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1. 发明授权

EP2990807B1 RESONANT SENSOR 有权
公开(公告)号：EP2990807B1
公开(公告)日：2018-10-24
申请号：EP15181344.1
申请日：2015-08-18
申请人： Yokogawa Electric Corporation
发明人： Yoshida, Yusaku , Yoshida, Takashi , Yumoto, Atsushi
IPC分类号： G01P15/097 , G01P15/08
CPC分类号： G01P15/097 , G01P2015/0828
摘要： A resonant sensor includes a mover that is movable in a first direction, a supporter that extends in a second direction perpendicular to the first direction, the supporter being connected to the mover and a fixer, the supporter supporting the mover which is movable in the first direction, and a resonator that is vibratable, at least a part of the resonator being embedded in the supporter.

2. 发明授权

EP2028440B1 Disc resonator integral inertial measurement unit. 有权
公开(公告)号：EP2028440B1
公开(公告)日：2018-09-05
申请号：EP08075661.2
申请日：2008-07-25
申请人： The Boeing Company
发明人： Challoner, A. Dorian , Whelan, David
IPC分类号： G01C19/56 , G01P15/14
CPC分类号： G01P15/14 , G01C19/5684 , G01P15/097 , G01P15/18
摘要： Sensing motion of multiple degrees of freedom for an integral inertial measurement unit provided through the operation of a single centrally mounted planar disc resonator having a single driven mode in a single vacuum enclosure is disclosed. The resonator comprises a circumferentially slotted disc having multiple internal capacitive electrodes within the slots in order to excite a single in-plane driven vibration and sense in-plane vibration modes or motion of the resonator. In addition, vertical electrodes disposed below and/or above the resonator may also be used to sense out-of-plane vibration or motion. Acceleration sensing in three orthogonal axes can be obtained by sensing two lateral modes of the disc resonator in the plane of the disc from the internal electrodes and a vertical mode from the vertical electrodes.

3. 发明公开

EP3244169A1 SYSTEME DE MESURE RESONANT A RESOLUTION AMELIOREE 审中-公开
标题翻译：测量系统导致改进的决议
公开(公告)号：EP3244169A1
公开(公告)日：2017-11-15
申请号：EP17167899.8
申请日：2017-04-25
申请人： Commissariat à l'énergie atomique et aux énergies alternatives
发明人： LEONCINO, Luca , HENTZ, Sébastien , JOURDAN, Guillaume , SANSA PERNA, Marc
IPC分类号： G01D5/26 , G01L9/00 , G01D5/34 , G01N29/036
CPC分类号： G01D5/353 , G01D5/26 , G01D5/34 , G01L1/103 , G01L9/0023 , G01M11/3172 , G01N29/036 , G01N29/2418 , G01N2291/015 , G01N2291/0256 , G01N2291/0427 , G01P15/093 , G01P15/097
摘要： Système de mesure résonant de type MEMS et/ou NEMS, comportant :
Un dispositif optomécanique (4) comprenant au moins un élément résonant (14) à au moins une fréquence de résonance fr, un guide d'onde (10) couplé à un anneau optique (12) dont l'indice optique est sensible au déplacement de l'élément résonant (14),
Des moyens d'excitation (6) de l'élément résonant (14) à au moins sa fréquence de résonance fr,
Des moyens (2) aptes à injecter un faisceau lumineux à une fréquence f1 = fr + Δf dans le dispositif optomécanique, comportant une diode laser et des moyens de modulation disposés entre la diode laser (18) et le guide d'onde (10) à la fréquence f1.
Un dispositif de photodétection (8) apte à mesurer l'intensité d'un faisceau lumineux de mesure sortant du guide d'onde (10), l'intensité du faisceau de mesure ayant au moins une composante à une fréquence 2Δf.
摘要翻译：谐振测量系统MEMS和/或NEMS，包括：耦合到一个环上的光 - 机械装置（4）包括至少一个谐振元件（14）连接到至少一个谐振频率fr，波导（10）光学系数（12），其光学指数对谐振元件（14）的位移敏感;用于将谐振元件（14）激励（6）至少其谐振频率fr的装置; 2），其能够以频率f1 = fr +Δf将光束注入到光机械装置中，该光机械装置包括激光二极管和以该频率布置在激光二极管（18）和波导（10）之间的调制装置 F1。一种能够测量从波导（10）出射的测量光束的强度的光电检测装置（8），该测量光束的强度具有至少一个频率为2Δf的分量。

