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1. 发明授权

US10928813B2 Pressure-type flow rate control device and flow rate self-diagnosis method using critical expansion condition 有权
公开(公告)号：US10928813B2
公开(公告)日：2021-02-23
申请号：US16088333
申请日：2017-03-23
申请人： FUJIKIN INCORPORATED
发明人： Masaaki Nagase , Kaoru Hirata , Yohei Sawada , Katsuyuki Sugita , Kouji Nishino , Nobukazu Ikeda
IPC分类号： G05B23/02 , G05D7/06
摘要： A pressure-type flow rate control device includes a restriction part, a control valve disposed upstream of the restriction part, an upstream pressure sensor, a downstream pressure sensor, and a controller that diagnoses flow rate control by using pressure drop data on a flow passage between the control valve and the restriction part and reference pressure drop data, wherein a close command is issued to the control valve and a shutoff valve provided downstream of the downstream pressure sensor, and the controller determines whether a predetermined critical expansion condition is satisfied by using outputs of the upstream pressure sensor and the downstream pressure sensor after the control valve is closed, and diagnoses flow rate control by using the pressure drop data acquired during a period in which the predetermined critical expansion condition is satisfied.

2. 发明授权

US11326921B2 Flow rate measuring method and flow rate measuring device 有权
公开(公告)号：US11326921B2
公开(公告)日：2022-05-10
申请号：US16483518
申请日：2018-02-08
申请人： FUJIKIN INCORPORATED
发明人： Masaaki Nagase , Yohei Sawada , Kouji Nishino , Nobukazu Ikeda
IPC分类号： G01F3/38 , G01F5/00 , G05D7/00 , G01K13/00 , G01L19/00 , G05D7/06
摘要： The flow rate measuring method is performed in a common gas supply system comprising a plurality of gas supply paths each having a first valve, and a gas measuring device formed downstream side of the plurality of gas supply paths, having a pressure sensor, a temperature sensor, and a downstream side second valve. The flow rate measuring method includes: a first step of opening any one of the first valves and the second valve to allow gas to flow, closing the second valve while gas is flowing, and closing the first valve after a predetermined time has elapsed, and then measuring a pressure and a temperature after the first valve has been closed; a second step of opening any one of first valves and the second valve to allow gas to flow, closing the any one of the first valve and the second valve at the same time while gas is flowing, and then measuring a pressure and temperature after the first valve and the second valve have been closed; and a third step of calculating the flow rate in accordance with the pressure and temperature measured in the first step and the pressure and temperature measured in the second step.

3. 发明授权

US09507352B2 Variable orifice type pressure-controlled flow controller 有权
标题翻译：可变孔型压力控制流量控制器
公开(公告)号：US09507352B2
公开(公告)日：2016-11-29
申请号：US14397105
申请日：2013-04-01
申请人： FUJIKIN INCORPORATED
发明人： Ryousuke Dohi , Kouji Nishino , Yohei Sawada , Nobukazu Ikeda
IPC分类号： F16K31/02 , F16K31/52 , G05D7/06 , F16K7/16 , F16K31/524 , F16K31/04
CPC分类号： G05D7/0647 , F16K7/16 , F16K31/04 , F16K31/52491 , Y10T137/87917
摘要： In a variable orifice type pressure-controlled flow controller that includes a pressure control unit and a variable orifice unit, computes a flow rate of a fluid distributed through an orifice of the variable orifice unit as QP1=KP1 (P1 is an orifice upstream side pressure and K is a constant), and switches a flow control range and performs flow control in the flow control range by changing a set flow rate signal Qs for a flow rate arithmetic and control unit of the pressure control unit and an orifice opening degree setting signal Qz for an orifice opening degree arithmetic and control unit of the variable orifice unit, the variable orifice unit includes the orifice opening degree arithmetic and control unit.
摘要翻译：在包括压力控制单元和可变孔单元的可变孔型压力控制流量控制器中，计算通过可变孔单元的孔口分布的流体的流量，如QP1 = KP1（P1是孔口上游侧压力并且K是常数），并且通过改变压力控制单元的流量运算和控制单元的设定流量信号Qs和孔口开度设定信号来切换流量控制范围并且在流量控制范围内执行流量控制 Qz为可变孔单元的孔口开度算术和控制单元，可变孔单元包括孔口开度算术和控制单元。

