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    • 4. 发明公开
    • LITHIUM NIOBATE SINGLE CRYSTAL SUBSTRATE AND METHOD FOR PRODUCING SAME
    • 铌酸锂单晶衬底及其制造方法
    • EP3312313A1
    • 2018-04-25
    • EP16811515.2
    • 2016-06-08
    • Sumitomo Metal Mining Co., Ltd.
    • KAJIGAYA, Tomio
    • C30B29/30C30B33/02
    • C30B29/30C30B15/00C30B15/20C30B29/20C30B33/02H03H9/02614
    • To provide a lithium niobate (LN) substrate which allows treatment conditions regarding a temperature, a time, and the like to be easily managed and in which an in-plane distribution of a volume resistance value is very small, and a method of producing the same.
      A method of producing an LN substrate by using an LN single crystal grown by the Czochralski process, in which an LN single crystal having a Fe concentration of 50 mass ppm or more and 1000 mass ppm or less in the single crystal and processed into a form of a substrate is buried in an Al powder or a mixed powder of Al and Al 2 O 3 , and heat-treated at a temperature of 450°C or more and less than 500°C, to produce a lithium niobate single crystal substrate having a volume resistivity controlled to be within a range of 1×10 8 Ω·cm or more to 1×10 10 Ω·cm or less.
    • 为了提供容易管理温度和时间等的处理条件,并且体积电阻值的面内分布非常小的铌酸锂(LN)基板及其制造方法 相同。 一种LN单晶的制造方法,其特征在于,使用在单晶中具有50质量ppm以上且1000质量ppm以下的Fe浓度的LN单晶,通过切克劳斯基法生长的LN单晶, 将其埋入Al粉末或Al与Al 2 O 3的混合粉末中,在450℃以上且低于500℃的温度下进行热处理,制作出体积电阻率铌酸锂单晶基板 控制在1×10 8Ω·cm以上至1×10 10Ω·cm以下的范围内。