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1. 发明授权

US09618101B2 Actuator, sample positioning device, and charged particle beam system 有权
公开(公告)号：US09618101B2
公开(公告)日：2017-04-11
申请号：US14925072
申请日：2015-10-28
申请人： JEOL Ltd.
发明人： Shuichi Yuasa
IPC分类号： H01J37/26 , F16H25/20 , H01J37/20
CPC分类号： F16H25/20 , F16H2025/204 , F16H2025/2078 , H01J37/20 , H01J2237/0216 , H01J2237/0458 , H01J2237/20221 , H01J2237/20278 , H01J2237/26
摘要： An actuator capable of reducing vibrations of its output shaft is offered. The actuator (100) includes an electric motor (10), a ball spline (20) of finite stroke length, and a nut (32). The ball spline (20) has a shaft (22) provided with rolling grooves (23) which are formed along the axis of the spline and along which balls (24) can roll. An external thread (34) is formed on the shaft (22). The nut (32) has an internal thread (33) with which the external thread (34) threadedly mates, and operates to transmit the rotary force of the motor (10) into the shaft (22).

2. 发明申请

US20220223370A1 Sample Holder and Charged Particle Beam System 有权
公开(公告)号：US20220223370A1
公开(公告)日：2022-07-14
申请号：US17570802
申请日：2022-01-07
申请人： JEOL Ltd.
发明人： Shuichi Yuasa
IPC分类号： H01J37/20
摘要： There is provided a sample holder which is for use in a charged particle beam system and which can prevent damage to a sample stage during transportation of a cartridge. The sample holder includes: the cartridge having the sample stage for holding a sample therein; and a holder base having a mounting portion to which the cartridge can be mounted. The cartridge has: a tilt mechanism for tilting the sample stage; and a lock lever which, when the cartridge has been taken out from the mounting portion, makes contact with the sample stage and limits tilt of the stage.

3. 发明申请

US20140290393A1 Sample Introduction Device and Charged Particle Beam Instrument 有权
标题翻译：样品介绍装置和带电粒子束仪器
公开(公告)号：US20140290393A1
公开(公告)日：2014-10-02
申请号：US14225793
申请日：2014-03-26
申请人： JEOL Ltd.
发明人： Shuichi Yuasa
IPC分类号： H01J37/20
CPC分类号： H01J37/185 , H01J37/16 , H01J37/20 , H01J2237/184
摘要： A sample introduction device (100) is adapted to introduce a sample (S) into the sample chamber (1) of a charged particle beam instrument. The device includes: a pre-evacuation chamber (2) for performing a pre-evacuation; a sample holder (10) having a sample holding portion (12) capable of holding the sample (S); a support portion (20) for supporting the sample holder (10); mechanical drives (30); and goniometer (50) for moving and rotating the support portion (20) such that the sample holding portion (12) moves from inside the pre-evacuation chamber (2) into the sample chamber (1). Partition valve (70) can be activated by the action of the goniometer.
摘要翻译：样品引入装置（100）适于将样品（S）引入带电粒子束仪器的样品室（1）中。该装置包括：用于执行预抽真空的预抽空室（2）; 具有能够保持样品（S）的样品保持部（12）的样品保持器（10）; 用于支撑样品架（10）的支撑部分（20）; 机械驱动（30）; 以及用于使支撑部分（20）移动和旋转的测角器（50），使得样品保持部分（12）从预抽真空室（2）的内部移动到样品室（1）中。分隔阀（70）可以通过测角器的作用激活。

4. 发明申请

US20220223371A1 Charged Particle Beam System 有权
公开(公告)号：US20220223371A1
公开(公告)日：2022-07-14
申请号：US17570749
申请日：2022-01-07
申请人： JEOL Ltd.
发明人： Shuichi Yuasa
IPC分类号： H01J37/26 , H01J37/18 , H01J37/20
摘要： Provided is a charged particle beam system capable of reducing the force applied to a sample when a chuck device grips the sample. The charged particle beam system is typified by an electron microscope including a sample chamber, a sample exchange chamber connected to the sample chamber, a sample container capable of being removably attached in the sample exchange chamber, and a transport device for transporting the sample between the sample container and the sample exchange chamber. The transport device includes the chuck device for gripping the sample, a drive mechanism for moving the chuck device in a given direction, a mechanical driver for actuating the chuck device, and a power transmission mechanism for transmitting power of the mechanical driver to the chuck device. The power transmission mechanism includes a shaft and a resilient member that elastically deforms when a force in the given direction is applied to the shaft.

5. 发明申请

US20180374671A1 Sample Holder and Electron Microscope 审中-公开
公开(公告)号：US20180374671A1
公开(公告)日：2018-12-27
申请号：US16007276
申请日：2018-06-13
申请人： JEOL Ltd.
发明人： Kazuki Yagi , Takeo Sasaki , Ichiro Onishi , Shuichi Yuasa , Masashi Shimizu
IPC分类号： H01J37/20 , H01J37/10 , H01J37/244 , H01J37/09 , H01J37/28
摘要： A sample holder capable of limiting X-rays accepted into an X-ray detector is provided. The sample holder is for use in an electron microscope equipped with a polepiece assembly and a semiconductor detector. The sample holder includes: a sample stage on which a sample is held; and a shield plate. When the sample stage has been introduced in the sample chamber of the electron microscope, the shield plate is located between the polepiece assembly and the semiconductor detector.

