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1. 发明授权

US5434648A Proximity exposure method and machine therefor 失效
标题翻译：接近曝光方法及其机器
公开(公告)号：US5434648A
公开(公告)日：1995-07-18
申请号：US195764
申请日：1994-02-10
申请人： Keisuke Koga , Nobufumi Atoda , Tohru Itoh
发明人： Keisuke Koga , Nobufumi Atoda , Tohru Itoh
IPC分类号： G03F7/20 , G03F9/00 , H01L21/027
CPC分类号： G03F9/70
摘要： A proximity exposure method and apparatus therefor. Replications of mask patterns are carried out, wherein as a mask closely approaches a substrate, the displacement of the mask is detected, and the atmospheric pressure between the mask and the substrate, or around the side of the mask opposite the substrate is controlled so as to cancel the displacement of the mask. The apparatus includes positioning apparatus, a light source for exposing the mask pattern, displacement measuring means, and atmospheric pressure controlling means.
摘要翻译：接近曝光方法及其装置。执行掩模图案的复制，其中当作为掩模紧密接近基板时，检测掩模的位移，并且掩模和基板之间或围绕与基板相对的一侧的大气压力被控制为如以取消掩模的位移。该装置包括定位装置，用于曝光掩模图案的光源，位移测量装置和大气压力控制装置。

2. 发明授权

US08713959B2 Heat generating body box housing refrigeration device 有权
标题翻译：发热体箱体制冷装置
公开(公告)号：US08713959B2
公开(公告)日：2014-05-06
申请号：US13511458
申请日：2010-11-19
申请人： Yuuji Nakano , Hiroshi Shibata , Keisuke Koga , Mutsuhiko Matsumoto , Keisuke Tsuji
发明人： Yuuji Nakano , Hiroshi Shibata , Keisuke Koga , Mutsuhiko Matsumoto , Keisuke Tsuji
IPC分类号： F25D17/00
CPC分类号： H05K7/20681 , F28D15/0266
摘要： A heat generating body box housing refrigeration device includes a first refrigerant cycle in which a first condenser and a first evaporator are connected by a first refrigerant liquid pipe and a first refrigerant steam pipe and a second refrigerant cycle in which a second condenser and a second evaporator are connected by a second refrigerant liquid pipe and a second refrigerant steam pipe. The first refrigerant liquid pipe is connected between a first joint and a second joint, the first refrigerant steam pipe is connected between a third joint and a fourth joint, the second refrigerant liquid pipe is connected between a fifth joint and a sixth joint, and the second refrigerant steam pipe is connected between a seventh joint and an eighth joint.
摘要翻译：发热体箱体的制冷装置包括：第一制冷剂循环，其中第一冷凝器和第一蒸发器通过第一制冷剂液体管和第一制冷剂蒸汽管和第二制冷剂循环连接，其中第二冷凝器和第二蒸发器通过第二制冷剂液体管道和第二制冷剂蒸汽管道连接。第一制冷剂液体管连接在第一接头和第二接头之间，第一制冷剂蒸汽管连接在第三接头和第四接头之间，第二制冷剂液体管连接在第五接头和第六接头之间，第二制冷剂蒸汽管连接在第七关节和第八关节之间。

3. 发明授权

US07825591B2 Mesh structure and field-emission electron source apparatus using the same 有权
标题翻译：网格结构和场致发射电子源装置使用
公开(公告)号：US07825591B2
公开(公告)日：2010-11-02
申请号：US11706939
申请日：2007-02-13
申请人： Junichi Kimiya , Keisuke Koga , Makoto Yamamoto
发明人： Junichi Kimiya , Keisuke Koga , Makoto Yamamoto
IPC分类号： H05H7/00
CPC分类号： H01J1/46 , H01J3/021 , H01J29/467 , H01J31/123
摘要： An electron beam emitted from a field-emission electron source array passes through a plurality of through holes formed in a mesh structure and reaches a target. Each of the plurality of through holes in the mesh structure has an opening on a side of the field-emission electron source array and an electron beam passageway that continues from the opening. The mesh structure is formed of a silicon-containing material doped with a N-type or P-type material. In this way, it is possible to suppress a decrease in the amount of the electron beam reaching the target while securing a mechanical strength of an electrode provided with a large number of through holes, and suppress expansion of the electron beam on the target.
摘要翻译：从场发射电子源阵列发射的电子束通过形成在网状结构中的多个通孔并达到目标。网格结构中的多个通孔中的每一个在场致发射电子源阵列的一侧具有开口，以及从开口延续的电子束通道。网状结构由掺杂有N型或P型材料的含硅材料形成。以这种方式，可以在确保具有大量通孔的电极的机械强度的同时，抑制到达目标的电子束的量的减少，并且抑制电子束在靶上的膨胀。

