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1. 发明申请

US20090242387A1 PROCESS FOR PRODUCING SILICA GLASS CONTAINING TIO2, AND OPTICAL MATERIAL FOR EUV LITHOGRAPHY EMPLOYING SILICA GLASS CONTAINING TIO2 审中-公开
标题翻译：生产含有二氧化硅玻璃的工艺，含有二氧化硅的二氧化硅玻璃的光学材料和含有二氧化硅的二氧化硅玻璃的光学材料
公开(公告)号：US20090242387A1
公开(公告)日：2009-10-01
申请号：US12466032
申请日：2009-05-14
申请人： Akio KOIKE , Yasutomi Iwahashi , Noriaki Shimodaira , Shinya Kikugawa , Naoki Sugimoto
发明人： Akio KOIKE , Yasutomi Iwahashi , Noriaki Shimodaira , Shinya Kikugawa , Naoki Sugimoto
IPC分类号： C23C14/34
CPC分类号： C03C3/06 , C03B19/1453 , C03B19/1484 , C03B2201/21 , C03B2201/42 , C03C17/40 , C03C2201/21 , C03C2201/42 , G03F7/70958
摘要： The claimed invention relates to a process for producing an optical material for EUV lithography, wherein the optical material contains a silica glass having a TiO2 concentration of from 3 to 12 mass % and a hydrogen molecule content of less than 5×1017 molecules/cm3 in the glass. The process including coating a multilayer film on the silica glass by ion beam sputtering.
摘要翻译：所要求保护的发明涉及一种用于制造用于EUV光刻的光学材料的方法，其中所述光学材料包含玻璃中TiO 2浓度为3至12质量％且氢分子含量小于5×10 17分子/ cm 3的二氧化硅玻璃。该方法包括通过离子束溅射在二氧化硅玻璃上涂覆多层膜。

2. 发明申请

US20070207911A1 PROCESS FOR PRODUCING SILICA GLASS CONTAINING TIO2, AND OPTICAL MATERIAL FOR EUV LITHOGRAPHY EMPLOYING SILICA GLASS CONTAINING TIO2 审中-公开
标题翻译：生产含有二氧化硅玻璃的工艺，含有二氧化硅的二氧化硅玻璃的光学材料和含有二氧化硅的二氧化硅玻璃的光学材料
公开(公告)号：US20070207911A1
公开(公告)日：2007-09-06
申请号：US11747698
申请日：2007-05-11
申请人： Akio KOIKE , Yasutomi Iwahashi , Noriaki Shimodaira , Shinya Kikugawa , Naoki Sugimoto
发明人： Akio KOIKE , Yasutomi Iwahashi , Noriaki Shimodaira , Shinya Kikugawa , Naoki Sugimoto
IPC分类号： C03C3/06 , C03B19/06
CPC分类号： C03C3/06 , C03B19/1453 , C03B19/1484 , C03B2201/21 , C03B2201/42 , C03C17/40 , C03C2201/21 , C03C2201/42 , G03F7/70958
摘要： Conventional TiO2—SiO2 glass contains hydrogen atoms substantially, and during deposition under ultrahigh vacuum condition, the hydrogen molecules will diffuse in the chamber, and H2 molecules will be taken into a film thereby formed. Hydrogen molecules will readily diffuse, and the optical characteristics of the multilayer film are likely to be thereby changed. In an optical material for EUV lithography, a multilayer film is coated by ion beam sputtering on a silica glass having a TiO2 concentration of from 3 to 12 mass % and a hydrogen molecule content of less than 5×1017 molecules/cm3 in the glass.
摘要翻译：常规的TiO 2 -SiO 2 SiO 2玻璃基本上含有氢原子，并且在超高真空条件下沉积期间，氢分子将在室中扩散，并且H 2 < / SUB>分子将被吸收到由此形成的膜中。氢分子将容易扩散，并且可能由此改变多层膜的光学特性。在用于EUV光刻的光学材料中，通过离子束溅射在具有3至12质量％的TiO 2浓度和小于5×10 5质量％的氢分子含量的二氧化硅玻璃上涂覆多层膜， SUP> 17分子/ cm 3在玻璃中。