4. 发明授权

US09261884B2 Apparatus for dividing and supplying gas and method for dividing and supplying gas by use of this apparatus 有权
标题翻译：用于分配和供应气体的装置和使用该装置分配和供应气体的方法
公开(公告)号：US09261884B2
公开(公告)日：2016-02-16
申请号：US13779101
申请日：2013-02-27
申请人： Fujikin Incorporated
发明人： Yohei Sawada , Nobukazu Ikeda , Ryousuke Dohi , Kouji Nishino
IPC分类号： G05D7/06
CPC分类号： G05D7/0641 , G05D7/0664 , Y10T137/0368 , Y10T137/776
摘要： A gas dividing/supplying apparatus includes a pressure-type flow control system, a plurality of divided flow passages connected in parallel with each other and through which gas flowing from the pressure-type flow control system is divided and supplied to a process chamber, thermal-type mass flow sensors disposed in the divided flow passages, respectively, motor-operated valves disposed on a downstream side of the thermal-type mass flow sensors, respectively, and switching-type controllers that control opening and closing of the motor-operated valves, respectively, and, in the apparatus, the switching-type controllers perform switching between valve opening control for maintaining the motor-operated valves at a predetermined fixed valve opening degree based on a valve opening control command signal and divided flow control for regulating an opening degree of each of the motor-operated valves by feedback control based on a flow detection signal of the thermal-type mass flow sensor by a divided flow control command signal.
摘要翻译：气体分配/供给装置包括压力式流量控制系统，多个彼此并联连接的分流流路，从压力式流量控制系统流出的气体通过该流路分配并供给到处理室，热量分别设置在分流道中的质量流量传感器分别设置在热型质量流量传感器的下游侧的电动阀以及控制电动阀的开闭的开关型控制器并且在该装置中，开关型控制器基于开阀控制命令信号进行将电动阀维持在预定的固定阀开度的开阀控制之间的切换，以及用于调节开度的分流控制通过基于热型质量流量传感器的流量检测信号的反馈控制来计算每个电动阀的程度分流控制指令信号。

5. 发明申请

US20130220433A1 APPARATUS FOR DIVIDING AND SUPPLYING GAS AND METHOD FOR DIVIDING AND SUPPLYING GAS BY USE OF THIS APPARATUS 有权
标题翻译：用于分配和供应气体的装置和使用本装置分配和供应气体的方法
公开(公告)号：US20130220433A1
公开(公告)日：2013-08-29
申请号：US13779101
申请日：2013-02-27
申请人： Fujikin Incorporated
发明人： Yohei Sawada , Nobukazu Ikeda , Ryousuke Dohi , Kouji Nishino
IPC分类号： G05D7/06
CPC分类号： G05D7/0641 , G05D7/0664 , Y10T137/0368 , Y10T137/776
摘要： A gas dividing/supplying apparatus includes a pressure-type flow control system, a plurality of divided flow passages connected in parallel with each other and through which gas flowing from the pressure-type flow control system is divided and supplied to a process chamber, thermal-type mass flow sensors disposed in the divided flow passages, respectively, motor-operated valves disposed on a downstream side of the thermal-type mass flow sensors, respectively, and switching-type controllers that control opening and closing of the motor-operated valves, respectively, and, in the apparatus, the switching-type controllers perform switching between valve opening control for maintaining the motor-operated valves at a predetermined fixed valve opening degree based on a valve opening control command signal and divided flow control for regulating an opening degree of each of the motor-operated valves by feedback control based on a flow detection signal of the thermal-type mass flow sensor by a divided flow control command signal.
摘要翻译：气体分配/供给装置包括压力式流量控制系统，多个彼此并联连接的分流流路，从压力式流量控制系统流出的气体通过该流路分配并供给到处理室，热量分别设置在分流道中的质量流量传感器分别设置在热型质量流量传感器的下游侧的电动阀以及控制电动阀的开闭的开关型控制器并且在该装置中，开关型控制器基于开阀控制命令信号进行将电动阀维持在预定的固定阀开度的开阀控制之间的切换，以及用于调节开度的分流控制通过基于热型质量流量传感器的流量检测信号的反馈控制来计算每个电动阀的程度分流控制指令信号。

6. 发明授权

US11460869B2 Fluid control system and flow rate measurement method 有权
公开(公告)号：US11460869B2
公开(公告)日：2022-10-04
申请号：US16634603
申请日：2018-07-24
申请人： FUJIKIN INCORPORATED
发明人： Satoru Yamashita , Yohei Sawada , Masaaki Nagase , Kouji Nishino , Nobukazu Ikeda
IPC分类号： F17D1/00 , G05D7/06
摘要： A fluid control system (1) comprises: a first valve (21) provided downstream of a flow rate controller (10), a flow rate measuring device (30) provided downstream of the first valve (21) and having a second valve (22), an open/close detector (26) provided to the second valve (22), and a controller (25) for controlling an open/close operation of the first valve (21) and the second valve (22), and the controller (25) controls the open/close operation of the first valve (21) in response to a signal output from the open/close detector (26).

7. 发明授权

US10969259B2 Flow rate control device, method of calibrating flow rate of flow rate control device, flow rate measuring device, and method of measuring flow rate using flow rate measuring device 有权
公开(公告)号：US10969259B2
公开(公告)日：2021-04-06
申请号：US16309697
申请日：2017-06-22
申请人： FUJIKIN INCORPORATED
发明人： Yohei Sawada , Masaaki Nagase , Kouji Nishino , Nobukazu Ikeda
IPC分类号： G01F1/42 , G05D7/00 , G01F15/00 , G01F25/00 , G01F1/36
摘要： In a method of calibrating a flow rate control device in which a flow rate is calibrated based on comparison with a flow rate measured by a flow rate reference gauge, a predetermined permissible error range is set for a plurality of flow rate settings, and the permissible error range of at least one specific flow rate setting among the plurality of flow rate settings is set to be smaller than the predetermined permissible error range.