4. 发明授权

US07588475B2 Field-emission electron source, method of manufacturing the same, and image display apparatus 失效
标题翻译：场发射电子源及其制造方法以及图像显示装置
公开(公告)号：US07588475B2
公开(公告)日：2009-09-15
申请号：US11729442
申请日：2007-03-29
申请人： Keisuke Koga , Makoto Yamamoto , Akinori Shiota , Seigo Kanemaru , Masayoshi Nagao
发明人： Keisuke Koga , Makoto Yamamoto , Akinori Shiota , Seigo Kanemaru , Masayoshi Nagao
IPC分类号： H01J9/00
CPC分类号： H01J1/3044 , H01J9/025 , H01J2201/30407
摘要： A stable field-emission electron source that does not suffer from a current drop even after a high-current density operation for a long time is provided. The field-emission electron source includes: a substrate; an insulating layer that is formed on the substrate and that has a plurality of openings; cathodes arranged at the respective openings in order to emit electron beams; a lead electrode formed on the insulating layer in order to control emission of electrons from the respective cathodes; and a surface-modifying layer formed on the surface of each of the cathodes emitting electrons, comprising a chemical bond between a cathode material composing the cathodes and a material different from the cathode material.
摘要翻译：提供即使在长时间的大电流密度操作之后也不会受到电流降低的稳定的场致发射电子源。场发射电子源包括：衬底; 绝缘层，其形成在所述基板上并且具有多个开口; 阴极排列在相应的开口处以便发射电子束; 形成在所述绝缘层上的引线电极，以便控制来自各个阴极的电子的发射; 以及形成在发射电子的每个阴极的表面上的表面改性层，包括构成阴极的阴极材料与不同于阴极材料的材料之间的化学键。

5. 发明授权

US06692327B1 Method for producing electron emitting element 失效
标题翻译：用于制造包括两种材料的圆柱形电子发射元件的方法
公开(公告)号：US06692327B1
公开(公告)日：2004-02-17
申请号：US09480415
申请日：2000-01-11
申请人： Masahiro Deguchi , Makoto Kitabatake , Kanji Imai , Tomohiro Sekiguchi , Hideo Kurokawa , Keisuke Koga , Tetsuya Shiratori , Toru Kawase
发明人： Masahiro Deguchi , Makoto Kitabatake , Kanji Imai , Tomohiro Sekiguchi , Hideo Kurokawa , Keisuke Koga , Tetsuya Shiratori , Toru Kawase
IPC分类号： H01J902
CPC分类号： H01J9/025 , H01J1/304 , H01J2201/30446
摘要： An electron emission element includes a substrate, a cathode electrode formed on the substrate, an anode electrode disposed so as to be opposed to the cathode electrode, an electron emission member disposed on the cathode electrode, a control electrode disposed between the cathode electrode and the anode electrode, and an insulating layer. The electron emission member includes a first member having a hole and a second member filling the hole, wherein the second member is more likely to emit electrons than the first member.
摘要翻译：电子发射元件包括基板，形成在基板上的阴极电极，与阴极相对设置的阳极电极，设置在阴极电极上的电子发射部件，设置在阴极电极和阴极电极之间的控制电极，阳极电极和绝缘层。电子发射构件包括具有孔的第一构件和填充孔的第二构件，其中第二构件比第一构件更可能发射电子。

