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    • 3. 发明授权
    • Condenser microphone having flexure hinge diaphragm and method of manufacturing the same
    • 具有挠性铰链隔膜的冷凝器麦克风及其制造方法
    • US08605920B2
    • 2013-12-10
    • US13791039
    • 2013-03-08
    • Electronics and Telecommunications Research Institute
    • Hye Jin KimSung Q LeeKang Ho ParkJong Dae Kim
    • H01L25/00
    • H04R31/003H04R19/005H04R31/00H04R2499/11
    • A condenser microphone having a flexure hinge diaphragm and a method of manufacturing the same are provided. The method includes the steps of: forming a lower silicon layer and a first insulating layer; forming an upper silicon layer on the first insulating layer; forming sound holes by patterning the upper silicon layer; forming a second insulating layer and a conductive layer on the upper silicon layer; forming a passivation layer on the conductive layer; forming a sacrificial layer on the passivation layer; depositing a diaphragm on the sacrificial layer, and forming air holes passing through the diaphragm; forming electrode pads on the passivation layer and a region of the diaphragm; and etching the layers to form an air gap between the diaphragm and the upper silicon layer. Consequently, a manufacturing process may improve the sensitivity and reduce the size of the condenser microphone.
    • 提供一种具有挠性铰链膜片的电容麦克风及其制造方法。 该方法包括以下步骤:形成下硅层和第一绝缘层; 在所述第一绝缘层上形成上硅层; 通过图案化上硅层形成声孔; 在上硅层上形成第二绝缘层和导电层; 在导电层上形成钝化层; 在钝化层上形成牺牲层; 在牺牲层上沉积隔膜,并形成穿过隔膜的气孔; 在所述钝化层上形成电极焊盘和所述隔膜的区域; 并蚀刻各层以在隔膜和上硅层之间形成气隙。 因此,制造工艺可以提高电容传声器的灵敏度和减小尺寸。