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    • 2. 发明授权
    • Magnetic bearing device and method
    • 磁轴承装置及方法
    • US07977839B2
    • 2011-07-12
    • US12892376
    • 2010-09-28
    • Toshimitsu BaradaToshiya Yoshida
    • Toshimitsu BaradaToshiya Yoshida
    • F16C32/04
    • F16C32/0457F16C32/0448F16C2360/45
    • An energy-saving magnetic bearing device with no bias current for making the relation between the excitation current and the magnetic force of the electromagnet linear is provided. In a magnetic bearing device for supporting a rotor 1 serving as the magnetic piece in a levitating state allowing free rotation at a specified position by the magnetic force of a pair of electromagnets 2, 3, the electromagnets 2, 3 are constituted to interpose the rotor 1 and face each other. A driver 204 is a PWM (pulse width modulation) type driver for controlling the excitation current in the electromagnets 2, 3 by modulating the pulse width of a voltage driven at a specified carrier frequency fc, and includes a resonator means for electrically resonating at a frequency equal to the carrier frequency fc. When an excitation current flows in either one of the pair of opposing electromagnets 2, 3, then the other magnet is regulated so that the DC component in the electromagnet excitation current is zero, and a voltage is applied via the resonator means to the electromagnet whose DC component in the excitation current is discharged to zero.
    • 提供了一种无偏置电流的节能磁轴承装置,用于使励磁电流与电磁铁线性的磁力之间的关系。 在用于以悬浮状态支撑用作磁片的转子1的磁轴承装置中,通过一对电磁体2,3的磁力使指定位置自由旋转,电磁体2,3构成为将转子 1并面对彼此。 驱动器204是用于通过调制以特定载波频率fc驱动的电压的脉冲宽度来控制电磁体2,3中的激励电流的PWM(脉冲宽度调制)型驱动器,并且包括谐振器装置,用于在 频率等于载波频率fc。 当励磁电流在一对相对电磁体2,3中的任一个中流动时,另一个磁体被调节,使得电磁铁激励电流中的直流分量为零,并且通过谐振器装置将电压施加到电磁体, 励磁电流中的直流分量放电到零。
    • 3. 发明申请
    • TURBO VACUUM PUMP
    • 涡轮真空泵
    • US20090246048A1
    • 2009-10-01
    • US12410720
    • 2009-03-25
    • Hiroyuki KawasakiToshimitsu Barada
    • Hiroyuki KawasakiToshimitsu Barada
    • F04D29/056
    • F04D17/168F04D19/042F04D29/0513F04D29/28F16C17/045F16C39/06F16C2360/45
    • An oil-free turbo vacuum pump is capable of evacuating gas in a chamber from atmospheric pressure to high vacuum. The turbo vacuum pump includes a pumping section having rotor blades and stator blades which are disposed alternately in a casing, and a main shaft for supporting the rotor blades. A gas bearing is used as a bearing for supporting the main shaft in a thrust direction, spiral grooves are formed in both surfaces of a stationary part of the gas bearing, and the stationary part having the spiral grooves is placed between an upper rotating part and a lower rotating part which are fixed to the main shaft. A thrust magnetic bearing for canceling out a thrust force generated by the differential pressure between a discharge side and an intake side by an evacuation action of the pumping suction is provided.
