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    • 1. 发明申请
    • TECHNIQUES FOR ENHANCING DIELECTRIC BREAKDOWN PERFORMANCE
    • 提高介电性能的技术性能
    • US20140151889A1
    • 2014-06-05
    • US13693602
    • 2012-12-04
    • Pavel S. PlekhanovKevin J. FischerQiang FuHiroki Hiramatsu
    • Pavel S. PlekhanovKevin J. FischerQiang FuHiroki Hiramatsu
    • H01L23/48H01L21/306
    • H01L23/48H01L21/768H01L21/76801H01L21/76834H01L21/76885H01L23/5222H01L23/5329H01L2924/0002H01L2924/00
    • Techniques are disclosed for enhancing the dielectric breakdown performance of integrated circuit (IC) interconnects. The disclosed techniques can be used to selectively etch the dielectric layer of an IC to form a recess, for example, between a given pair of adjacent/neighboring interconnects (e.g., metal lines). Thereafter, a layer of dielectric material of higher dielectric breakdown field (Ec) than the surrounding/underlying dielectric material (or other suitable insulator, as will be apparent in light of this disclosure) may be deposited/grown so as to substantially conform to the topology provided by the adjacent/neighboring interconnects and etched recess. In some cases, this dielectric layer may help to prevent or otherwise reduce: (1) dielectric breakdown between the adjacent/neighboring interconnects by locally increasing the dielectric breakdown voltage (VBD); and/or (2) diffusion of the interconnect fill metal into the surrounding/underlying dielectric material. In some instances, such a layer may serve as an etch stop.
    • 公开了用于增强集成电路(IC)互连的介质击穿性能的技术。 所公开的技术可以用于选择性地蚀刻IC的电介质层,以形成例如在给定的一对相邻/相邻互连(例如,金属线)之间的凹部。 此后,可以沉积/生长比围绕/下面的电介质材料(或其他合适的绝缘体)更高的电介质击穿电场(Ec)的电介质材料层,以便基本上符合 拓扑由相邻/相邻互连和蚀刻凹槽提供。 在一些情况下,该介电层可以有助于防止或以其它方式减少:(1)通过局部增加介电击穿电压(VBD)来在相邻/相邻互连之间的介质击穿; 和/或(2)互连填充金属扩散到周围/下面的介电材料中。 在一些情况下,这样的层可以用作蚀刻停止。
    • 10. 发明授权
    • Storage of application specific data in HTML
    • 将应用程序特定数据存储在HTML中
    • US06613098B1
    • 2003-09-02
    • US09333815
    • 1999-06-15
    • Terri L. SorgeKevin J. FischerAnna V. TimashevaRussell S. JohnsonRajeev S. MisraJuha NiemistoRobert W. CoffenRamakrishnan Natarajan
    • Terri L. SorgeKevin J. FischerAnna V. TimashevaRussell S. JohnsonRajeev S. MisraJuha NiemistoRobert W. CoffenRamakrishnan Natarajan
    • G06F1700
    • G06F17/246G06F17/2264
    • A spreadsheet program saves data into a hypertext markup language (HTML) document that can be viewed with a browser program, but persists all of the information associated with that data necessary to maintain formatting and functionality of the data if reintroduced into the spreadsheet program. The HTML document can then be used both for displaying the data over the Internet or other network in a browser program, and also for opening the data in the spreadsheet program. The information necessary for preserving the format and functionality of the data in the spreadsheet program is incorporated into the HTML document using HTML, Cascading Style Sheets (CSS), and Extended Markup Language (XML). HTML is used for expressing cell data information that is displayed in the browser program, CSS are used for expressing cell-level properties of the data, and XML is used for expressing information that is not displayed in the browser program, but which is necessary for some functionality of the data when used in the spreadsheet program. If any formatting of the data are changed to enable display of the data in the browser program as displayed in the spreadsheet program, the original formatting information is retained in a supporting file that is ignored by a browser program.
    • 电子表格程序将数据保存到可以使用浏览器程序查看的超文本标记语言(HTML)文档中,但如果重新引入到电子表格程序中,则会保留与维护数据格式和功能所必需的所有信息相关的所有信息。 然后可以将HTML文档用于通过互联网或浏览器程序中的其他网络显示数据,以及打开电子表格程序中的数据。 使用HTML,级联样式表(CSS)和扩展标记语言(XML)将维护电子表格程序中数据格式和功能所必需的信息合并到HTML文档中。 HTML用于表示浏览器程序中显示的单元格数据信息,CSS用于表示数据的单元级属性,XML用于表示浏览器程序中未显示的信息,但这是必需的 在电子表格程序中使用数据的一些功能。 如果数据的任何格式化被更改以使得能够在电子表格程序中显示浏览器程序中的数据的显示,则原始格式化信息被保留在被浏览器程序忽略的支持文件中。