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    • 4. 发明授权
    • Portable stocker and method of using same
    • 便携式储存器及其使用方法
    • US09048274B2
    • 2015-06-02
    • US12329664
    • 2008-12-08
    • Wei-Cheng WangFeng-Ning LeeChi-Feng TungMao-Lin KaoLi-Jen Ko
    • Wei-Cheng WangFeng-Ning LeeChi-Feng TungMao-Lin KaoLi-Jen Ko
    • H01L21/677
    • H01L21/67775H01L21/67766
    • A system comprising a conveyor. A semiconductor processing tool has a lifter port. The tool is positioned near the conveyor, such that the lifter port is configured to transport a Front Opening Unified Pod (FOUP) between the conveyor and the lifter port. An upstream stocker and a downstream stocker are both co-located with the conveyor and the tool. The upstream and downstream stockers each have a respective storage space for the FOUP and a respective robotic device configured to transport the FOUP between its respective storage space and the conveyor. The upstream stocker is configured to receive the FOUP from an overhead transport (OHT) and deliver the FOUP to the conveyor. The downstream stocker is configured to receive the FOUP from the conveyor and deliver the FOUP to the OHT.
    • 一种包括输送机的系统。 半导体处理工具具有升降器端口。 该工具位于输送机附近,使得升降器端口构造成在输送机和升降器端口之间输送前开口统一荚(FOUP)。 上游储料器和下游储料器与输送机和工具共处。 上游和下游储存器各自具有用于FOUP的相应存储空间以及被配置为在其各自的存储空间和输送机之间运输FOUP的相应机器人装置。 上游储料器被配置为从架空运输(OHT)接收FOUP并将FOUP输送到输送机。 下游储料器配置为从输送机接收FOUP,并将FOUP运送到OHT。