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    • 9. 发明申请
    • METHOD OF MANUFACTURING PHOTOTHERMOMAGNETIC RECORDING FILM
    • 光电记录膜的制造方法
    • WO1985002292A1
    • 1985-05-23
    • PCT/JP1984000547
    • 1984-11-15
    • NIPPON SHEET GLASS CO., LTD.GOMI, ManabuABE, Masanori
    • NIPPON SHEET GLASS CO., LTD.
    • G11B11/10
    • G03G5/16C23C14/08C23C14/3414G11B11/10589G11B11/10591H01F10/245
    • A photothermomagnetic recording film manufacturing method in which a perpendicular-magnetization film of a Bi-substituted rare earth iron garnet is formed on a substrate by sputtering a target consisting of an oxide which contains at least Bi atoms, Fe atoms, and rare earth atoms, and then depositing the atoms constituting the oxide which have been released from the target by the sputtering on a substrate which is maintained at a temperature of at most 700 C. Thus it is possible to obtain a perpendicular-magnetization film of Bi-substituted rare earth iron garnet which has a large Bi-substitution quantity (x), and consequently has an extremely large Faraday rotation angle theta F, a sufficiently large coercive force Hc, as well as a sufficiently small absorption coefficient alpha . Accordingly it is possible to manufacture a photothermomagnetic recording film which has extremely good photothermomagnetic recording characteristics. Moreover, since it is possible to select the quality of the substrate on which the photothermomagnetic recording film is to be formed, the method is extremely advantageous from the manufacturing point of view.
    • 一种光电记录膜制造方法,其中通过溅射由至少包含Bi原子,Fe原子和稀土原子的氧化物组成的靶,在基底上形成Bi取代的稀土铁石榴石的垂直磁化膜, 然后通过溅射将构成已经从靶释放的氧化物的原子沉积在保持在700℃以下的温度的基板上。 因此,可以获得具有大的双取代量(x)的双取代稀土类铁石榴石的垂直磁化膜,因此具有极大的法拉第旋转角θF,足够大的矫顽力Hc, 以及足够小的吸收系数α。 因此,可以制造具有非常好的光热记录特性的光电磁记录膜。 此外,由于可以选择要在其上形成光电磁记录膜的基板的质量,从制造的观点来看,该方法是非常有利的。
    • 10. 发明申请
    • THERMALLY INDUCED PHASE SWITCH FOR LASER THERMAL PROCESSING
    • 用于激光热处理的热诱导相开关
    • WO02023279A1
    • 2002-03-21
    • PCT/US2001/042075
    • 2001-09-07
    • G03G5/16H01L21/265H01L21/268H01L21/24
    • H01L21/268G03G5/16
    • A method, apparatus and system for controlling the amount of heat transferred to a process region (30) of a workpiece (W) from exposure with a pulse of radiation (10), which may be in the form of a scanning beam (B), using a thermally induced phase switch layer (60). The apparatus of the invention is a film stack (6) having an absorber layer (50) deposited atop the workpiece, such as a silicon wafer. A portion of the absorber layer covers the process region. The absorber layer absorbs radiation and converts the absorbed radiation into heat. The phase switch layer is deposited above or below the absorber layer. The phase switch layer may comprise one or more thin film layers, and may include a thermal insulator layer and a phase transition layer. Because they are in close proximity, the portion of the phase switch layer covering the process region has a temperature that is close to the temperature of the process region. The phase of the phase switch layer changes from a first phase (e.g., solid) to a second phase (e.g., liquid or vapor) at a phase transition temperature (Tp). During this phase change, the phase switch layer absorbs heat but does not significantly change temperature. This limits the temperature of the absorber layer and the process region since both are close to the phase change layer.
    • 一种用于控制从辐射脉冲(10)暴露于工件(W)的处理区域(30)的热量的方法,装置和系统,其可以是扫描光束(B)的形式, ,使用热感应相位层(60)。 本发明的装置是具有沉积在工件上方的诸如硅晶片的吸收层(50)的薄膜叠层(6)。 吸收层的一部分覆盖工艺区域。 吸收层吸收辐射并将吸收的辐射转化成热。 相位开关层沉积在吸收层的上方或下方。 相位开关层可以包括一个或多个薄膜层,并且可以包括绝热层和相变层。 由于它们非常接近,覆盖处理区域的相位开关层的部分具有接近处理区域的温度的温度。 在相转变温度(Tp)下,相位开关层的相位从第一相(例如,固体)变为第二相(例如,液体或蒸气)。 在该相变期间,相开关层吸热,但不会明显改变温度。 这限制了吸收层和工艺区域的温度,因为它们都接近于相变层。