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1. 发明授权

US06351972B1 Synthetic fused silica member, method for producing the same and optical member for excimer laser 有权
标题翻译：合成熔融硅石构件及其制造方法以及准分子激光用光学构件
公开(公告)号：US06351972B1
公开(公告)日：2002-03-05
申请号：US09349547
申请日：1999-07-08
申请人： Hisatoshi Ohtsuka
发明人： Hisatoshi Ohtsuka
IPC分类号： C03B2000
CPC分类号： C03C3/06 , C03B19/1415 , C03B2201/03 , C03B2207/85 , C03B2207/87 , C03C1/02 , C03C2201/02 , C03C2203/40 , C03C2203/42
摘要： There is disclosed a method for producing a synthetic fused silica member comprising vaporizing a raw material silane compound, hydrolyzing or oxidizing by combustion the vaporized silane compound in oxyhydrogen flame to form silica microparticles so that the silica microparticles should deposit on a rotating refractory carrier, and melting the silica microparticles during the deposition to form the synthetic fused silica member, wherein sulfur impurities are preliminarily removed from the raw material. According to the present invention, there are provided a synthetic fused silica member that does not emit yellow fluorescence at a wavelength of 560-580 nm even when it is irradiated with an ultraviolet ray by an excimer laser or the like, and hence can suitably be used for optical applications utilizing as a light source high energy ultraviolet rays such as those from excimer lasers, typically KrF and ArF excimer lasers, for example, use as a lens material for steppers and the like, and a method for producing the same, as well as an optical member such as lenses and photomasks produced from the synthetic fused silica material.
摘要翻译：公开了一种合成石英玻璃的制造方法，其包括使原料硅烷化合物蒸发，通过在氢氧焰中燃烧蒸发的硅烷化合物进行水解或氧化，形成二氧化硅微粒，使得二氧化硅微粒沉积在旋转的耐火载体上，在沉积期间熔化二氧化硅微粒以形成合成的熔融二氧化硅构件，其中预先从原料中除去硫杂质。根据本发明，提供了即使在通过准分子激光等照射紫外线的情况下也不会在560-580nm的波长下发出黄色荧光的合成石英玻璃构件，因此可以适当地用于作为光源的光学应用使用高能量紫外线，例如来自准分子激光器（通常为KrF和ArF准分子激光器）的紫外线，例如用作步进器等的透镜材料及其制造方法，如以及诸如由合成熔融石英材料制成的透镜和光掩模的光学构件。

2. 发明授权

US06510707B2 Methods for making silica crucibles 失效
标题翻译：制造石英坩埚的方法
公开(公告)号：US06510707B2
公开(公告)日：2003-01-28
申请号：US09808719
申请日：2001-03-15
申请人： Katsuhiko Kemmochi , Takayuki Togawa , Robert Mosier , Paul Spencer
发明人： Katsuhiko Kemmochi , Takayuki Togawa , Robert Mosier , Paul Spencer
IPC分类号： C03B2000
CPC分类号： C30B15/10 , C03B19/095
摘要： Silica crucibles containing an inner layer which is substantially pure and substantially bubble-free and methods for making such crucibles. The inner layer is also substantially stable against roughening and spot devitrification. The inner layer is formed by making a web structure which is then converted to a continuous layer, thereby minimizing or eliminating bubble formation. The inner layer is also formed using a gettering agent which getters alkaline and alkaline-earth elements while the inner layer is formed. The alkaline and alkaline-earth elements are gettered on an innermost portion of the inner layer which is later removed, leaving an inner layer with relatively few impurities. When used in a CZ-crystal growing process, the inner surface of the crucible remains smooth and substantially no bubbles grow in the inner layer.
摘要翻译：含有基本纯净且基本上无气泡的内层的二氧化硅坩埚以及制造这种坩埚的方法。内层对于粗糙化和斑点失透也基本稳定。内层通过制造网状结构形成，然后将其转化为连续层，从而最小化或消除气泡形成。内层还使用吸附碱性和碱土元素的吸气剂形成，同时内层形成。碱性和碱土元素在内层的最内部被吸收，后来被去除，留下相对较少杂质的内层。当用于CZ晶体生长工艺时，坩埚的内表面保持平滑，并且在内层中基本上没有气泡生长。

