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1. 发明授权

US09396980B2 Anti-electrostatic substrate cassette 有权
标题翻译：防静电衬底盒
公开(公告)号：US09396980B2
公开(公告)日：2016-07-19
申请号：US14246337
申请日：2014-04-07
申请人： GUDENG PRECISION INDUSTRIAL CO., LTD.
发明人： Chien-Feng Wang , Shao-Wei Lu , Po-Tin Lee
IPC分类号： B65D85/30 , H01L21/673
CPC分类号： H01L21/67396 , B65D85/30
摘要： The present invention provides an anti-electrostatic cassette, which mainly comprises at least an electrostatic discharge (ESD) device connected electrically to the carrying frames, which are disposed in the substrate cassette and carry the substrates, and to the handles, which are disposed on the outer sides of the substrate cassette, for forming the conductive path. By means of the contact between the equipment and the two handles of the substrate cassette, the residual static charges on the substrates are conducted to the ground for reducing the residual static charges on the substrates. Consequently, the ESD phenomena in the substrates due to friction can be avoided and hence preventing the damages in the substrates caused by static charges.
摘要翻译：本发明提供了一种抗静电盒，其主要包括至少一个静电放电（ESD）装置，其电连接到承载框架上，静电放电装置设置在基板盒中并承载基板，并且被放置在手柄上用于形成导电路径的基板盒的外侧。通过设备与基板盒的两个手柄之间的接触，将基板上的残留静电电荷传导到地面，以减少基板上的残余静电。因此，可以避免由于摩擦而导致的基板中的ESD现象，并因此防止由静电引起的基板中的损坏。

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