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2. 发明申请

US20130126378A1 RETICLE POD WITH DRAIN STRUCTURE 有权
标题翻译：具有排水结构的物品POD
公开(公告)号：US20130126378A1
公开(公告)日：2013-05-23
申请号：US13675141
申请日：2012-11-13
申请人： Gudeng Precision Industrial Co., Ltd.
发明人： CHEN-WEI KU , PAO-YI LU , CHIN-MING LIN , JAIN-PIN SHENG
IPC分类号： B65D85/48
CPC分类号： B65D85/48 , H01L21/67359 , H01L21/67386
摘要： A reticle pod with drain structure comprises an outer container and an inner container, wherein an upper cover of inner container is disposed with a plurality of retainers, and a plurality of supporters disposed on the outer container are used to press the retainers for fastening and stabilizing the reticle in the inner container and thus ensuring safety and stability of the reticle in the reticle pod. Collision risks of the reticle in the reticle pod due to vacillation of reticle pod during transportation can be reduced. Cost of reticles also can be greatly decreased. Further, a plurality of drain holes is disposed on a lower cover of the outer container for draining the remained water in the outer container. It will be done without disassembling the lower cover of outer container for reducing the contamination opportunity in the pod and preventing from wasting of labor and time for disassembling.
摘要翻译：具有排水结构的分划板舱包括外容器和内容器，其中内容器的上盖布置有多个保持器，并且使用设置在外容器上的多个支撑件来按压固定器用于紧固和稳定掩模版在内容器中，从而确保掩模版在标线盒中的安全性和稳定性。可以减少由于在运输过程中光罩荚的挥发而导致的光罩荚中的掩模版的碰撞风险。标线的成本也可以大大降低。此外，在外容器的下盖上设置有多个排水孔，用于排出外容器中的剩余水。在不拆卸外容器的下盖的情况下，可以进行拆卸，以减少荚中的污染机会，防止浪费劳动力和拆卸时间。

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