6. 发明授权

US09349568B2 Sample introduction device and charged particle beam instrument 有权
标题翻译：样品引入装置和带电粒子束仪
公开(公告)号：US09349568B2
公开(公告)日：2016-05-24
申请号：US14225793
申请日：2014-03-26
申请人： JEOL Ltd.
发明人： Shuichi Yuasa
IPC分类号： H01J37/18 , H01J37/20 , H01J37/16
CPC分类号： H01J37/185 , H01J37/16 , H01J37/20 , H01J2237/184
摘要： A sample introduction device (100) is adapted to introduce a sample (S) into the sample chamber (1) of a charged particle beam instrument. The device includes: a pre-evacuation chamber (2) for performing a pre-evacuation; a sample holder (10) having a sample holding portion (12) capable of holding the sample (S); a support portion (20) for supporting the sample holder (10); mechanical drives (30); and goniometer (50) for moving and rotating the support portion (20) such that the sample holding portion (12) moves from inside the pre-evacuation chamber (2) into the sample chamber (1). Partition valve (70) can be activated by the action of the goniometer.
摘要翻译：样品引入装置（100）适于将样品（S）引入带电粒子束仪器的样品室（1）中。该装置包括：用于执行预抽真空的预抽空室（2）; 具有能够保持样品（S）的样品保持部（12）的样品保持器（10）; 用于支撑样品架（10）的支撑部分（20）; 机械驱动（30）; 以及用于使支撑部分（20）移动和旋转的测角器（50），使得样品保持部分（12）从预抽真空室（2）的内部移动到样品室（1）中。分隔阀（70）可以通过测角器的作用激活。

7. 发明授权

US11640895B2 Sample holder and charged particle beam system 有权
公开(公告)号：US11640895B2
公开(公告)日：2023-05-02
申请号：US17570719
申请日：2022-01-07
申请人： JEOL Ltd.
发明人： Shuichi Yuasa , Takahisa Kawamura
IPC分类号： H01J37/20 , H01J37/18
摘要： There is provided a sample holder capable of reducing positional deviation of a cartridge in the heightwise direction of a sample. The sample holder includes the cartridge and a holder base having a mounting portion for the cartridge. The mounting portion includes a placement surface, a first tilted surface, and a rotary drive mechanism for imparting a rotary force to the cartridge. The cartridge includes an opposing first tilted surface opposite to the first tilted surface of the mounting portion. As the rotary drive mechanism imparts the rotary force to the cartridge, the first tilted surface of the cartridge is pressed against the first tilted surface of the mounting portion, whereby the cartridge is pressed against the placement surface.

8. 发明授权

US11631569B2 Charged particle beam system 有权
公开(公告)号：US11631569B2
公开(公告)日：2023-04-18
申请号：US17570749
申请日：2022-01-07
申请人： JEOL Ltd.
发明人： Shuichi Yuasa
IPC分类号： H01J37/26 , H01J37/18 , H01J37/20
摘要： Provided is a charged particle beam system capable of reducing the force applied to a sample when a chuck device grips the sample. The charged particle beam system is typified by an electron microscope including a sample chamber, a sample exchange chamber connected to the sample chamber, a sample container capable of being removably attached in the sample exchange chamber, and a transport device for transporting the sample between the sample container and the sample exchange chamber. The transport device includes the chuck device for gripping the sample, a drive mechanism for moving the chuck device in a given direction, a mechanical driver for actuating the chuck device, and a power transmission mechanism for transmitting power of the mechanical driver to the chuck device. The power transmission mechanism includes a shaft and a resilient member that elastically deforms when a force in the given direction is applied to the shaft.

9. 发明申请

US20220223369A1 Transport Device and Charged Particle Beam System 有权
公开(公告)号：US20220223369A1
公开(公告)日：2022-07-14
申请号：US17570775
申请日：2022-01-07
申请人： JEOL Ltd.
发明人： Shuichi Yuasa
IPC分类号： H01J37/20
摘要： There is provided a transport device capable of reducing drifting of a sample. The transport device delivers a cartridge to a sample holder in a charged particle beam system. The transport device has a mounting portion to which the cartridge can be detachably mounted, a shaft portion providing support of the mounting portion, a resilient member connecting together the shaft portion and the mounting portion, and a drive mechanism for moving the mounting portion.

10. 发明申请

US20220223368A1 Sample Holder and Charged Particle Beam System 有权
公开(公告)号：US20220223368A1
公开(公告)日：2022-07-14
申请号：US17570719
申请日：2022-01-07
申请人： JEOL Ltd.
发明人： Shuichi Yuasa , Takahisa Kawamura
IPC分类号： H01J37/18 , H01J37/20
摘要： There is provided a sample holder capable of reducing positional deviation of a cartridge in the heightwise direction of a sample. The sample holder includes the cartridge and a holder base having a mounting portion for the cartridge. The mounting portion includes a placement surface, a first tilted surface, and a rotary drive mechanism for imparting a rotary force to the cartridge. The cartridge includes an opposing first tilted surface opposite to the first tilted surface of the mounting portion. As the rotary drive mechanism imparts the rotary force to the cartridge, the first tilted surface of the cartridge is pressed against the first tilted surface of the mounting portion, whereby the cartridge is pressed against the placement surface.

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