4. 发明授权

EP2500702B1 Vibration transducer 有权
标题翻译：振动传感器
公开(公告)号：EP2500702B1
公开(公告)日：2017-07-26
申请号：EP12159832.0
申请日：2012-03-16
申请人： Yokogawa Electric Corporation
发明人： Yoshida, Takashi
IPC分类号： G01L1/10 , G01L9/00 , B06B1/06 , G01P15/097 , G01H11/00
CPC分类号： G01L9/0019 , G01H11/00 , G01L1/106 , G01P15/097

5. 发明公开

EP3047573A4 PLL AND ADAPTIVE COMPENSATION METHOD IN PLL 审中-公开
标题翻译： PLL UND ADAPTIVES KOMPENSATIONSVERFAHREN IN EINEM PLL
公开(公告)号：EP3047573A4
公开(公告)日：2017-05-24
申请号：EP13893962
申请日：2013-09-22
申请人： TELEFONAKTIEBOLAGET LM ERICSSON (PUBL)
发明人： ZHAO ZHONGYUAN , WANG WEIXU , PAN LUPING
IPC分类号： H03L7/099 , H03L1/00 , H03L7/093
CPC分类号： H03L7/093 , G01P15/097 , H03G3/20 , H03L1/00 , H03L7/099
摘要： In a method for mitigating the vibration-induced phase noise of an phase locked loop with an acceleration sensitive voltage controlled oscillator, a correction signal generated by applying a gain and a equalization to an acceleration signal provided by an acceleration sensor sensing the acceleration on the VCO, is added to the oscillator control signal for active compensation, an adaptive compensation unit dynamically adjusts the gain, the frequency response of equalization, and the sensing direction of the acceleration sensor while the phase locked loop is working to make the active compensation automatically adapt to the parameters of the voltage controlled oscillator.
摘要翻译：在用加速度敏感电压控制振荡器来减轻锁相环的振动引起的相位噪声的方法中，通过对由加速度传感器提供的加速度信号应用增益和均衡而生成的校正信号被加速度传感器感测到VCO上的加速度，加到振荡器控制信号进行主动补偿，自适应补偿单元在锁相环工作时动态调整增益，均衡的频率响应和加速度传感器的感测方向，使主动补偿自动适应压控振荡器的参数。

6. 发明授权

EP2467675B1 OFFSET DETECTION AND COMPENSATION FOR MICROMACHINED INERTIAL SENSORS 有权
标题翻译：检测以及偏移微MADE惯性传感器的补偿
公开(公告)号：EP2467675B1
公开(公告)日：2016-12-07
申请号：EP10747345.6
申请日：2010-08-10
申请人： Analog Devices, Inc.
发明人： CLARK, William, A. , GEEN, John, A.
IPC分类号： G01C19/56 , G01C19/5712 , G01P15/097
CPC分类号： G01P15/097 , G01C19/5712

