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    • 3. 发明授权
    • Extended range and ultra-precision non-contact dimensional gauge
    • 扩展范围和超精密非接触尺寸计
    • US5789661A
    • 1998-08-04
    • US800852
    • 1997-02-14
    • Jacques A. Fauque Ronald D. Linder
    • Jacques A. Fauque Ronald D. Linder
    • G01B7/00G01B13/06G01L9/10
    • G01B7/001G01B13/06
    • A non-contact pneumatic-electric dimensional measurement system comprises a stable base on which a semiconductor wafer or workpiece to be measured is placed. A measurement head is held aloft over the wafer or workpiece and base by a rigid support bracket attached to the base. The tip of an air nozzle in the measurement head is directed at the wafer or workpiece and automatically extended to near contact. The nozzle is servo-positioned by an air sensor and motor combination that maintains an air gap between the tip and wafer of about 150 microns with an overall precision of about 3-4 microns. A Heidenhaim linear displacement gauge is attached to the air nozzle and is used to determine the nozzle position to within 0.5 micron. The dimension of the wafer or workpiece is determined to within 0.5 micron by combining the linear displacement gauge reading with an estimate of the air gap derived from a reading of the air nozzle backpressure that has an accuracy of about 0.1 micron. A calibration method is used while the air sensor and motor servo combination is temporarily disabled. The nozzle is stepped in ten micron increments of air gap from a reference starting at zero using readings from the linear displacement gauge. The specific back pressure in the air sensor is read into a linearization table for 0-300 microns in ten micron steps.
    • 非接触式气动电尺寸测量系统包括一个稳定的基座,放置半导体晶片或待测量的工件。 测量头通过附接到基座的刚性支撑支架而高度靠在晶片或工件和基座上。 测量头中的空气喷嘴的尖端指向晶片或工件,并自动延伸至近接触。 喷嘴通过空气传感器和电机组合进行伺服定位,其保持尖端和晶片之间的空气间隙为约150微米,总精度为约3-4微米。 Heidenhaim线性位移计连接到空气喷嘴,用于将喷嘴位置确定在0.5微米以内。 将晶片或工件的尺寸确定在0.5微米以内,通过将线性位移量规读数与从具有约0.1微米的精度的空气喷嘴背压的读数导出的气隙的估计相结合。 当空气传感器和电机伺服组合暂时禁用时,使用校准方法。 使用来自线性位移计的读数,从零开始的参考点以10微米的气隙增量喷射喷嘴。 空气传感器中的特定背压以10微米的步长读入0-300微米的线性化表。