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1. 发明申请

WO2004034435A2 BOTTOM ANTI-REFLECTIVE COATINGS DERIVED FROM SMALL CORE MOLECULES WITH MULTIPLE EPOXY MOIETIES 审中-公开
标题翻译：从具有多种环氧基团的小核分子衍生的底部抗反射涂层
公开(公告)号：WO2004034435A2
公开(公告)日：2004-04-22
申请号：PCT/US2003/032091
申请日：2003-10-07
申请人： BREWER SCIENCE, INC.
发明人： NEEF, Charles, J. , BHAVE, Mandar , FOWLER, Michelle , WINDSOR, Michelle
IPC分类号： H01L
CPC分类号： G03F7/091 , C09B69/00 , Y10S430/111 , Y10T428/31511 , Y10T428/31515
摘要： Novel anti-reflective coatings comprising small molecules (e.g., less than about 5,000 g/mole) in lieu of high molecular weight polymers and methods of using those coatings are provided. In one embodiment, aromatic carboxylic acids are used as the chromophores, and the resulting compounds are blended with a crosslinking agent and an acid. Anti-reflective coating films prepared according to the invention exhibit improved properties compared to high molecular weight polymeric anti-reflective coating films. The small molecule anti-reflective coatings have high etch rates and good via fill properties. Photolithographic processes carried out with the inventive material result in freestanding, 110-nm profiles.
摘要翻译：提供了包含小分子（例如小于约5,000g / mol）代替高分子量聚合物的新型抗反射涂层以及使用这些涂层的方法。在一个实施方案中，使用芳族羧酸作为发色团，并将所得化合物与交联剂和酸共混。与高分子量聚合物抗反射涂膜相比，根据本发明制备的抗反射涂膜显示出改进的性能。小分子抗反射涂层具有高蚀刻速率和良好的通孔填充性能。使用本发明材料进行的光刻工艺产生独立的110nm轮廓。

2. 发明申请

WO2002083415A1 ANTI-REFLECTIVE COATING COMPOSITION WITH IMPROVED SPIN BOWL COMPATIBILITY 审中-公开
标题翻译：抗反射涂层组合物具有改善的纺丝相容性
公开(公告)号：WO2002083415A1
公开(公告)日：2002-10-24
申请号：PCT/US2002/012067
申请日：2002-04-15
申请人： BREWER SCIENCE, INC.
发明人： SHAO, Xie , MEADOR, Jim, D. , BHAVE, Mandar , KRISHNAMURTHY, Vandana , NOWAK, Kelly, A. , FOWLER, Michelle , DESHPANDE, Shreeram, V.
IPC分类号： B32B27/36
CPC分类号： C08J3/241 , G03F7/091 , Y10S430/151
摘要： Anti-reflective compositions and methods of using those compositions to form circuits are provided. The compositions comprise a polymer dissolved or dispersed in a solvent system. In one embodiment, the compositions comprise less than about 0.3% by weight of a strong acid. In another embodiment, the weight ratio of strong acid to weak acid in the composition is from about 0:100 to about 25:75. Examples of preferred weak acid compounds include phenolic compounds (e.g., Bisphenol S, Bisphenos A, α-cyano-4-hydroxycinnacmic acid), carboxylic acids (e.g., acetic acid), phosphoric acid, and cyano compounds. The polymer and other ingredients are preferably physically mixed in a solvent system. The resulting compositions are spin bowl compatible (i.e., they do not crosslink prior to the bake stages of the microlithographic processes or during storage at room temperature). Figure 1 is a scanning electron microscope (SEM) photgraph depicting an anti-reflective coating composition according to the invention deposited on silicon wafers.
摘要翻译：提供了抗反射组合物和使用这些组合物形成电路的方法。组合物包含溶解或分散在溶剂体系中的聚合物。在一个实施方案中，组合物包含小于约0.3重量％的强酸。在另一个实施方案中，组合物中强酸与弱酸的重量比为约0:100至约25:75。优选的弱酸化合物的实例包括酚类化合物（例如双酚S，双酚A，α-氰基-4-羟基cin mic酸），羧酸（例如乙酸），磷酸和氰基化合物。聚合物和其它成分优选在溶剂体系中物理混合。所得的组合物是旋转碗相容的（即，它们在微光刻工艺的烘烤阶段之前或在室温下储存期间不交联）。图1是描绘沉积在硅晶片上的根据本发明的抗反射涂层组合物的扫描电子显微镜（SEM）照片。