3. 发明授权

US06355587B1 Quartz glass products and methods for making same 失效
标题翻译：石英玻璃制品及其制作方法
公开(公告)号：US06355587B1
公开(公告)日：2002-03-12
申请号：US08914288
申请日：1997-08-18
申请人： Ted A. Loxley , John F. Blackmer , Klaus-Markus Peters
发明人： Ted A. Loxley , John F. Blackmer , Klaus-Markus Peters
IPC分类号： C03B2000
CPC分类号： C03B19/12 , C03B19/06 , C03B19/066 , C03B20/00 , C03B2201/24 , Y02P40/57 , Y10S65/08
摘要： The application discloses a number of unique sintered quartz glass products together with new silica compositions and processes for making and using such products. Nitrided clear and opaque nitrided quartz products are disclosed having incredible physical properties resulting from the incorporation of very small, but effective, amounts (e.g., 25 ppm or more) of chemically bound nitrogen. Opaque quartz glass heat shields with remarkable resistance to transmission of infrared radiation are disclosed which can have a high bubble population density, such as 80 to 120 per mm2. These heat shields make possible remarkable improvement in the performance of tube furnaces and other reactors used in processing silicon wafers and other electronic components.
摘要翻译：该申请公开了许多独特的烧结石英玻璃产品以及新的二氧化硅组合物和制备和使用这些产品的方法。公开了氮化透明和不透明的氮化石英产物，其具有由于引入非常小但有效的化学键合氮的量（例如25ppm或更多）而产生的令人难以置信的物理性质。公开了具有显着的抗红外辐射透射性的不透明石英玻璃隔热罩，其可以具有高的气泡总体密度，例如80至120 / mm 2。这些隔热罩可以显着改善用于处理硅晶片和其他电子部件的管式炉和其他反应器的性能。

4. 发明授权

US06324871B1 Process for producing optical fiber preform 有权
标题翻译：生产光纤预制棒的工艺
公开(公告)号：US06324871B1
公开(公告)日：2001-12-04
申请号：US09709321
申请日：2000-11-13
申请人： Motonori Nakamura , Yuichi Ohga , Toshio Danzuka
发明人： Motonori Nakamura , Yuichi Ohga , Toshio Danzuka
IPC分类号： C03B2000
CPC分类号： C03B37/0142 , C03B2207/36 , C03B2207/52 , C03B2207/62 , C03B2207/70 , Y02P40/57
摘要： In a process for producing an optical fiber preform, a starting member and a glass synthesizing burner are reciprocated relative to each other so that fine glass particles synthesized with the burner are deposited layer by layer on the starting member, and a heating power of the glass synthesizing burner in a nonsteady outside diameter portion at either end of the soot preform is adjusted to control the temperature of the nonsteady outside diameter portion at either end against local elevation. The starting member is formed of a transparent glass rod that is held within a vessel and rotatable about its own axis, the burner is fitted on a lateral side of the vessel at right angles to the rotating axis of the starting member and is movable towards or away from the starting member.
摘要翻译：在制造光纤预制件的过程中，起始构件和玻璃合成燃烧器相对于彼此往复运动，使得在燃烧器上合成的细微玻璃颗粒逐层沉积在起始构件上，并且玻璃的加热功率在烟灰预制件的任一端的不稳定的外径部分中合成燃烧器被调节以控制任一端的不稳定的外径部分的温度抵抗局部升高。起始构件由保持在容器内并可围绕其自身的轴线旋转的透明玻璃棒形成，燃烧器以与起始构件的旋转轴线成直角的方式装配在容器的横向侧上，并且可朝着或远离起始成员。

