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    • 10. 发明申请
    • Inertial Sensor
    • 惯性传感器
    • US20120043855A1
    • 2012-02-23
    • US13284752
    • 2011-10-28
    • Yun Sung KangJung Won LeeJong Woon KimSeung Hun HanMin Kyu Choi
    • Yun Sung KangJung Won LeeJong Woon KimSeung Hun HanMin Kyu Choi
    • G01P15/09
    • G01P15/09G01C19/56G01P15/097
    • Disclosed herein is an inertial sensor of the present invention. An inertial sensor 100 according to a preferred embodiment of the present invention includes a plate-shaped membrane 110, a mass body 120 disposed under a central portion 113 of the membrane 110, a post 130 disposed under an edge 115 of the membrane 110 and surrounding the mass body 120, a piezoelectric material 140 formed above the membrane 110 and provided with a cavity 141 in a thickness direction, a sensing electrode 150 disposed in the cavity 141 and a driving electrode 160 disposed outside the cavity 141, whereby the thickness of the piezoelectric material 140 of the portion on which the sensing electrode 150 is disposed is formed to be thin, such that the sensitivity of the inertial sensor 100 can be improved.
    • 本文公开了本发明的惯性传感器。 根据本发明的优选实施例的惯性传感器100包括板状膜110,设置在膜110的中心部分113下方的质量体120,设置在膜110的边缘115下方的周边 质量体120,形成在膜110上方并且在厚度方向上设置有空腔141的压电材料140,设置在空腔141中的感测电极150和设置在空腔141外部的驱动电极160,由此, 将设置有感测电极150的部分的压电材料140形成为较薄,使得可以提高惯性传感器100的灵敏度。