3. 发明申请

US20080039310A1 QUARTZ-TYPE GLASS AND PROCESS FOR ITS PRODUCTION 审中-公开
标题翻译：石墨型玻璃及其生产工艺
公开(公告)号：US20080039310A1
公开(公告)日：2008-02-14
申请号：US11865289
申请日：2007-10-01
申请人： Hideaki HAYASHI , Akio Koike , Mitsuhiro Kawata , Naoki Sugimoto , Shinya Kikugawa , Kenji Yamada
发明人： Hideaki HAYASHI , Akio Koike , Mitsuhiro Kawata , Naoki Sugimoto , Shinya Kikugawa , Kenji Yamada
IPC分类号： C03B19/00
CPC分类号： C03C3/06 , C03B19/1415 , C03B19/1438 , C03B2201/32 , C03B2201/34 , C03B2201/40 , C03B2207/32 , C03B2207/34 , C03C23/0095 , C03C2201/24 , C03C2201/32 , C03C2201/3405 , C03C2201/3411 , C03C2201/3417 , C03C2201/40 , C03C2203/44 , C03C2203/54
摘要： To provide quartz-type glass for a microlithographic projection exposure apparatus, which contains at least 51 mass % of SiO2 and which further contains at least one member selected from the group consisting of lanthanum, aluminum, hafnium, nitrogen, scandium, yttrium and zirconium. It is a material which is useful for an illumination system for a microlithographic projection exposure apparatus or as a projection object lens and has a refractive index at 248 nm larger than 1.508 of quartz glass and a refractive index at 193 nm larger than 1.560 of quartz glass and which can be small-sized.
摘要翻译：为了提供含有至少51质量％的SiO 2的微光刻投影曝光装置的石英型玻璃，还含有选自镧，铝，铪等的至少一种，氮，钪，钇和锆。它是一种用于微光刻投影曝光装置的照明系统或投影物镜并且具有大于1.508的石英玻璃的248nm的折射率和大于石英玻璃的1.560的193nm的折射率的材料并且可以是小尺寸的。

4. 发明授权

US07585800B2 Silica glass and optical material 失效
标题翻译：二氧化硅玻璃和光学材料
公开(公告)号：US07585800B2
公开(公告)日：2009-09-08
申请号：US11962936
申请日：2007-12-21
申请人： Mitsuhiro Kawata , Akira Takada , Hideaki Hayashi , Naoki Sugimoto , Shinya Kikugawa
发明人： Mitsuhiro Kawata , Akira Takada , Hideaki Hayashi , Naoki Sugimoto , Shinya Kikugawa
IPC分类号： C03C3/06 , C03B20/00 , H05B33/10
CPC分类号： C03C3/06 , C03C4/0085 , C03C2201/30 , C03C2201/42
摘要： It is to obtain a silica glass suitable as a material for an optical material constituting an optical system to be used for EUVL, which has a low coefficient of thermal expansion from 0 to 100° C., and on which formation of concave defects is suppressed in a polishing step to achieve a high level of flatness.A silica glass containing from 0.1 to 10 mass % of Sn calculated as SnO2 and from 3 to 10 mass % of Ti calculated as TiO2, which has a homogeneity of the coefficient of thermal expansion from 0 to 100° C. to the temperature of from 50 to 200 ppb/° C., a coefficient of thermal expansion from 0 to 100° C. of 0±250 ppb/° C., and a Vickers hardness of at most 650.
摘要翻译：获得适合作为构成用于EUVL的光学系统的光学材料的石英玻璃，其具有0至100℃的低热膨胀系数，并且其中凹陷缺陷的形成被抑制在抛光步骤中达到高水平的平整度。含有0.1〜10质量％的以SnO 2计的Sn和3〜10质量％的作为TiO 2计算的Ti的二氧化硅玻璃，其具有0〜100℃的热膨胀系数的均匀性 50至200ppb /℃，0至100ppb /℃的0至100℃的热膨胀系数，以及至多650的维氏硬度。

