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    • 4. 发明授权
    • Continuous copper electroplating method
    • 连续铜电镀方法
    • US07988842B2
    • 2011-08-02
    • US12179352
    • 2008-07-24
    • Shinji TachibanaKoji ShimizuTomohiro KawaseNaoyuki OmuraToshihisa IsonoKazuyoshi Nishimoto
    • Shinji TachibanaKoji ShimizuTomohiro KawaseNaoyuki OmuraToshihisa IsonoKazuyoshi Nishimoto
    • C25D21/18C25B9/00
    • C25D21/18
    • A continuous copper electroplating method wherein copper is continuously plated on a workpiece to be placed in a plating vessel accommodating a copper sulfate plating bath containing organic additives by use of a soluble or insoluble anode and a workpiece as a cathode, the method including overflowing the plating bath from the plating vessel in an overflow vessel under which the plating bath in the overflow vessel is returned to the plating vessel, providing an oxidative decomposition vessel, and returning a plating bath from the oxidative decomposition vessel through the overflow vessel to the plating vessel to circulate the plating bath between the plating vessel and oxidative decomposition vessel, and metallic copper is immersed in the plating bath in the oxidative decomposition vessel and exposed to air bubbling, so that decomposed/degenerated organic products formed by decomposition or degeneration produced during the copper electroplating can be oxidatively decomposed.
    • 一种连续铜电镀方法,其中铜连续地镀在工件上,以通过使用可溶性或不溶性阳极和工件作为阴极而放置在容纳含有有机添加剂的硫酸铜电镀液的电镀槽中,该方法包括使镀层溢出 在溢流容器中从电镀槽中洗涤,在溢流容器中将溢流容器中的电镀液返回到电镀槽中,提供氧化分解容器,并将来自氧化分解容器的电镀槽通过溢流容器返回到电镀槽 在电镀槽和氧化分解容器之间循环电镀槽,将金属铜浸入氧化分解容器中的电镀槽中,暴露于鼓泡状态,从而在铜电镀期间产生的分解/退化的有机产物 可以氧化分解。
    • 8. 发明申请
    • CONTINUOUS COPPER ELECTROPLATING METHOD
    • 连续电镀方法
    • US20090229986A1
    • 2009-09-17
    • US12401113
    • 2009-03-10
    • Naoyuki OMURAToshihisa ISONOKoji SHIMIZUShinji TACHIBANATomohiro KAWASEShunsaku HOSHI
    • Naoyuki OMURAToshihisa ISONOKoji SHIMIZUShinji TACHIBANATomohiro KAWASEShunsaku HOSHI
    • C25D21/18
    • C25D17/00C25D3/38C25D7/123C25D17/001C25D17/002C25D21/18H05K3/241
    • Disclosed is a method for a repeated electroplating of a workpiece to be plated as a cathode by using an insoluble anode in a plating vessel accommodating a copper sulfate plating bath, wherein a copper dissolution vessel different from the plating vessel is provided, the plating bath is transferred to the copper dissolution vessel and is returned from the copper dissolution vessel to the plating vessel for circulating the plating bath between the plating vessel and the copper dissolution vessel, copper ion supplying salt is charged into the copper dissolution vessel and dissolved in the plating bath so that copper ions consumed by the plating can be replenished, and the workpiece to be plated is continuously electroplated, characterized in that the plating bath is permitted to transfer between the anode side and the cathode side, and the plating bath is returned to vicinity of the anode in the return of the plating bath from the copper dissolution vessel to the plating vessel. Plating performance impairing components, which are produced when the copper ion supplying salt is dissolved in the plating bath for replenishing the copper ions, are oxidized and decomposed, whereby defective plating due to the presence of the plating performance impairing components can be prevented.
    • 公开了一种通过在容纳硫酸铜电镀浴的电镀槽中使用不溶性阳极来重复电镀作为阴极的工件的方法,其中提供了不同于电镀槽的铜溶解容器,电镀浴是 转移到铜溶解容器中,并从铜溶解容器返回到电镀槽,用于使电镀槽和铜溶解容器之间的电镀槽循环,将铜离子供应盐装入铜溶解容器中并溶解在镀浴中 使得可以补充由电镀消耗的铜离子,并且将被镀工件连续电镀,其特征在于允许电镀液在阳极侧和阴极侧之间转移,电镀浴返回到 阳极将电镀液从铜溶解容器返回到电镀槽中。 当铜离子供应盐溶解在用于补充铜离子的镀浴中时产生的电镀性能损害部件被氧化分解,从而可以防止由于存在电镀性能损害部件而导致的不良电镀。