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    • 3. 发明授权
    • Method and device for collecting by-products individually
    • 单独收集副产品的方法和装置
    • US6093228A
    • 2000-07-25
    • US195582
    • 1998-11-18
    • Chung-Chih Wang
    • Chung-Chih Wang
    • B01D46/00C23C16/44B01D33/15B01D46/12
    • B01D46/00C23C16/4412B01D2279/20
    • A method and a device for collecting by-products individually, applied to the semiconductor manufacture factory, is disclosed. The device, adapted to be used to filter a fluid accompanied with an object, for retaining the object therein includes a body, an entrance provided on an upper portion of the body for enabling the fluid to flow into the body, a powder trap mounted in the body for filtering the fluid to retain the object therein, a guiding device mounted in the body for guiding the fluid to pass the powder trap, and an exit provided on a lower portion of the body for enabling the filtered fluid to flow out. The advantages of the present invention have: (a) preventing the by-products from being reacted with each other resulting in a fire; (b) preventing the low vacuum tube from being chocked by by-products; and (c) collecting the by-products individually.
    • 公开了一种应用于半导体制造工厂的分别收集副产物的方法和装置。 适于用于过滤伴随物体的流体用于将物体保持在其中的装置包括主体,设置在主体的上部上的入口,用于使流体能够流入体内,粉末捕集器安装在 用于过滤流体以将物体保持在其中的主体,安装在主体中用于引导流体以通过粉末捕集器的引导装置,以及设置在主体的下部以使过滤流体流出的出口。 本发明的优点是:(a)防止副产物彼此反应导致火灾; (b)防止低真空管被副产品堵塞; 和(c)分别收集副产物。