6. 发明申请

US20110057555A1 MATRIX-TYPE COLD-CATHODE ELECTRON SOURCE DEVICE 失效
标题翻译： MATRIX型冷阴极电子源设备
公开(公告)号：US20110057555A1
公开(公告)日：2011-03-10
申请号：US12991005
申请日：2009-04-27
申请人： Makoto Yamamoto , Keisuke Koga
发明人： Makoto Yamamoto , Keisuke Koga
IPC分类号： H01J1/00
CPC分类号： H01J3/022 , H01J1/3044 , H01J29/04 , H01J29/467 , H01J29/481 , H01J2203/0212 , H01J2329/4608
摘要： A matrix-type cold-cathode electron source device includes: an emitter array (3b) in which a plurality of emitters are arranged, and a gate electrode (5) opposed to the emitter array (3b). The gate electrode (5) includes: an emitter area gate electrode (5c) opposed to the emitter array (3b); a gate address electrode (5a) connecting the emitter area gate electrode (5c) to a gate signal wire (8a); and a high-resistance area (5b) disposed between the gate address electrode (5a) and the emitter area gate electrode (5c).
摘要翻译：矩阵型冷阴极电子源器件包括：布置有多个发射极的发射极阵列（3b）和与发射极阵列（3b）相对的栅电极（5）。栅极（5）包括：与发射极阵列（3b）相对的发射极区域栅电极（5c）; 将所述发射极区域栅电极（5c）连接到栅极信号线（8a）的栅极寻址电极（5a）; 以及设置在栅极寻址电极（5a）和发射极区域栅电极（5c）之间的高电阻区域（5b）。

7. 发明授权

US07365481B2 Field emission device with change in emission property 失效
标题翻译：发射特性变化的场发射装置
公开(公告)号：US07365481B2
公开(公告)日：2008-04-29
申请号：US10316374
申请日：2002-12-10
申请人： Toru Kawase , Keisuke Koga
发明人： Toru Kawase , Keisuke Koga
IPC分类号： H01J1/62 , H01J63/04
CPC分类号： H01J1/30 , H01J2201/304
摘要： A field emission device having cold cathode devices including an emitter and a lead electrode, and the field emission device is provided with the plural kinds of cold cathode device groups classified based on the emission property of the cold cathode device. This field emission device has a member for allowing the cold cathode device group to perform emission by successively changing the cold cathode device group that mainly performs emission based on the difference in the emission property. Thus, it is possible to maintain the emission current at a predetermined necessary value or more and to realize the long lifetime of the field emission device.
摘要翻译：具有包括发射极和引线电极的冷阴极器件的场致发射器件，场发射器件具有基于冷阴极器件的发射特性分类的多种冷阴极器件组。该场致发射装置具有使冷阴极器件组通过依照发光特性的差异依次变更主要进行发光的冷阴极器件组来进行发光的部件。因此，可以将发射电流保持在预定的必要值以上，并且实现场发射装置的长寿命。

8. 发明申请

US20070188075A1 Field-emission electron source apparatus 审中-公开
标题翻译：场发射电子源装置
公开(公告)号：US20070188075A1
公开(公告)日：2007-08-16
申请号：US11706532
申请日：2007-02-13
申请人： Junichi Kimiya , Keisuke Koga
发明人： Junichi Kimiya , Keisuke Koga
IPC分类号： H01J63/04 , H01J1/62
CPC分类号： H01J7/18 , H01J1/46 , H01J29/467
摘要： A field-emission electron source apparatus includes a vacuum container that receives a field-emission electron source array, a target and an auxiliary electrode, and a getter pump that is disposed in the vacuum container and absorbs and removes excess gas. An electron beam emitted from the field-emission electron source array passes through a plurality of through holes formed in the auxiliary electrode and reaches the target. A space containing the field-emission electron source array and a space containing the target and the getter pump are separated substantially by the auxiliary electrode so that gas generated from the target is absorbed by the getter pump without passing through the space containing the field-emission electron source array. This makes it possible to provide a highly-reliable field-emission electron source apparatus in which the influence of gas and ions on the field-emission electron source array is eliminated or reduced.
摘要翻译：场发射电子源装置包括：接收场发射电子源阵列的真空容器，靶和辅助电极;以及设置在真空容器中并吸收和去除过量气体的吸气泵。从场致发射电子源阵列发射的电子束通过形成在辅助电极中的多个通孔并到达靶。包含场致发射电子源阵列的空间和包含靶和吸气泵的空间基本上由辅助电极分离，使得由靶产生的气体被吸气泵吸收而不通过包含场致发射的空间电子源阵列。这使得可以提供一种高可靠性的场致发射电子源装置，其中消除或减少了气体和离子对场发射电子源阵列的影响。