5. 发明授权

US06374642B1 Method and apparatus for combustion-enhanced vaporization 失效
标题翻译：燃烧增强蒸发的方法和装置
公开(公告)号：US06374642B1
公开(公告)日：2002-04-23
申请号：US09526024
申请日：2000-03-15
申请人： Jeffrey L. Blackwell , Lisa A. Moore , Huailiang Wei , Daniel W. Hawtof
发明人： Jeffrey L. Blackwell , Lisa A. Moore , Huailiang Wei , Daniel W. Hawtof
IPC分类号： C03B2000
CPC分类号： C03B37/0142 , C03B37/0148 , C03B2201/34 , C03B2201/50 , C03B2201/54 , C03B2207/02 , C03B2207/06 , C03B2207/12 , C03B2207/14 , C03B2207/20 , C03B2207/32 , C03B2207/34 , C03B2207/46 , C03B2207/54 , C03B2207/62 , C03B2207/64 , F23D14/22 , F23D14/32
摘要： An apparatus for producing a glass soot includes a first a burner having a droplet-emitting first region, a gas-emitting second region surrounding the first region, and a gas-emitting third region surrounding the second region. The first region emits a glass-forming mixture, the second region emits an inert gas, and the third region emits a combination of oxygen and a combustible gas. The apparatus further includes a combustion area having a first section proximate the first burner and a second section distal from the first burner. A glass-forming mixture is at least partially vaporized in the first section of the combustion area. The apparatus further includes at least one secondary burner having gas-emitting fourth and fifth regions. The fourth region of the secondary burner emits oxygen and the fifth region of the secondary burner emits a combustible gas. The second section of the conversion area is in communication with the fourth and fifth regions of the secondary burner, such that the glass-forming mixture is completely vaporized and converted into a glass soot deposited on a preform such as a bait rod. The invention also includes a method of enhanced vaporization using first and second spaced apart combustion areas.
摘要翻译：一种用于生产玻璃烟灰的设备包括：具有液滴发射第一区域的第一燃烧器，围绕第一区域的气体发射第二区域和围绕第二区域的气体发射第三区域。第一区域发射玻璃形成混合物，第二区域发射惰性气体，第三区域发射氧气和可燃气体的组合。该装置还包括具有靠近第一燃烧器的第一部分和远离第一燃烧器的第二部分的燃烧区域。玻璃形成混合物在燃烧区域的第一部分中至少部分蒸发。该装置还包括具有气体发射的第四和第五区域的至少一个二次燃烧器。次级燃烧器的第四区域发射氧气，而第二燃烧器的第五区域发射可燃气体。转换区域的第二部分与辅助燃烧器的第四和第五区域连通，使得玻璃形成混合物完全蒸发并转化成沉积在诸如诱饵棒的预成型体上的玻璃烟灰。本发明还包括使用第一和第二间隔开的燃烧区域增强蒸发的方法。

6. 发明授权

US06301936B1 Apparatus for manufacturing porous glass preform 有权
标题翻译：多孔玻璃预制件的制造装置
公开(公告)号：US06301936B1
公开(公告)日：2001-10-16
申请号：US09334925
申请日：1999-06-17
申请人： Yuichi Ohga , Takashi Kogo
发明人： Yuichi Ohga , Takashi Kogo
IPC分类号： C03B2000
CPC分类号： C23C16/453 , C03B37/01406 , C23C16/44 , Y02P40/57
摘要： The object of the invention is to provide an apparatus for manufacturing a porous glass preform, which comprises a reaction vessel in which local stress concentration caused by expansion due to heat is prevented, and there is no fear of the occurrence of deformation or cracks. The apparatus of this invention manufactures the porous glass preform by depositing glass particles blown from a burner on the seed rod rotating around its axis, and this apparatus is characterized in that the reaction vessel is provided with a means for relieving concentration of stress due to thermal expansion of the reaction vessel.
摘要翻译：本发明的目的是提供一种用于制造多孔玻璃预制件的装置，其包括反应容器，其中防止由热引起的膨胀引起的局部应力集中，并且不会发生变形或裂纹。本发明的装置通过将从燃烧器吹出的玻璃颗粒沉积在围绕其轴线旋转的晶棒上制造多孔玻璃预制件，该装置的特征在于，反应容器设置有用于缓解因热而引起的应力集中的装置反应容器的膨胀。

7. 发明授权

US06296826B1 Method for the preparation of vitrified silica particles 失效
标题翻译：玻璃化二氧化硅颗粒的制备方法
公开(公告)号：US06296826B1
公开(公告)日：2001-10-02
申请号：US08366762
申请日：1994-12-30
申请人： Akira Fujinoki , Akihiko Sugama , Tohru Yokota
发明人： Akira Fujinoki , Akihiko Sugama , Tohru Yokota
IPC分类号： C03B2000
CPC分类号： C03B19/1005
摘要： An efficient method is proposed for the utilization of heretofore useless extremely fine fluffy silica particles obtained as a flue dust in the flame-hydrolysis of vaporizable silicon compound in an oxyhydrogen flame in the manufacturing process of fused silica glass. The method comprises the steps of (a) uniformly mixing the silica particles with water, (b) drying the wet mixture under specified conditions to give dried cakes of the silica particles, (c) disintegrating the dried cakes into porous silica beads having an appropriate particle diameter, (d) semi-sintering the porous silica beads at 800 to 1300° C. and (e) vitrifying the semi-sintered silica beads at 1350 to 1550° C. into vitrified poreless silica glass particles which can be used as a base material for the production of fused silica glass articles.
摘要翻译：在熔融石英玻璃的制造过程中，提出了一种有效的方法，用于利用在氢氧焰中的可汽化硅化合物的火焰水解中获得的迄今无用的极细蓬松二氧化硅颗粒作为烟尘。该方法包括以下步骤：（a）将二氧化硅颗粒与水均匀混合，（b）在特定条件下干燥湿混合物，得到二氧化硅颗粒的干燥饼;（c）将干燥的蛋糕分解成具有适当的（d）在800〜1300℃下半烧结多孔二氧化硅珠粒，（e）将半烧结二氧化硅珠在1350〜1550℃下玻璃化成玻璃化的无孔二氧化硅玻璃颗粒，其可以用作用于生产熔融石英玻璃制品的基材。

