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    • 2. 发明申请
    • ANGULAR VELOCITY SENSOR
    • 角速度传感器
    • US20130000404A1
    • 2013-01-03
    • US13531680
    • 2012-06-25
    • Takashi KATSUMATAHirofumi HIGUCHI
    • Takashi KATSUMATAHirofumi HIGUCHI
    • G01C19/56
    • G01C19/5712
    • An angular velocity sensor includes a vibrator, a support substrate, an anchor section, a connection beam section, a driving section, and a detection section. The vibrator includes an inner vibrator and an outer vibrator, which vibrate in opposite circumferential directions when driven by the driving section. The connection beam section couples the vibrator to the anchor section, and is elastic in a z-direction and a circumferential direction. The connection beam section includes first connection beams, each of which is coupled to the outer vibrator at one end and is coupled to the inner vibrator at the other end, and second connection beams, each of which is coupled to a vibration node of a corresponding first connection beam at one end and is coupled to the anchor section at the other end.
    • 角速度传感器包括振动器,支撑基板,锚固部分,连接梁部分,驱动部分和检测部分。 振动器包括内部振动器和外部振动器,当由驱动部驱动时振动器在外周振动。 连接梁部分将振动器连接到锚固部分,并且在z方向和圆周方向上是弹性的。 连接梁部分包括第一连接梁,每个连接梁在一端连接到外部振动器,并在另一端连接到内部振动器;第二连接梁,每个连接梁连接到相应的振动节点 第一连接梁在一端并且在另一端耦合到锚固部分。