    • 无油涡轮真空泵能够将室内的气体从大气压降至高真空。 涡轮真空泵包括具有交替设置在壳体中的转子叶片和定子叶片的泵送部分和用于支撑转子叶片的主轴。 气体轴承用作用于沿推力方向支撑主轴的轴承,在气体轴承的静止部分的两个表面上形成螺旋槽,并且具有螺旋槽的固定部分设置在上部旋转部分和 固定在主轴上的下部旋转部。 提供了一种推力磁轴承,其用于通过抽吸抽吸的排气作用来消除由排出侧和进气侧之间的压差产生的推力。
    • 5. 发明授权
    • Discharge-pumped excimer laser device
    • 放电泵浦准分子激光装置
    • US06539043B1
    • 2003-03-25
    • US09856138
    • 2001-05-29
    • Hiroyuki ShinozakiShinichi SekiguchiToshimitsu BaradaToshiharu Nakazawa
    • Hiroyuki ShinozakiShinichi SekiguchiToshimitsu BaradaToshiharu Nakazawa
    • H01S322
    • F16C32/047H01S3/036H01S3/225
    • The present invention provides a discharge-pumped excimer laser device which includes a laser chamber filled with a laser gas that is deteriorated to a small extent, magnetic bearings and a motor that are resistant to the entry of dust particles, and parts that are held in contact with the laser gas and suffer little damage, and has a long service life. The discharge-pumped excimer laser device according to the present invention has a laser chamber (1) filled with a laserigas and housing at least a pair of main discharge electrodes (2, 2) for producing an electric discharge to be able to oscillate a laser beam, housings (6, 7) joined to opposite sides of the laser chamber (1), a cross flow fan (3) having opposite ends rotatably supported by magnetic bearings (8, 9, 10, 11) accommodated in the housings (6, 7), for producing a high-speed laser gas flow between the main discharge electrodes (2, 2), a motor (12) accommodated in the housing (7) for rotating the cross flow fan (3), laser gas flow passages (61, 62) extending through gaps between rotor side and stator side of the magnetic bearings (8, 9, 10, 11) and the motor (12) over an axial entire length of the housings (6, 7), and communicating with an interior of the laser chamber (1), a laser gas introduction passage (60) extending from the interior of the laser chamber (1) and communicating with the laser gas flow passages (61, 62), and filters (20, 20) disposed in the laser gas introduction passage (60).
    • 本发明提供了一种排出泵浦的准分子激光装置,其包括填充有少量劣化的激光气体的激光室,磁性轴承和抵抗灰尘颗粒进入的电动机以及保持在 与激光气体接触,损伤小,使用寿命长。本发明的排出泵浦准分子激光装置具有填充有激光的激光室(1),并容纳至少一对主放电电极 (2,2),用于产生能够振荡激光束的放电,与激光室(1)的相对侧接合的壳体(6,7),具有相对端部的交叉流动风扇(3),其可旋转地支撑在 容纳在壳体(6,7)中的磁性轴承(8,9,10,11),用于在主放电电极(2,2)之间产生高速激光气流,容纳在壳体 (7),用于旋转横流风扇(3),激光气体 在所述壳体(6,7)的轴向整个长度上延伸穿过所述磁性轴承(8,9,10,11)和所述电动机(12)的转子侧和定子侧之间的间隙的流动通道(61,62),以及 与所述激光室(1)的内部连通,从所述激光室(1)的内部延伸并与所述激光气体流路(61,62)连通的激光气体导入通路(60) 20)设置在激光气体导入通路(60)中。
    • 6. 发明授权
    • Magnetic bearing device
    • 磁轴承装置
    • US06404088B1
    • 2002-06-11
    • US09657067
    • 2000-09-07
    • Toshimitsu BaradaAtsushi OoyamaToshiharu Nakazawa
    • Toshimitsu BaradaAtsushi OoyamaToshiharu Nakazawa
    • H02K709
    • F16C32/0446F16C32/0442F16C2231/00
    • A magnetic bearing device has an object levitated in an arbitrary position between confronting electromagnets. Positional displacement sensors detect a positional displacement of the object. When the electromagnets are successively energized, the object is moved in a mechanically movable maximum range between the electromagnets, and maximum and minimum values of a detected positional displacement signal from the positional displacement sensors are detected. A middle value between the maximum and minimum values is calculated and compared with a threshold level. An adjustment signal is applied to an offset corrector which produces an offset-corrected signal from the detected positional displacement signal, so as to substantially eliminate the difference between the middle value and the threshold level so that the middle value represents a position in which the object is to be levitated between the electromagnets.
