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    • 6. 发明公开
    • METHOD OF PRODUCING POROUS GLASS
    • 生产多孔玻璃的方法
    • EP2576469A1
    • 2013-04-10
    • EP11725539.8
    • 2011-05-20
    • Canon Kabushiki Kaisha
    • TAKASHIMA, KenjiZHANG, ZuyiKOTANI, Yoshinori
    • C03C11/00C03C23/00
    • C03C15/00C03C11/005C03C23/00C03C23/008
    • Provided is a method of producing a porous glass, including selectively etching a phase-separated glass with an acid solution, in which the method allows a processing time to be shortened and suppresses gel-like silica from remaining and being deposited in pores of a porous portion. The method of producing a porous glass includes: immersing the phase-separated glass in a bath containing an acid solution; setting an angle θ, which is formed by a surface to be porosified of the phase-separated glass and a bath liquid surface, to 10° or more to 90° or less; and irradiating the bath with an ultrasonic wave to etch the phase-separated glass, thereby obtaining the porous glass.
    • 本发明提供一种多孔玻璃的制造方法,该方法包括:用酸溶液选择性地对相分离玻璃进行蚀刻,其中,该方法能够缩短处理时间,抑制凝胶状二氧化硅残留并沉积在多孔质的孔中 一部分。 制造多孔玻璃的方法包括:将相分离的玻璃浸入含有酸溶液的浴中; 将由相分离玻璃的多孔化表面和浴液表面形成的角度θ设定为10°以上至90°以下; 并用超声波照射浴以蚀刻相分离的玻璃,从而获得多孔玻璃。