8. 发明授权

US06546754B1 Apparatus for silica crucible manufacture 有权
标题翻译：二氧化硅坩埚制造设备
公开(公告)号：US06546754B1
公开(公告)日：2003-04-15
申请号：US09698415
申请日：2000-10-27
申请人： Richard L. Hansen , Fred D'Orazio , Victor Lou , George Coleman
发明人： Richard L. Hansen , Fred D'Orazio , Victor Lou , George Coleman
IPC分类号： C03B2000
CPC分类号： C03B19/095
摘要： An apparatus for manufacture of quartz crucibles comprising a hollow mold having a bottom wall portion and a side wall portion and defining a hollow space therein. The walls of the mold include a plurality of openings to facilitate gas passage therethrough. A rotatable support of the mold is provided to rotate the mold about a vertical axis. A vacuum is applied through the walls of the mold to draw quartz particles against the walls and remove gas. A shroud surrounds at least a portion of the hollow mold; at least one gas inlet positioned to provide a gas to a space between the shroud and the mold. A housing overlaps at least a portion of the shroud and the hollow mold. At least one gas outlet is positioned to exhaust gas which may exit the space between the shroud and the mold. Alternatively, or in addition to the outlet, a space may be provided between the housing (hood) and the shroud to facilitate gas discharge. In manufacturing a crucible in this apparatus, the gas flow can be balanced so the in-flow rate of control gas is in excess of the exhaust rate from the controlled atmosphere via the outlet or space.
摘要翻译：一种用于制造石英坩埚的装置，包括具有底壁部分和侧壁部分并在其中限定中空空间的中空模具。模具的壁包括多个开口以便于气体通过。提供模具的可旋转支撑件以围绕垂直轴线旋转模具。通过模具的壁施加真空以将石英颗粒吸附在壁上并除去气体。护罩围绕中空模具的至少一部分; 至少一个气体入口，定位成向罩和模具之间的空间提供气体。壳体与护罩和中空模具的至少一部分重叠。至少一个气体出口定位成排出可能离开护罩和模具之间的空间的废气。或者除了出口之外，还可以在壳体（罩）和护罩之间设置一个空间，以便于排气。在该装置中制造坩埚时，可以平衡气流，使得控制气体的流入速率超过从受控气氛通过出口或空间排出的排气速率。