    • 磁性轴承装置具有悬浮在面对的电磁体之间的任意位置的物体。 位置位移传感器检测物体的位置位移。 当电磁体依次通电时,物体在电磁铁之间以机械方式移动的最大范围内移动,并且检测来自位置位移传感器的检测到的位置位移信号的最大值和最小值。 计算最大值和最小值之间的中间值,并将其与阈值级别进行比较。 调整信号被应用于从检测到的位置位移信号产生偏移校正信号的偏移校正器,以便基本上消除中间值和阈值水平之间的差异,使得中间值表示对象 将在电磁铁之间悬浮。
    • 7. 发明申请
    • MAGNETIC BEARING DEVICE AND METHOD
    • 磁性轴承装置及方法
    • US20090096302A1
    • 2009-04-16
    • US11994931
    • 2006-07-04
    • Toshimitsu BaradaToshiya Yoshida
    • Toshimitsu BaradaToshiya Yoshida
    • H02K7/09
    • F16C32/0457F16C32/0448F16C2360/45
    • An energy-saving magnetic bearing device with no bias current for making the relation between the excitation current and the magnetic force of the electromagnet linear is provided. In a magnetic bearing device for supporting a rotor 1 serving as the magnetic piece in a levitating state allowing free rotation at a specified position by the magnetic force of a pair of electromagnets 2, 3, the electromagnets 2, 3 are constituted to interpose the rotor 1 and face each other. A driver 204 is a PWM (pulse width modulation) type driver for controlling the excitation current in the electromagnets 2, 3 by modulating the pulse width of a voltage driven at a specified carrier frequency fc, and includes a resonator means for electrically resonating at a frequency equal to the carrier frequency fc. When an excitation current flows in either one of the pair of opposing electromagnets 2, 3, then the other magnet is regulated so that the DC component in the electromagnet excitation current is zero, and a voltage is applied via the resonator means to the electromagnet whose DC component in the excitation current is discharged to zero.
    • 提供了一种无偏置电流的节能磁轴承装置,用于使励磁电流与电磁铁线性的磁力之间的关系。 在用于以悬浮状态支撑用作磁片的转子1的磁轴承装置中,通过一对电磁体2,3的磁力使指定位置自由旋转,电磁体2,3构成为将转子 1并面对彼此。 驱动器204是用于通过调制以特定载波频率fc驱动的电压的脉冲宽度来控制电磁体2,3中的激励电流的PWM(脉冲宽度调制)型驱动器,并且包括谐振器装置,用于在 频率等于载波频率fc。 当励磁电流在一对相对电磁体2,3中的任一个中流动时,另一个磁体被调节,使得电磁铁激励电流中的直流分量为零,并且通过谐振器装置将电压施加到电磁体, 励磁电流中的直流分量放电到零。
    • 8. 发明授权
    • Magnetic bearing apparatus
    • 磁性轴承装置
    • US06984907B2
    • 2006-01-10
    • US10874229
    • 2004-06-24
    • Toshimitsu Barada
    • Toshimitsu Barada
    • H02K7/09
    • F16C32/0451
    • A magnetic bearing apparatus has an electromagnet having a coil for levitating a rotatable member by a magnetic force and a control device to adjust a gain for levitation control of the rotatable member. The control device includes a displacement sensor to detect a levitated position of the rotatable member, a driver to supply a current to the electromagnet, and a phase compensator to adjust the current based on a signal from the displacement sensor. The control device also includes a band-pass filter into which an output signal of the phase compensator is inputted, an amplifier to amplify an output signal of the band-pass filter at a predetermined amplification ratio, and an adder to add an output signal of the amplifier to an output signal of the phase compensator and supply an added signal to the driver. The band-pass filter has a center frequency based on an actual rotation frequency of the rotatable member, a voltage, a current, or a frequency of a power source for a motor.
    • 磁轴承装置具有电磁铁,其具有用于通过磁力使可转动构件悬浮的线圈和控制装置,以调节可旋转构件的悬浮控制增益。 控制装置包括位移传感器,用于检测可旋转构件的悬浮位置,向电磁体提供电流的驱动器,以及基于来自位移传感器的信号调整电流的相位补偿器。 控制装置还包括带通滤波器,相位补偿器的输出信号被输入到该带通滤波器中,放大器以预定的放大比放大带通滤波器的输出信号,以及加法器, 放大器到相位补偿器的输出信号,并向驱动器提供附加的信号。 带通滤波器具有基于可旋转构件的实际旋转频率的中心频率,电动机的电源的电压,电流或频率。