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    • 5. 发明申请
    • COMPACT NANOFABRICATION APPARATUS
    • 紧凑的纳米装置
    • US20090023607A1
    • 2009-01-22
    • US12116908
    • 2008-05-07
    • Sergey V. RozhokMichael NelsonNabil A. AmroJoseph S. FragalaRaymond Roger ShileJohn Edward BussanDirk N. vanMerkestyn
    • Sergey V. RozhokMichael NelsonNabil A. AmroJoseph S. FragalaRaymond Roger ShileJohn Edward BussanDirk N. vanMerkestyn
    • C40B50/14C40B60/14
    • G03F7/0002G01Q80/00G03F7/70383G03F9/00
    • An apparatus for use in fabricating structures and depositing materials from tips to surfaces for patterning in direct-write mode, providing ability to travel macroscopic distances and yet provide for nanoscale patterning. Useful in small scale fabrication and nanolithography. The instrument can be compact and used on a laboratory bench or desktop. An apparatus comprising: at least one multi-axis assembly comprising a plurality of nanopositioning stages, at least one pen assembly, wherein the pen assembly and the multi-axis assembly are adapted for delivery of material from the pen assembly to a substrate which is positioned by the multi-axis assembly, at least one viewing assembly, at least one controller. Nanopositioning by piezoelectric methods and devices and motors is particularly useful. The apparatus can include integrated environmental chambers and housings, as well as ink reservoirs for materials to be delivered. The viewing assembly can be a microscope with a long working distance. Particularly useful for fabrication of bioarrays or microarrays. The multi-axis assembly can be a five-axis assembly. Software can facilitate efficient usage.
    • 一种用于制造结构并从尖端到表面沉积材料的装置,用于以直写式模式进行图案化,提供行进宏观距离并提供纳米尺度图案化的能力。 适用于小规模制造和纳米光刻。 该仪器可以紧凑,并在实验台或台式机上使用。 一种装置,包括:至少一个多轴组件,其包括多个纳米定位阶段,至少一个笔组件,其中所述笔组件和所述多轴组件适于将材料从所述笔组件传送到定位的衬底 通过多轴组件,至少一个观察组件,至少一个控制器。 通过压电方法和装置和电动机的定位是特别有用的。 该设备可以包括集成的环境室和壳体,以及用于要输送的材料的油墨储存器。 观察组件可以是具有长工作距离的显微镜。 特别适用于制造生物芯片或微阵列。 多轴组件可以是五轴组件。 软件可以促进有效的使用。
    • 6. 发明申请
    • COMPACT NANOFABRICATION APPARATUS
    • 紧凑的纳米装置
    • US20110195850A1
    • 2011-08-11
    • US13088284
    • 2011-04-15
    • Sergey V. ROZHOKMichael NelsonNabil A. AmroJoseph S. FragalaRaymond Roger ShileJohn Edward BussanDirk N. vanMerkestyn
    • Sergey V. ROZHOKMichael NelsonNabil A. AmroJoseph S. FragalaRaymond Roger ShileJohn Edward BussanDirk N. vanMerkestyn
    • C40B30/00C40B50/14
    • G03F7/0002G01Q80/00G03F7/70383G03F9/00
    • An apparatus for use in fabricating structures and depositing materials from tips to surfaces for patterning in direct-write mode, providing ability to travel macroscopic distances and yet provide for nanoscale patterning. Useful in small scale fabrication and nanolithography. The instrument can be compact and used on a laboratory bench or desktop. An apparatus comprising: at least one multi-axis assembly comprising a plurality of nanopositioning stages, at least one pen assembly, wherein the pen assembly and the multi-axis assembly are adapted for delivery of material from the pen assembly to a substrate which is positioned by the multi-axis assembly, at least one viewing assembly, at least one controller. Nanopositioning by piezoelectric methods and devices and motors is particularly useful. The apparatus can include integrated environmental chambers and housings, as well as ink reservoirs for materials to be delivered. The viewing assembly can be a microscope with a long working distance. Particularly useful for fabrication of bioarrays or microarrays. The multi-axis assembly can be a five-axis assembly. Software can facilitate efficient usage.
    • 一种用于制造结构并从尖端到表面沉积材料的装置,用于以直写式模式进行图案化,提供行进宏观距离并提供纳米尺度图案化的能力。 适用于小规模制造和纳米光刻。 该仪器可以紧凑,并在实验台或台式机上使用。 一种装置,包括:至少一个多轴组件,其包括多个纳米定位阶段,至少一个笔组件,其中所述笔组件和所述多轴组件适于将材料从所述笔组件传送到定位的衬底 通过多轴组件,至少一个观察组件,至少一个控制器。 通过压电方法和装置和电动机的定位是特别有用的。 该设备可以包括集成的环境室和壳体,以及用于要输送的材料的油墨储存器。 观察组件可以是具有长工作距离的显微镜。 特别适用于制造生物芯片或微阵列。 多轴组件可以是五轴组件。 软件可以促进有效的使用。
    • 7. 发明授权
    • Nanomanufacturing devices and methods
    • 纳米制造装置和方法
    • US08261368B2
    • 2012-09-04
    • US12465621
    • 2009-05-13
    • John Edward BussanMichael R. NelsonJoseph S. FragalaAlbert K. HenningJeffrey R. Rendlen
    • John Edward BussanMichael R. NelsonJoseph S. FragalaAlbert K. HenningJeffrey R. Rendlen
    • H01J37/00G01N13/16C23F1/18C23F17/00
    • G03F7/0002G01Q20/04G01Q40/00G01Q70/10G01Q70/16G01Q80/00
    • Devices for performing nanofabrication are provided which provide small volume reaction space and high reaction versatility. A device may include a reaction chamber adapted for nanoscale modification of a substrate and vacuum conditions; a scanning probe tip assembly enclosed within the reaction chamber; a first port coupled to the reaction chamber for delivering a gas; a second port coupled to the reaction chamber for applying a vacuum; and a substrate assembly insertedly mounted to the reaction chamber. The reaction chamber may include a body having one or more flexible walls and one or more supports to prevent the reaction chamber from collapsing under a vacuum. The device may further include an electrical conduit for coupling the tips of the scanning probe tip assembly to electrical components outside the reaction chamber. Also provided are apparatuses incorporating the devices and methods of using the devices and apparatuses.
    • 提供用于进行纳米制造的装置,其提供小体积的反应空间和高反应多功能性。 装置可以包括适于对基底进行纳米尺寸改性的反应室和真空条件; 包围在反应室内的扫描探针头组件; 耦合到所述反应室的用于输送气体的第一端口; 耦合到所述反应室的第二端口,用于施加真空; 以及插入安装到反应室的基板组件。 反应室可以包括具有一个或多个柔性壁和一个或多个支撑物的主体,以防止反应室在真空下塌缩。 该装置还可以包括用于将扫描探针头组件的尖端耦合到反应室外部的电气部件的电导管。 还提供了结合装置的装置和使用装置和装置的方法。