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    • 2. 发明申请
    • MEASURING APPARATUS
    • 测量装置
    • US20140211214A1
    • 2014-07-31
    • US14343606
    • 2013-11-03
    • CANON KABUSHIKI KAISHA
    • Tomofumi NishikawaraTakahiro Yamamoto
    • G01B11/24
    • G01B11/24G01B5/0011
    • A measuring apparatus includes a light projecting and receiving device configured to project and receive light, and measures an object based on the projected and received light. The measuring apparatus comprises a chamber configured to enclose a first space for accommodating the object; a partition configured to separate the first space from a second space which accommodates the light projecting and receiving device, and configured to transmit the light; a first regulator configured to regulate temperature of the first space to a first temperature by flowing a gas through the first space; and a second regulator configured to regulate temperature of the second space to a second temperature different from the first temperature by flowing a gas through the second space. The partition includes a plurality of partition walls disposed with a gap.
    • 测量装置包括配置为投射和接收光的光投射和接收装置,并且基于投射和接收的光来测量物体。 测量装置包括:腔室,被配置为封闭用于容纳物体的第一空间; 分隔件,被配置为将第一空间与容纳光投射和接收装置的第二空间分离,并被配置为透射光; 第一调节器,被配置为通过使气体流过所述第一空间来将所述第一空间的温度调节到第一温度; 以及第二调节器,其被配置为通过使气体流过所述第二空间来将所述第二空间的温度调节到与所述第一温度不同的第二温度。 分隔件包括多个间隔开的间隔壁。
    • 6. 发明授权
    • Measuring apparatus
    • 测量装置
    • US09341468B2
    • 2016-05-17
    • US14343606
    • 2013-11-03
    • CANON KABUSHIKI KAISHA
    • Tomofumi NishikawaraTakahiro Yamamoto
    • G01B11/24G01B5/00
    • G01B11/24G01B5/0011
    • A measuring apparatus includes a light projecting and receiving device configured to project and receive light, and measures an object based on the projected and received light. The measuring apparatus comprises a chamber configured to enclose a first space for accommodating the object; a partition configured to separate the first space from a second space which accommodates the light projecting and receiving device, and configured to transmit the light; a first regulator configured to regulate temperature of the first space to a first temperature by flowing a gas through the first space; and a second regulator configured to regulate temperature of the second space to a second temperature different from the first temperature by flowing a gas through the second space. The partition includes a plurality of partition walls disposed with a gap.
    • 测量装置包括配置为投射和接收光的光投射和接收装置,并且基于投射和接收的光来测量物体。 测量装置包括:腔室,被配置为封闭用于容纳物体的第一空间; 分隔件,被配置为将第一空间与容纳光投射和接收装置的第二空间分离,并被配置为透射光; 第一调节器,被配置为通过使气体流过所述第一空间来将所述第一空间的温度调节到第一温度; 以及第二调节器,其被配置为通过使气体流过所述第二空间来将所述第二空间的温度调节到与所述第一温度不同的第二温度。 分隔件包括多个间隔开的间隔壁。
    • 7. 发明申请
    • MEASUREMENT APPARATUS, MEASUREMENT METHOD, AND METHOD OF MANUFACTURING ARTICLE
    • 测量装置,测量方法和制造方法
    • US20160054117A1
    • 2016-02-25
    • US14823209
    • 2015-08-11
    • CANON KABUSHIKI KAISHA
    • Takahiro Yamamoto
    • G01B11/24G01B9/02
    • G01B11/2441G01B5/004G01B9/02021G01B9/02059G01B11/002
    • The present invention provides a measurement apparatus for measuring a shape of a test surface, comprising an optical system configured to irradiate a measurement point on the test surface and a reference surface with light, and cause test light and reference light reflected to interfere with each other, a detector configured to detect an optical path length difference between the test light and the reference light by using interfering light and a processor configured to determine a position of the measurement point based on a plurality of detection results by the detector, wherein a detection result includes an error which cyclically changes, and the plurality of detection results include n detection results obtained in n states in which optical path lengths of the test light are different from each other by 1/n (n≧2) of a cycle of the error.
    • 本发明提供了一种用于测量测试表面的形状的测量装置,包括:一个光学系统,被配置为用光照射测试表面上的测量点和参考表面,并使测试光和反射的参考光彼此干扰 检测器,被配置为通过使用干涉光检测测试光和参考光之间的光程长度差;以及处理器,被配置为基于检测器基于多个检测结果来确定测量点的位置,其中检测结果 包括循环变化的误差,多个检测结果包括在n个状态下获得的n个检测结果,其中测试光的光程长度彼此相差1 / n(n≥2)的误差周期 。