9. 发明授权

US06499315B1 Production method for making an optical member for excimer laser using synthetic quartz glass 有权
标题翻译：使用合成石英玻璃制造准分子激光用光学部件的制造方法
公开(公告)号：US06499315B1
公开(公告)日：2002-12-31
申请号：US09671202
申请日：2000-09-28
申请人： Hiroyuki Nishimura , Akira Fujinoki , Hisatoshi Otsuka
发明人： Hiroyuki Nishimura , Akira Fujinoki , Hisatoshi Otsuka
IPC分类号： C03B2000
CPC分类号： C03B19/1415 , C03B19/1484 , C03B2201/21 , C03B2207/32 , C03B2207/36 , C03C3/06 , C03C4/0085 , C03C2201/02 , C03C2201/21 , C03C2203/40 , Y02P40/57
摘要： The present invention relates to a synthetic quartz glass, which is a material for producing an optical member having an excellent excimer laser resistance, and a production method thereof with a good productivity. That is, the synthetic quartz glass produced by vitrifying glass fine particles obtained by flame hydrolysis of an organodisilazane compound directly on a substrate having a birefringence index of 5 nm/cm or less, a refractive index difference (&Dgr;n) of 2×10−6/cm or less, and an ArF saturated absorbance of 0.05/cm or less at a pulse energy density of 100 mJ/cm2/pulse. The production method thereof comprises the steps of introducing an organodisilazane compound represented by a general formula 1: (R1), SiNHSi(R2)3 (1) wherein R1 and R2 represent the same or a different alkyl group having 1 to 3 carbon atoms, into a flame comprising a combustion gas and a combustion-supporting gas to generate silica fine particles, and accumulating the silica fine particles on a rotating heat resistant substrate to be a molten glass.
摘要翻译：本发明涉及一种合成石英玻璃，其是用于制造具有优异的受激准分子激光电阻的光学部件的材料及其生产率高的生产方法。也就是说，通过玻璃化玻璃微粒制造的合成石英玻璃，其通过有机二硅氮烷化合物直接在双折射率为5nm / cm以下的折射率（DELTAn）为2×10 -6 / cm 或更小，在脉冲能量密度为100mJ / cm 2 /脉冲下的ArF饱和吸光度为0.05 / cm以下。其制造方法包括将由通式1表示的有机二硅氮烷化合物引入包含燃烧气体和燃烧支持的火焰的步骤中，其中R1和R2表示相同或不同的具有1至3个碳原子的烷基气体产生二氧化硅微粒，并将二氧化硅微粒聚集在旋转的耐热基材上成为熔融玻璃。

10. 发明授权

US06376401B1 Ultraviolet ray-transparent optical glass material and method of producing same 有权
标题翻译：紫外线透明光学玻璃材料及其制造方法
公开(公告)号：US06376401B1
公开(公告)日：2002-04-23
申请号：US09387773
申请日：1999-09-01
申请人： Shinichi Kondo , Takayuki Nakamura , Kazuhiko Fukuda , Naoyoshi Kamisugi , Nobu Kuzuu , Yoshinao Ihara , Hidetoshi Wakamatsu
发明人： Shinichi Kondo , Takayuki Nakamura , Kazuhiko Fukuda , Naoyoshi Kamisugi , Nobu Kuzuu , Yoshinao Ihara , Hidetoshi Wakamatsu
IPC分类号： C03B2000
CPC分类号： C03C3/06 , C03B19/1453 , C03B2201/02 , C03B2201/03 , C03B2201/04 , C03B2201/07 , C03B2201/075 , C03B2201/23 , C03C2201/11 , C03C2201/23 , C03C2203/44
摘要： A synthetic silica glass having a high transmittance for vacuum ultraviolet rays, for example F2 excimer laser beam with a wavelength of 157 nm, a high uniformity and a high durability and useful for ultraviolet ray-transparent optical glass materials is produced from a high-purity silicon compound, for example silicon tetrachloride, by heat treating an accumulated porous silica material at a temperature not high enough to convert the porous silica material to a transparent silica glass in an inert gas atmosphere for a time sufficient to cause the OH groups to be condensed and removed from the glass, and exhibits substantially no content of impurities other than OH group a difference between highest and lowest fictional temperatures of 50° C. or less and a transmittance of 157 nm ultraviolet rays through a 10 mm optical path of 60% or more, and optically a OH group content of 1 to 70 ppm, a Cl content less than 1 ppm, a total content of impurity metals of 50 ppb or less, a content of each individual impurity metal less than 10 ppb, and an ultraviolet ray-transmittance at 172 to 200 nm of 40% or more even after the glass is exposed to an irradiation of ultraviolet rays at 160 to 300 nm for one hour.
摘要翻译：对于真空紫外线具有高透射率的合成二氧化硅玻璃，例如波长为157nm的F2准分子激光束，高均匀性和高耐久性并且可用于紫外线透明光学玻璃材料由高纯度硅化合物，例如四氯化硅，通过在不足够高的温度下热处理积聚的多孔二氧化硅材料，以在惰性气体气氛中将多孔二氧化硅材料转化为透明的石英玻璃足以使OH基团冷凝的时间并且从玻璃中除去，并且基本上不含OH基团中的杂质含量，最高和最低虚构温度之间的差别为50℃或更低，通过10mm光路的157nm紫外线的透射率为60％或更多地，光学地含有1至70ppm的OH基含量，小于1ppm的Cl含量，50ppb以下的杂质金属的总含量，即使玻璃暴露于160〜300nm的紫外线照射1小时，每一种杂质金属小于10ppb，而在172〜200nm的紫外线透射率为40％以上。

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