3. 发明公开

EP1392508A1 ANTI-REFLECTIVE COATING COMPOSITION WITH IMPROVED SPIN BOWL COMPATIBILITY 审中-公开
标题翻译：具有改善的相容SPIN水库防反射涂层的成分
公开(公告)号：EP1392508A1
公开(公告)日：2004-03-03
申请号：EP02762137.4
申请日：2002-04-15
申请人： Brewer Science, Inc.
发明人： SHAO, Xie , MEADOR, Jim, D. , BHAVE, Mandar , KRISHNAMURTHY, Vandana , NOWAK, Kelly, A. , FOWLER, Michelle , DESHPANDE, Shreeram, V.
IPC分类号： B32B27/36 , G03C1/492
CPC分类号： C08J3/241 , G03F7/091 , Y10S430/151
摘要： Anti-reflective compositions and methods of using those compositions to form circuits are provided. The compositions comprise a polymer dissolved or dispersed in a solvent system. In one embodiment, the compositions comprise less than about 0.3% by weight of a strong acid. In another embodiment, the weight ratio of strong acid to weak acid in the composition is from about 0:100 to about 25:75. Examples of preferred weak acid compounds include phenolic compounds (e.g., Bisphenol S, Bisphenol A, alpha-cyano-4-hydroxycinnamic acid), carboxylic acids (e.g., acetic acid), phosphoric acid, and cyano compounds. The polymer and other ingredients are preferably physically mixed in a solvent system. The resulting compositions are spin bowl compatible (i.e., they do not crosslink prior to the bake stages of the microlithographic processes or during storage at room temperature).

4. 发明授权

EP1573785B1 BOTTOM ANTI-REFLECTIVE COATINGS DERIVED FROM SMALL CORE MOLECULES WITH MULTIPLE EPOXY MOIETIES 有权
标题翻译：土反REFLEX涂料为主的小分子具有多个环氧UNITS
公开(公告)号：EP1573785B1
公开(公告)日：2013-02-13
申请号：EP03774743.3
申请日：2003-10-07
申请人： Brewer Science, Inc.
发明人： NEEF, Charles, J. , BHAVE, Mandar , FOWLER, Michelle , WINDSOR, Michelle
IPC分类号： C09B69/00 , G03F7/00
CPC分类号： G03F7/091 , C09B69/00 , Y10S430/111 , Y10T428/31511 , Y10T428/31515

5. 发明授权

EP1392508B1 ANTI-REFLECTIVE COATING COMPOSITION WITH IMPROVED SPIN BOWL COMPATIBILITY 有权
公开(公告)号：EP1392508B1
公开(公告)日：2018-10-10
申请号：EP02762137.4
申请日：2002-04-15
申请人： Brewer Science Inc.
发明人： SHAO, Xie , MEADOR, Jim D. , BHAVE, Mandar , KRISHNAMURTHY, Vandana , NOWAK, Kelly A. , FOWLER, Michelle , DESHPANDE, Shreeram V.
IPC分类号： B32B27/36 , G03C1/492
CPC分类号： C08J3/241 , G03F7/091 , Y10S430/151
摘要： Anti-reflective compositions and methods of using those compositions to form circuits are provided. The compositions comprise a polymer dissolved or dispersed in a solvent system. In one embodiment, the compositions comprise less than about 0.3% by weight of a strong acid. In another embodiment, the weight ratio of strong acid to weak acid in the composition is from about 0:100 to about 25:75. Examples of preferred weak acid compounds include phenolic compounds (e.g., Bisphenol S, Bisphenol A, alpha-cyano-4-hydroxycinnamic acid), carboxylic acids (e.g., acetic acid), phosphoric acid, and cyano compounds. The polymer and other ingredients are preferably physically mixed in a solvent system. The resulting compositions are spin bowl compatible (i.e., they do not crosslink prior to the bake stages of the microlithographic processes or during storage at room temperature).

6. 发明公开

EP1573785A3 BOTTOM ANTI-REFLECTIVE COATINGS DERIVED FROM SMALL CORE MOLECULES WITH MULTIPLE EPOXY MOIETIES 审中-公开
标题翻译：衍生自具有多个环氧基的小核心分子的底部抗反射涂层
公开(公告)号：EP1573785A3
公开(公告)日：2005-09-21
申请号：EP03774743.3
申请日：2003-10-07
申请人： Brewer Science, Inc.
发明人： NEEF, Charles, J. , BHAVE, Mandar , FOWLER, Michelle , WINDSOR, Michelle
IPC分类号： H01L21/00

7. 发明公开

EP1573785A2 BOTTOM ANTI-REFLECTIVE COATINGS DERIVED FROM SMALL CORE MOLECULES WITH MULTIPLE EPOXY MOIETIES 有权
标题翻译：土反REFLEX涂料为主的小分子具有多个环氧UNITS
公开(公告)号：EP1573785A2
公开(公告)日：2005-09-14
申请号：EP03774743.3
申请日：2003-10-07
申请人： Brewer Science, Inc.
发明人： NEEF, Charles, J. , BHAVE, Mandar , FOWLER, Michelle , WINDSOR, Michelle
IPC分类号： H01L21/00
CPC分类号： G03F7/091 , C09B69/00 , Y10S430/111 , Y10T428/31511 , Y10T428/31515
摘要： Novel anti-reflective coatings comprising small molecules (e.g., less than about 5,000 g/mole) in lieu of high molecular weight polymers and methods of using those coatings are provided. In one embodiment, aromatic carboxylic acids are used as the chromophores, and the resulting compounds are blended with a crosslinking agent and an acid. Anti-reflective coating films prepared according to the invention exhibit improved properties compared to high molecular weight polymeric anti-reflective coating films. The small molecule anti-reflective coatings have high etch rates and good via fill properties. Photolithographic processes carried out with the inventive material result in freestanding, 110-nm profiles.

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