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    • 3. 发明专利
    • TRANSFER OF WAFER
    • JPH0376247A
    • 1991-04-02
    • JP21319889
    • 1989-08-18
    • NITTO DENKO CORP
    • AMETANI MINORUFUNAKOSHI KEIGOKIRA AKIHIKOMATSUSHITA TAKAOSHIROKURA KEIZO
    • H01L21/677H01L21/68
    • PURPOSE:To make it unnecessary to transfer a wafer from one cassette to another after the wafer is processed by a method wherein processed wafers are housed in the cassettes of a pool section one by one from the top cassette, then the wafers are taken out one by one from the bottom and then housed in a cassette of an unload section one by one from the top first. CONSTITUTION:Wafers 3a, 3b, 3c,... are successively taken out in this sequence from the lower part of a cassette 2, which is made to descend by one pitch at each delivery of a wafer, and processed, and then the processed wafers 3a, 3b, 3c,... are successively housed in this order in a cassette 105 on a table 101, which is made to ascend from the lowermost position pitch by pitch, from the top first. During this operation, the cassette 2 which becomes empty at a load section is placed on a table 90 at the lowermost position at an unload section, the processed wafers in the cassette 105 are taken out from the lower part of the cassette 105, which is made to descend from the uppermost position, and then successively housed in the cassette 2 on the table 90, which ascends pitch by pitch, from the top first. The processed wafers are housed in the cassette 2 at an unload section in the same order with the wafers in the cassette 2 loaded at a load section at first.
    • 4. 发明专利
    • Adhesive tape joining method, and apparatus using the same
    • 粘合带接合方法和使用该方法的装置
    • JP2011124369A
    • 2011-06-23
    • JP2009280432
    • 2009-12-10
    • Nitto Denko CorpNitto Seiki Kk日東精機株式会社日東電工株式会社
    • YAMAMOTO MASAYUKIFUNAKOSHI KEIGO
    • H01L21/683B26D7/18
    • H01L21/67132B26D7/18B26F1/3846
    • PROBLEM TO BE SOLVED: To provide a method and a device for accurately winding an unnecessary adhesive tape after being cut out along a contour of a semiconductor wafer and accurately applying the adhesive tape to the wafer.
      SOLUTION: The belt-like adhesive tape joined to the semiconductor wafer is cut out along the contour of the wafer by a tape cutting mechanism and, in a process of winding up the cut out unnecessary tape, a rotation angle of side rollers 36a, 36b guiding the narrowest section on both ends of the tape is detected by a rotary encoder 38. A determination section determines a fracture of the narrowest section of the unnecessary tape by comparing an actual rotation angle based on the measurement and a predetermined reference rotation angle.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供一种在沿着半导体晶片的轮廓切割后精确地卷绕不需要的胶带的方法和装置,并且将胶带精确地施加到晶片。

      解决方案:通过带切割机构沿着晶片的轮廓切割与半导体晶片接合的带状粘合带,并且在卷绕不需要的带的过程中,侧辊的旋转角度 36a,36b通过旋转编码器38检测。通过比较基于测量的实际旋转角度和预定的基准旋转,确定部分确定不需要的带的最窄部分的断裂 角度。 版权所有(C)2011,JPO&INPIT

    • 5. 发明专利
    • ADHESIVE TAPE APPLICATION DEVICE
    • JPH08217320A
    • 1996-08-27
    • JP4340695
    • 1995-02-07
    • NITTO DENKO CORP
    • AMETANI MINORUFUNAKOSHI KEIGOUKIAMI HIRONOBUKAWABATA KATSUYA
    • B65H35/07
    • PURPOSE: To provide an application device with which an adhesive tape of a narrow width can be applied to a work at favorable precision. CONSTITUTION: A tape application unit 2 which is capable of elevation and horizontal move is provided with a supply roller, etc., to wind and supply an adhesive tape T introduced from a web reel 13, an application roller 19 to wind and guide the supplied adhesive tape T in such an attitude to direct to a work holding base 1, and a tape support member 20 provided with a tape guide rod to to be engaged with the adhesive tape T to guide it at an upstream position of the roller 19. It is also provided with a tape carrier body 34 capable of oscillation to hold and carry the adhesive tape T to the roller 19 as the tape T is pressed to a groove bottom of the tape guide groove, and a cutting mechanism 29 to cut the adhesive tape T at an upstream position of the roller 19, and by downward/horizontal move of the tape application unit 2, the adhesive tape T positioned to a tip of the roller 19 is applied to a work W on the work holding base 1.
    • 6. 发明专利
    • TAPE MATERIAL STICKING DEVICE
    • JPH10273262A
    • 1998-10-13
    • JP7712997
    • 1997-03-28
    • NITTO DENKO CORP
    • UKIAMI HIRONOBUKAWABATA KATSUYAFUNAKOSHI KEIGO
    • B65H35/07C09J5/00
    • PROBLEM TO BE SOLVED: To stick a tape material pulled out from a tape material reel to a stuck body with precision without applying any tension or causing any meandering. SOLUTION: With a tape material (t) held in the tip part of a movable table 3 by means of a clamp mechanism 22, the movable table 3 is moved by the predetermined length, and the tape material (t), which is pulled out from a tape material reel 2 and provided with a separator, is guided linearly along the movable table 3. In the pulled out tape material (t), only the tape material (t) is cut off by means of a cutting mechanism 8. The cut tape material (t) is sucked and held by means of a sticking head 86. In this sucking holding condition, the movable table 3 is moved backward, and a separator (s) is folded and peeled off from the tape material (t) so as to be wound and recovered by means of a separator recovering reel 7. The sticking head 86 sucking and holding the cut tape material (t) is moved to the sticking part, and then, the tape material (t) is pressed to a stuck body so as to adhere to it.