8. 发明授权

US10895484B2 Gas supply device capable of measuring flow rate, flowmeter, and flow rate measuring method 有权
公开(公告)号：US10895484B2
公开(公告)日：2021-01-19
申请号：US16069126
申请日：2017-01-12
申请人： FUJIKIN INCORPORATED
发明人： Yohei Sawada , Nobukazu Ikeda , Kouji Nishino , Masaaki Nagase
IPC分类号： G01F3/38 , G01F15/04 , G01F1/34 , G01F25/00 , G05D7/06 , G01F1/50 , G01F17/00 , G01F22/02
摘要： A gas supply system capable of flow measurement includes a flow controller that controls the flow rate of a flowing gas, a first shutoff valve provided downstream of the flow controller, a second shutoff valve provided in a first flow passage communicating with the downstream side of the first shutoff valve, a second flow passage that branches from the first flow passage, a third shutoff valve provided in the second flow passage, a pressure sensing device that detects a pressure in a flow passage controlled by the first, second, and third shutoff valves, a temperature sensing device that detects a temperature in the flow passage controlled by the first, second, and third shutoff valves, a volume measuring tank connected downstream of the third shutoff valve and having a known volume, and an arithmetic and control unit that obtains a passage volume controlled by the first, second, and third shutoff valves by applying Boyle's law to open and closed states of the third shutoff valve and calculates the flow rate of the flow controller, using the passage volume and detection values obtained by the pressure sensing device and the temperature sensing device.

9. 发明授权

US09477232B2 Apparatus for dividing and supplying gas and method for dividing and supplying gas 有权
标题翻译：用于分配和供应气体的装置和用于分配和供应气体的方法
公开(公告)号：US09477232B2
公开(公告)日：2016-10-25
申请号：US14473493
申请日：2014-08-29
申请人： FUJIKIN INCORPORATED , TOKYO ELECTRON LIMITED
发明人： Eiji Takahashi , Norikazu Sasaki , Atsushi Sawachi , Yohei Sawada , Nobukazu Ikeda , Ryousuke Dohi , Kouji Nishino
IPC分类号： G05D7/06 , G05D11/13
CPC分类号： G05D7/0664 , G05D11/132 , Y10T137/0363 , Y10T137/2529 , Y10T137/2562 , Y10T137/7759 , Y10T137/7761
摘要： An apparatus for dividing and supplying gas is provided with a flow rate control device, a plurality of divided flow passages of gas flowing from the flow rate control device, thermal-type mass flow sensors disposed to the divided flow passages, electrically-operated valves disposed on a downstream side of the thermal-type mass flow sensors, controllers that control the electrically-operated valves, and a flow ratio setting calculator that calculates a total flow rate, then calculates flow rates of the divided flow passages, and then inputs the calculated flow rates as set flow rates to each controllers. One of the divided flow passages with the highest set flow rate is put in an uncontrolled state, and opening degree for each of the rest divided flow passages is controlled, and then feedback control of the divided flow rate of each of the divided flow passages is implemented by each of the controllers.
摘要翻译：一种用于分配和供应气体的装置设置有流量控制装置，从流量控制装置流动的多个分流流路，设置在分流流路上的热型质量流量传感器，设置有电动阀的电动阀在热型质量流量传感器的下游侧，控制电动阀的控制器和计算总流量的流量比设定计算器，然后计算分流流路的流量，然后输入计算出的流量设定为每个控制器的流量。一个具有最高设定流量的分流通道被置于不受控状态，并且对每个其余分流通道的开度进行控制，然后每个分流道的分流流量的反馈控制是由每个控制器实现。

10. 发明授权

US11339881B2 Valve device and fluid control device 有权
公开(公告)号：US11339881B2
公开(公告)日：2022-05-24
申请号：US16966270
申请日：2019-02-19
申请人： FUJIKIN INCORPORATED
发明人： Kazunari Watanabe , Kohei Shigyou , Yohei Sawada , Tomohiro Nakata , Tsutomu Shinohara
IPC分类号： F16K7/16 , F16K27/02 , C23C16/455 , H01L21/67
摘要： Provided is a valve device in which influence of a physical impact on a valve element is further reduced. Valve device includes a valve seat disposed around an opening connected to a flow path formed in a valve body, a diaphragm for opening and closing flow path by moving between a contact position and a non-contact position with respect to the valve seat, a presser adapter that contacts a peripheral portion of the diaphragm, a casing that incorporates an actuator for actuating the diaphragm and is fixed on the valve body by being screwed into a screw hole formed in the valve body, and an adapter fixing ring that is screwed into the screw hole and thereby fixed in the valve body while pressing the presser adapter and the diaphragm.

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