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1. 发明申请

US20140299508A1 ANTI-ELECTROSTATIC SUBSTRATE CASSETTE 有权
标题翻译：抗静电基材CASSETTE
公开(公告)号：US20140299508A1
公开(公告)日：2014-10-09
申请号：US14246337
申请日：2014-04-07
申请人： GUDENG PRECISION INDUSTRIAL CO., LTD.
发明人： CHIEN-FENG WANG , SHAO-WEI LU , PO-TIN LEE
IPC分类号： H01L21/673
CPC分类号： H01L21/67396 , B65D85/30
摘要： The present invention provides an anti-electrostatic cassette, which mainly comprises at least an electrostatic discharge (ESD) device connected electrically to the carrying frames, which are disposed in the substrate cassette and carry the substrates, and to the handles, which are disposed on the outer sides of the substrate cassette, for forming the conductive path. By means of the contact between the equipment and the two handles of the substrate cassette, the residual static charges on the substrates are conducted to the ground for reducing the residual static charges on the substrates. Consequently, the ESD phenomena in the substrates due to friction can be avoided and hence preventing the damages in the substrates caused by static charges.
摘要翻译：本发明提供了一种抗静电盒，其主要包括至少一个静电放电（ESD）装置，其电连接到承载框架上，静电放电装置设置在基板盒中并承载基板，并且被放置在手柄上用于形成导电路径的基板盒的外侧。通过设备与基板盒的两个手柄之间的接触，将基板上的残留静电电荷传导到地面，以减少基板上的残余静电。因此，可以避免由于摩擦而导致的基板中的ESD现象，并因此防止由静电引起的基板中的损坏。

2. 发明申请

US20140076773A1 FRONT OPENING UNIFIED POD HAVING INLET AND OUTLET 审中-公开
标题翻译：正面打开统一的入口和出口的POD
公开(公告)号：US20140076773A1
公开(公告)日：2014-03-20
申请号：US13719428
申请日：2012-12-19
申请人： GUDENG PRECISION INDUSTRIAL CO., LTD.
发明人： CHI-TE HUANG , SHAO-WEI LU , YU-LIANG CHOU
IPC分类号： H01L21/677
CPC分类号： H01L21/677 , H01L21/67393
摘要： The present invention relates to a front opening unified pod (FOUP) having three inlets and one outlet. Thereby, the mixing region for the moisture, oxygen, and the filled gas can be increased and the removing efficiency of the moisture and oxygen in the FOUP is enhanced, improving the purging efficiency of the FOUP and shortening the time required for filling gas. In addition, the humidity in the FOUP can be reduced effectively so that the internal environment of the FOUP can reach rapidly the condition suitable for semiconductor fabrication. Hence, the subsequent semiconductor processes can be performed and the preparation time for the processes can be shortened.
摘要翻译：本发明涉及具有三个入口和一个出口的前开口统一舱（FOUP）。由此，能够提高水分，氧气和填充气体的混合区域，提高FOUP中的水分和氧气的除去效率，提高FOUP的净化效率，缩短填充气体所需的时间。此外，可以有效地降低FOUP中的湿度，使得FOUP的内部环境能够迅速达到适合于半导体制造的条件。因此，可以执行随后的半导体处理，并且可以缩短处理的准备时间。

3. 发明申请

US20140238896A1 SUBSTRATE CONTAINER HAVING LIMIT STRUCTURE 审中-公开
标题翻译：具有极限结构的基座容器
公开(公告)号：US20140238896A1
公开(公告)日：2014-08-28
申请号：US13863526
申请日：2013-04-16
申请人： GUDENG PRECISION INDUSTRIAL CO., LTD.
发明人： CHI-TE HUANG , CHIEN-FENG WANG , SHAO-WEI LU , TIEN-JUI LIN
IPC分类号： H01L21/673
CPC分类号： H01L21/67383
摘要： A substrate container having a limit structure includes a box, at least one limit structure and a door. The limit structure is disposed on a side wall of the box and has a plurality of limit grooves. Each limit groove has a first inclined surface and a second inclined surface. The angle of inclination of the second inclined plane relative to a horizontal plane corresponds to a coefficient of friction between materials of the substrate and the limit structure to lower the friction between the substrate and the second inclined plane of the limit groove, so that the substrate can ascend along the second inclined plane to get into the limit groove for the door to be closed smoothly. Through the limit structure to position the substrate, the present invention can prevent the substrate from shaking in the substrate container.
摘要翻译：具有限制结构的基底容器包括一个盒子，至少一个限制结构和一个门。极限结构设置在箱体的侧壁上并且具有多个限位槽。每个限制槽具有第一倾斜表面和第二倾斜表面。第二倾斜面相对于水平面的倾斜角度对应于基板材料与极限结构之间的摩擦系数，以降低基板与限制槽的第二倾斜平面之间的摩擦，使得基板可以沿着第二倾斜平面上升，进入限位槽，使门平稳地关闭。通过定位基板的极限结构，本发明可以防止基板在基板容器中摇动。

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