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    • 4. 发明授权
    • Quality monitor and monitoring technique employing optically stimulated
electron emmission
    • 使用光学激发电子发射的质量监测和监测技术
    • US5393980A
    • 1995-02-28
    • US60617
    • 1993-05-11
    • William T. YostChristopher S. WelchEdmond J. JoeBill B. Hefner, Jr.
    • William T. YostChristopher S. WelchEdmond J. JoeBill B. Hefner, Jr.
    • G01N21/33G01N23/227G01Q30/02
    • G01N23/2276G01N21/33
    • A light source directs ultraviolet light onto a test surface and a detector detects a current of photoelectrons generated by the light. The detector includes a collector which is positively biased with respect to the test surface. Quality is indicated based on the photoelectron current. The collector is then negatively biased to replace charges removed by the measurement of a nonconducting substrate to permit subsequent measurements. Also, the intensity of the ultraviolet light at a particular wavelength is monitored and the voltage of the light source varied to maintain the light a constant desired intensity. The light source is also cooled via a gas circulation system. If the test surface is an insulator, the surface is bombarded with ultraviolet light in the presence of an electron field to remove the majority of negative charges from the surface. The test surface is then exposed to an ion field until it possesses no net charge. The technique described above is then performed to assess quality.
    • 光源将紫外光引导到测试表面上,并且检测器检测由光产生的光电子的电流。 检测器包括相对于测试表面被正偏置的收集器。 质量基于光电子电流指示。 然后,收集器被负偏压以替换通过测量非导电衬底去除的电荷以允许随后的测量。 此外,监测特定波长处的紫外线的强度,并且光源的电压变化以保持光线恒定的期望强度。 光源也通过气体循环系统进行冷却。 如果测试表面是绝缘体,则在存在电子场的情况下用紫外光轰击该表面以从表面去除大部分负电荷。 然后将测试表面暴露于离子场,直到其不具有净电荷。 然后执行上述技术以评估质量。
    • 9. 发明授权
    • Optically stimulated electron emission contamination monitor and method
    • 光学刺激电子发射污染监测和方法
    • US06856403B1
    • 2005-02-15
    • US10662161
    • 2003-09-11
    • Christopher S. WelchDaniel F. Perey
    • Christopher S. WelchDaniel F. Perey
    • G01B9/02G01N21/33G01N23/227
    • G01N23/2273G01N21/33
    • An apparatus and method for performing quality inspections on a test surface based on optically stimulated emission of electrons. In one embodiment, the apparatus comprises a device for producing optical radiation having a plurality of different spectrum lines, selecting at least one of the spectrum lines, and directing the selected spectrum line to the test surface, and circuitry for detecting a current of photoelectrons emitted from the test surface, generating a signal indicative of photoelectron current, and for indicating a condition of quality based on the generated signal indicative of the photoelectron current. In one embodiment, the method comprises producing optical radiation having a plurality of different spectrum lines, selecting at least one of the spectrum lines and directing the selected spectrum line to the test surface, detecting a current of photoelectrons emitted from the test surface and generating a signal indicative of photoelectron current, and indicating a condition of quality based on the generated signal indicative of the photoelectron current.
    • 一种用于基于光激发的电子发射在测试表面上进行质量检查的装置和方法。 在一个实施例中,该装置包括用于产生具有多个不同光谱线的光辐射的装置,选择光谱线中的至少一个,并将所选择的光谱线引导到测试表面,以及用于检测发射的光电子的电流的电路 从测试表面产生指示光电子电流的信号,并且基于产生的指示光电子电流的信号来指示质量状态。 在一个实施例中,该方法包括产生具有多个不同光谱线的光辐射,选择光谱线中的至少一个并将所选择的光谱线引导到测试表面,检测从测试表面发射的光电子的电流并产生 指示光电子电流的信号,并且基于产生的指示光电子电流的信号来指示质量条件。