5. 发明申请

US20080103038A1 SILICA GLASS AND OPTICAL MATERIAL 失效
标题翻译：二氧化硅玻璃和光学材料
公开(公告)号：US20080103038A1
公开(公告)日：2008-05-01
申请号：US11962936
申请日：2007-12-21
申请人： Mitsuhiro Kawata , Akira Takada , Hideaki Hayashi , Naoki Sugimoto , Shinya Kikugawa
发明人： Mitsuhiro Kawata , Akira Takada , Hideaki Hayashi , Naoki Sugimoto , Shinya Kikugawa
IPC分类号： C03C3/06 , C03C3/076
CPC分类号： C03C3/06 , C03C4/0085 , C03C2201/30 , C03C2201/42
摘要： It is to obtain a silica glass suitable as a material for an optical material constituting an optical system to be used for EUVL, which has a low coefficient of thermal expansion from 0 to 100° C., and on which formation of concave defects is suppressed in a polishing step to achieve a high level of flatness. A silica glass containing from 0.1 to 10 mass % of Sn calculated as SnO2 and from 3 to 10 mass % of Ti calculated as TiO2, which has a homogeneity of the coefficient of thermal expansion from 0 to 100° C. to the temperature of from 50 to 200 ppb/° C., a coefficient of thermal expansion from 0 to 100° C. of 0±250 ppb/° C., and a Vickers hardness of at most 650.
摘要翻译：获得适合作为构成用于EUVL的光学系统的光学材料的石英玻璃，其具有0至100℃的低热膨胀系数，并且其中凹陷缺陷的形成被抑制在抛光步骤中达到高水平的平整度。含有0.1〜10质量％的以SnO 2 2计的Sn和3〜10质量％的TiO 2计算的二氧化硅玻璃，其Ti均匀度为热膨胀系数为0〜100℃，温度为50〜200ppb /℃，0〜100℃的热膨胀系数为0±250ppb /℃，Vickers 硬度至多650。

6. 发明申请

US20110316143A1 SEMICONDUCTOR MODULE WITH COOLING MECHANISM AND PRODUCTION METHOD THEREOF 审中-公开
标题翻译：具有冷却机理的半导体模块及其制造方法
公开(公告)号：US20110316143A1
公开(公告)日：2011-12-29
申请号：US13167144
申请日：2011-06-23
申请人： Chikage NORITAKE , Hiroaki Arai , Yoshiyuki Yamauchi , Yasuou Yamazaki , Naoki Sugimoto , Yasuyuki Sakai
发明人： Chikage NORITAKE , Hiroaki Arai , Yoshiyuki Yamauchi , Yasuou Yamazaki , Naoki Sugimoto , Yasuyuki Sakai
IPC分类号： H01L23/34 , H01L21/50
CPC分类号： H01L23/34 , H01L21/565 , H01L23/3107 , H01L23/4012 , H01L23/4093 , H01L23/4334 , H01L23/473 , H01L24/32 , H01L24/33 , H01L24/48 , H01L25/117 , H01L2224/32245 , H01L2224/33181 , H01L2224/48091 , H01L2224/48247 , H01L2224/73215 , H01L2224/73265 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01029 , H01L2924/01033 , H01L2924/01082 , H01L2924/014 , H01L2924/07802 , H01L2924/1305 , H01L2924/13055 , H01L2924/1306 , H01L2924/13091 , H01L2924/181 , H01L2924/351 , H01L2224/45099 , H01L2924/3512 , H01L2924/00 , H01L2924/00012
摘要： A semiconductor module is provided which includes a semiconductor unit which is made by a resin mold. The resin mold has formed therein a coolant path through which a coolant flows to cool a semiconductor chip embedded in the resin mold. The resin mold also includes heat spreaders, and electric terminals embedded therein. Each of the heat spreaders has a fin heat sink exposed to the flow of the coolant. The fin heat sink is welded to a surface of each of the heat spreaders through an insulator, thus minimizing an electrical leakage from the heat spreader to the coolant.
摘要翻译：提供一种半导体模块，其包括由树脂模具制成的半导体单元。树脂模具中形成有冷却剂流动的冷却剂路径，以冷却嵌入在树脂模具中的半导体芯片。树脂模具还包括散热器和嵌入其中的电端子。每个散热器具有暴露于冷却剂流动的翅片散热器。翅片散热器通过绝缘体焊接到每个散热器的表面，从而最小化从散热器到冷却剂的电泄漏。

