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    • 3. 发明专利
    • Scanner
    • 扫描器
    • JP2014004478A
    • 2014-01-16
    • JP2013194214
    • 2013-09-19
    • Carl Zeiss Meditec Agカール ツアイス メディテック アクチエンゲゼルシャフト
    • HANFT MARCOMUEHLHOFF DIRKBISCHOFF MARKGERLACH MARIO
    • A61F9/008G02B21/06
    • A61F9/0084A61F2009/00872A61F2009/00897G02B7/10G02B19/0014G02B26/10G02B26/101G02B26/105G02B27/0025G02B27/10
    • PROBLEM TO BE SOLVED: To provide a scanner for focusing a radiation flux on a predetermined region in a predetermined volume, capable of simply and accurately focusing a laser beam in predetermined various regions in a certain volume in a lateral direction and in a laser beam direction, and a corresponding method.SOLUTION: A scanner for focusing a radiation flux (3) on a predetermined region in a predetermined volume includes: an input optical system (6) having at least one first optical element (11), which the radiation flux (3) first enters; a focusing optical system (8) for focusing the radiation flux (3) emitted from the input optical system (6); and a deflecting mechanism (7) disposed between the first optical element (11) and the focusing optical system (8) for deflecting the radiation flux (3) having passed through the first optical element (11), in a lateral direction according to the adjusted position of a focal point. At least one optical element (11) of the input optical system (6) is movable relative to the deflecting mechanism (7) to adjust the position of the focal point of the radiation flux (3) in the direction of the radiation flux.
    • 要解决的问题:提供一种用于将辐射通量聚焦在预定体积的预定区域上的扫描器,能够简单且准确地将激光束沿横向和激光束方向以一定体积的预定的各种区域聚焦 和相应的方法。解决方案:用于将辐射通量(3)聚焦在预定体积的预定区域上的扫描器包括:具有至少一个第一光学元件(11)的输入光学系统(6),其中辐射通量 (3)先进入; 用于聚焦从输入光学系统(6)发射的辐射通量(3)的聚焦光学系统(8); 以及设置在第一光学元件(11)和聚焦光学系统(8)之间的偏转机构(7),用于沿着横向方向偏转已经穿过第一光学元件(11)的辐射通量(3) 协调中心的调整位置。 输入光学系统(6)的至少一个光学元件(11)可相对于偏转机构(7)移动,以调节辐射通量(3)的焦点在辐射通量方向上的位置。