9. 发明授权

US07190334B2 Driving method and driving apparatus for a field emission device 有权
标题翻译：场致发射装置的驱动方法和驱动装置
公开(公告)号：US07190334B2
公开(公告)日：2007-03-13
申请号：US10398700
申请日：2001-08-21
申请人： Toru Kawase , Keisuke Koga
发明人： Toru Kawase , Keisuke Koga
IPC分类号： G09G3/30
CPC分类号： G09G3/22 , G09G1/002 , G09G2300/08 , G09G2320/043 , H01J3/022
摘要： The object of the present invention is to provide a driving method and a driving apparatus for a field emission device that controls emission current with stability regardless of how long the device is driven. The field emission device driving method and driving apparatus of the present invention set the actual emission current at a reference level by adjusting the amount of current which is supplied to the emitter to a reference level. The amount of current supplied to the emitter is adjusted to the reference level by increasing the driving voltage in response to driving time elapsing in a state in which the electron emission performance is sustained above the reference level. By adjusting the amount of current supplied to the emitter in a state in which the driving voltage is sustained higher than the minimum voltage, a stable amount of emission current can be sustained and electron emission without fluctuations can be realized, even when the performance of the field emission device in emitting electrons deteriorates due to driving time elapsing.
摘要翻译：本发明的目的是提供一种用于场发射装置的驱动方法和驱动装置，其无论驱动器件多长时间，都能稳定地控制发射电流。本发明的场致发射器件驱动方法和驱动装置通过将提供给发射极的电流量调整到参考电平来将实际发射电流设定在参考电平。通过在电子发射性能维持在基准电平以上的状态下经过的驱动时间增加驱动电压，将供给发射极的电流量调整到参考电平。通过调节在驱动电压维持高于最小电压的状态下提供给发射极的电流量，可以维持稳定的发射电流量，并且可以实现不发生波动的电子发射。由于驱动时间的流逝，发射电子的场致发射器件劣化。

10. 发明申请

US20050001536A1 Field emission electron source 有权
标题翻译：场发射电子源
公开(公告)号：US20050001536A1
公开(公告)日：2005-01-06
申请号：US10827813
申请日：2004-04-20
申请人： Makoto Yamamoto , Keisuke Koga , Akinori Shiota , Seigo Kanemaru , Masayoshi Nagao
发明人： Makoto Yamamoto , Keisuke Koga , Akinori Shiota , Seigo Kanemaru , Masayoshi Nagao
IPC分类号： H01J1/02 , H01J1/304 , H01J1/62 , H01J31/12 , H01J63/04
CPC分类号： H01J1/3044 , H01J31/127 , H01J2201/30403
摘要： A field emission electron source capable of achieving large current density is provided at low cost with good productivity. An insulating layer is formed on a substrate and has one or more openings; and an extraction electrode is formed on the insulating layer. In one or more of the openings, a plurality of emitters, each of which emits an electron by an electric field from the extraction electrode, are formed on the substrate.
摘要翻译：以低成本提供能够实现大电流密度的场致发射电子源，生产率高。绝缘层形成在基板上并具有一个或多个开口; 并且在绝缘层上形成引出电极。在一个或多个开口中，在基板上形成多个发射体，每个发射体通过来自引出电极的电场发射电子。

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