7. 发明申请

US20100192634A1 PROCESS FOR PRODUCING GLASS/RESIN COMPOSITE 审中-公开
标题翻译：生产玻璃/树脂复合材料的方法
公开(公告)号：US20100192634A1
公开(公告)日：2010-08-05
申请号：US12755709
申请日：2010-04-07
申请人： Toshihiko HIGUCHI , Motoi Kamba , Naoki Sugimoto , Satoshi Kondo
发明人： Toshihiko HIGUCHI , Motoi Kamba , Naoki Sugimoto , Satoshi Kondo
IPC分类号： C03C17/00
CPC分类号： C03B17/02 , B29B15/12 , B29B15/125 , B29B15/127 , B29C65/48 , B29C65/4815 , B29C65/4835 , B29C65/484 , B29C65/4845 , B29C66/1122 , B29C66/45 , B29C66/71 , B29C66/7212 , B29C66/73117 , B29C66/7465 , B29C66/83411 , B29C66/83413 , B29C66/9141 , B29C66/91411 , B29C66/91645 , B29C66/919 , B29C66/91931 , B29C66/91933 , B29C66/91935 , B29C66/91941 , B29C66/91943 , B29C2035/0827 , B29K2067/00 , B29K2079/08 , B29K2309/08 , B29L2009/00 , B32B17/064 , B32B37/04 , B32B37/1207 , B32B37/206 , B32B2037/1215 , B32B2037/243 , B32B2309/02 , B32B2309/105 , B32B2310/0831 , B32B2315/08 , B32B2367/00 , B32B2457/202 , B29K2069/00 , B29K2027/06 , B29K2081/06 , B29K2083/00 , B29K2077/00 , B29K2067/003 , B29K2033/12 , B29K2033/08 , B29K2029/04 , B29K2027/12 , B29K2025/06 , B29K2023/00
摘要： To provide a process for producing a glass/resin composite having a sufficient transportability, handling efficiency and processability, even though the thickness of the glass is very thin, without impairing excellent properties of glass.A process for producing a glass/resin composite, which comprises forming molten glass into a glass ribbon and forming a resin layer on at least one surface of the glass ribbon is provided. The resin layer is preferably formed by bonding to a glass ribbon, applying a heat melt resin or applying a curable resin. Further, a process for producing a glass/resin composite, wherein a cut glass substrate is bonded on a continuously supplied resin film is provided.
摘要翻译：为了提供具有足够的输送性，处理效率和加工性的玻璃/树脂复合材料的制造方法，即使玻璃的厚度非常薄，也不会损害玻璃的优异性能。提供一种玻璃/树脂复合体的制造方法，其包括在玻璃带中形成熔融玻璃并在玻璃带的至少一个表面上形成树脂层。树脂层优选通过粘合到玻璃带，施加热熔树脂或施加可固化树脂来形成。此外，提供了一种玻璃/树脂复合材料的制造方法，其中将切割的玻璃基板接合在连续供给的树脂膜上。

8. 发明授权

US07628447B2 Harness clip 有权
标题翻译：线束夹
公开(公告)号：US07628447B2
公开(公告)日：2009-12-08
申请号：US11524521
申请日：2006-09-21
申请人： Naoki Sugimoto , Hiromasa Akaho
发明人： Naoki Sugimoto , Hiromasa Akaho
IPC分类号： B60J7/00 , F16L3/22
CPC分类号： B60R13/02 , B60R2013/0287
摘要： A harness clip includes a base portion having a leg portion for engagement with a rocker panel, a side wall portion standing on and extending from one side edge of the base portion, and a harness holding portion which is connected to the side wall portion through a hinge portion, and a lock portion for engagement with the base portion at a distal end edge portion of the harness holding portion. The distal end edge portion of the harness holding portion is formed into a substantially L-shape when viewed from an end surface thereof to provide an angular portion, and this angular portion is locked to the base portion in contacting relation to an upper surface of the base portion. Therefore, even when a load is applied to the harness clip, the harness can be stably held without canceling the engagement of the lock portion with the base portion.
摘要翻译：线束夹包括具有用于与摇臂板接合的腿部的基座部分，站立在基座部分的一个侧边缘上并从基部的一个侧边缘延伸的侧壁部分以及通过一个连接到侧壁部分的线束保持部分铰链部分和用于在线束保持部分的远端边缘部分处与基部接合的锁定部分。当从其端面观察时，线束保持部分的远端边缘部分形成为大致L形，以提供角部，并且该角部与顶部的上表面接触地锁定到基部基部。因此，即使在线束夹上施加负载的情况下，也能够在不抵消锁定部与基部的卡合的情况下稳定地保持线束。

