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1. 发明申请

WO2008144219A1 SYSTEM AND METHOD FOR MEASURING AND MAPPING A SIDEFORCE FOR A MOVER 审中-公开
标题翻译：用于测量和映射行动的系统和方法
公开(公告)号：WO2008144219A1
公开(公告)日：2008-11-27
申请号：PCT/US2008/062779
申请日：2008-05-06
申请人： NIKON CORPORATION , GERY, Jean-Marc , BINNARD, Mike
发明人： GERY, Jean-Marc , BINNARD, Mike
IPC分类号： A47B9/02
CPC分类号： G03B27/58
摘要： A mover (344) that moves a stage (238) along a first axis includes a magnetic component (354), a conductor component (356), and a sensor (366). The magnetic component (354) includes one or more magnets (354D) that are surrounded by a magnetic field. The conductor component (356) is positioned near the magnetic component (354). Further, the conductor component (356) interacts with the magnetic component (354) to generate a force when current is directed to the conductor component (356). The sensor (366) can be used for determining a first axis component of a magnetic flux of the magnetic component (354) during operation of the mover (344). Further, the sensor (366) can be used to determine a side force (365) that along a second axis that is orthogonal to the first axis that is being generated by the mover (344). With this design, the mover (344) or other components can be controlled to compensate for the side force (370).
摘要翻译：沿着第一轴线移动台架（238）的移动器（344）包括磁性部件（354），导体部件（356）和传感器（366）。磁性部件（354）包括由磁场包围的一个或多个磁体（354D）。导体部件（356）位于磁性部件（354）附近。此外，当电流被引导到导体部件（356）时，导体部件（356）与磁性部件（354）相互作用以产生一个力。传感器（366）可以用于在移动器（344）的操作期间确定磁性部件（354）的磁通量的第一轴分量。此外，传感器（366）可以用于确定沿着与由移动器（344）生成的第一轴正交的第二轴线的侧向力（365）。通过这种设计，可以控制动子（344）或其他部件以补偿侧力（370）。

2. 发明申请

WO2012176941A1 METHOD AND APPARATUS TO ALLOW A PLURALITY OF STAGES TO OPERATE IN CLOSE PROXIMITY 审中-公开
标题翻译：允许多个阶段在近距离操作的方法和装置
公开(公告)号：WO2012176941A1
公开(公告)日：2012-12-27
申请号：PCT/JP2012/066823
申请日：2012-06-25
申请人： NIKON CORPORATION , BINNARD, Mike
发明人： BINNARD, Mike
IPC分类号： G03F7/20
CPC分类号： G03F7/70758 , H02K3/47 , H02K41/031 , H02K2201/18 , Y10T428/24479
摘要： According to one aspect of the present invention, a stage apparatus includes a first stage (104), a first magnet arrangement (112a, 112b), and a stator arrangement (120) that includes a first coil having a first width. The first magnet arrangement is associated with the first stage, and includes a first quadrant (112a) and a second quadrant (112b) or, more generally, a first sub-array and a second sub-array. The first quadrant has at least one first magnet arranged parallel to a first axis, and the second quadrant has at least one second magnet arranged parallel to a second axis. The first quadrant is adjacent to the second quadrant relative to the first axis, and is spaced apart from the second quadrant by a distance relative to the second axis. The stator arrangement is configured to cooperate with the first magnet arrangement to drive the first stage.
摘要翻译：根据本发明的一个方面，一种舞台装置包括第一舞台（104），第一磁铁装置（112a，112b）和包括具有第一宽度的第一线圈的定子装置（120）。第一磁体布置与第一级相关联，并且包括第一象限（112a）和第二象限（112b），或更一般地，第一子阵列和第二子阵列。第一象限具有平行于第一轴布置的至少一个第一磁体，而第二象限具有平行于第二轴布置的至少一个第二磁体。第一象限相对于第一轴相邻于第二象限，并且与第二象限相距一定距离相对于第二轴。定子装置构造成与第一磁体装置配合以驱动第一级。

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