板的上表面的水平输送平面上方的限定距离处的分布板。 升华的源材料通过分布板移动,并且在通过沉积区域被输送时沉积到基板的上表面上。 基板通过由横向延伸的入口和出口密封限定的入口和出口槽进入和离开沉积区域。 密封件设置在基板的上表面之上的间隙距离处,该距离小于基板的上表面与分布板之间的距离或间隔。 密封件具有纵向长度(基板的输送方向)与间隙距离的比例为约10:1至约100:1。