9. 发明授权

US07582579B2 Phosphate optical glass 失效
标题翻译：磷酸盐光学玻璃
公开(公告)号：US07582579B2
公开(公告)日：2009-09-01
申请号：US12110502
申请日：2008-04-28
申请人： Hiroyuki Ohkawa , Naoki Sugimoto
发明人： Hiroyuki Ohkawa , Naoki Sugimoto
IPC分类号： C03C3/17 , C03C3/19 , C03C3/21 , C03C3/062
CPC分类号： C03C3/253 , C03C3/17 , C03C3/19 , C03C3/21 , C03C4/20
摘要： The object of the present invention is to provide an optical glass which has optical constants such as a refractive index of from 1.45 to 1.65 and an Abbe number of at least 65 and which is yet excellent in chemical durability. A phosphate optical glass comprising, as glass components by mass %, from 73 to 85 of P2O5, from 14 to 26 of Al2O3, from 1 to 12 of K2O+Li2O, from 0 to 12 of SiO2, from 0 to 12 of B2O3, from 0 to 12 of Na2O, from 0 to 12 of Y2O3, from 0 to 12 of La2O3, from 0 to 12 of MgO+CaO+SrO+BaO, from 0 to 10 of ZrO2+TiO2+Gd2O3, from 0 to 10 of Ta2O5+GeO2+Ga2O3+Nb2O5+WO3+TeO2, from 0 to 2 of Sb2O3, and from 0 to 12 of ZnO+PbO.
摘要翻译：本发明的目的是提供一种光学玻璃，其具有折射率为1.45〜1.65，阿贝数为65以上，且化学耐久性优异的光学常数。磷酸盐型光学玻璃，以质量％计含有73〜85的P 2 O 5，14〜26的Al 2 O 3，1〜12的K 2 O + Li 2 O，0〜12的SiO 2，0〜12的B 2 O 3， 0〜12的Na 2 O，0〜12的Y 2 O 3，0〜12的La 2 O 3，0〜12的MgO + CaO + SrO + BaO，0〜10的ZrO 2 + TiO 2 + Gd 2 O 3，0〜 Ta2O5 + GeO2 + Ga2O3 + Nb2O5 + WO3 + TeO2，Sb2O3为0〜2，ZnO + PbO为0〜12。

10. 发明授权

US07563736B2 Optical glass and process for producing optical element 失效
标题翻译：光学玻璃及其制造方法
公开(公告)号：US07563736B2
公开(公告)日：2009-07-21
申请号：US11411177
申请日：2006-04-26
申请人： Tomoyuki Kobayashi , Jun Sasai , Syuji Matsumoto , Naoki Sugimoto
发明人： Tomoyuki Kobayashi , Jun Sasai , Syuji Matsumoto , Naoki Sugimoto
IPC分类号： C03C3/15 , C03C3/155
CPC分类号： C03C3/15 , C03B7/12 , C03C3/155 , C03C3/253
摘要： An optical glass which has an internal transmittance to a light having a wavelength of 400 nm being at least 90% as calculated in a thickness of 1 mm and which contains at least 25 mol % of B2O3 and from 0.1 to 20 mol % of TeO2. The above optical glass which contains La2O3. The above optical glass wherein the glass transition point ≦650° C. and the refractive index at 633 nm≧1.70. A process for producing an optical element made of the above optical glass, which comprises dropping the optical glass in a molten state from a flow outlet of a flow out pipe made of a platinum alloy to form a preform and subjecting it to precision press-molding.
摘要翻译：对于波长为400nm的光具有内透射率的光学玻璃，其厚度为1mm计算为至少90％，并且含有至少25mol％的B 2 O 3和0.1至20mol％的TeO 2。上述含有La2O3的光学玻璃。上述玻璃化转变点<= 650℃，折射率在633nm> = 1.70的光学玻璃。一种由上述光学玻璃制成的光学元件的制造方法，其特征在于，将来自铂合金的流出管的流出口的熔融状态的光学玻璃落下，形成预成型体，并进行精密的加压成型。

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