7. 发明授权

EP2096407B1 ANGULAR VELOCITY AND/OR ACCELERATION SENSOR AND METHOD FOR MANUFACTURING THE SAME 有权
标题翻译：角速率和/或加速度传感器和方法用于生产
公开(公告)号：EP2096407B1
公开(公告)日：2016-11-16
申请号：EP07860167.1
申请日：2007-12-26
申请人： Dai Nippon Printing Co., Ltd.
发明人： MORII, Akio
IPC分类号： G01C19/56 , H01L29/84 , G01P15/097 , G01P15/125 , G01P15/18 , G01C25/00 , G01C19/5733 , G01P15/08
CPC分类号： G01P15/097 , G01C19/5733 , G01C19/5769 , G01C25/00 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/0842
摘要： A mechanical quantity sensor includes: a first structure having a fixed portion with an opening, a displaceable portion disposed in the opening and displaceable relative to the fixed portion, and a connection portion connecting the fixed portion and the displaceable portion to each other; a second structure having a weight portion joined to the displaceable portion and a pedestal joined to the fixed portion, the second structure being stacked on the first structure; a first base having a first driving electrode which is disposed on a surface facing the displaceable portion and is made of a conductive material containing Al and Nd, the first base being stacked on the first structure while being connected to the fixed portion; and a second base having a second driving electrode which is disposed on a surface facing the weight portion and is made of the conductive material, the second base being stacked on the second structure while being connected to the pedestal.

8. 发明公开

EP2890988A4 SYSTEM AND METHOD FOR DETECTING VIBRATIONS USING AN OPTO-ANALYTICAL DEVICE 审中-公开
标题翻译：系统和方法检测到OPTO分析设备的振动BASIS
公开(公告)号：EP2890988A4
公开(公告)日：2016-07-20
申请号：EP12883705
申请日：2012-08-31
申请人： HALLIBURTON ENERGY SERVICES INC
发明人： PELLETIER MICHAEL T , FREESE ROBERT P , WEAVER GARY E , CHEN SHILIN
IPC分类号： G01P15/097 , E21B47/12
CPC分类号： E21B45/00 , E21B3/00 , E21B7/00 , E21B10/42 , E21B47/123 , G01H9/00 , G01P3/44 , G01P15/097 , G01V2210/1216
摘要： In one embodiment, a method includes drilling a wellbore in a formation with a drilling tool. The method further includes receiving electromagnetic radiation using an opto-analytical device coupled to the drilling tool. The method also includes detecting vibrations associated with drilling the wellbore based on the received electromagnetic radiation.

9. 发明公开

EP2867154A4 AN IMPROVED RESONATOR 有权
标题翻译： VERBESSERTER谐振器
公开(公告)号：EP2867154A4
公开(公告)日：2016-03-16
申请号：EP13809714
申请日：2013-06-25
申请人： MURATA MANUFACTURING CO
发明人： KUISMA HEIKKI
IPC分类号： B81B7/00 , G01P15/08 , G01P15/13 , H03H9/02
CPC分类号： H02N11/006 , G01P15/097 , G01P15/13 , G01P15/131 , H03B5/30
摘要： A mechanical resonator with a closed feed-back damping loop is provided. Displacement in the mechanical resonator is opposed with a damping force determined by the closed feed-back loop that comprises a signal processing filter with associated phase adjustment. An oscillation-free configuration that allows high signal amplification is achieved.
摘要翻译：提供具有闭合反馈阻尼环的机械谐振器。在机械谐振器中的位移与由包括具有相关联的相位调整的信号处理滤波器的闭合反馈回路确定的阻尼力相反。实现了允许高信号放大的无振荡配置。

10. 发明公开

EP2952853A4 ANGULAR VELOCITY SENSOR AND MANUFACTURING METHOD THEREFOR 有权
标题翻译： WINKELGESCHWINDIGKEITSSENSOR UND HERSTELLUNGSVERFAHRENDAFÜR
公开(公告)号：EP2952853A4
公开(公告)日：2016-02-10
申请号：EP14746045
申请日：2014-01-29
申请人： FUJIFILM CORP
发明人： NAONO TAKAYUKI , NAKANO TAKUMA
IPC分类号： G01C19/56 , G01C25/00
CPC分类号： G01C19/5712 , G01C19/56 , G01C25/00 , G01P15/09 , G01P15/097
摘要： One or more vibration plate layers (21, 22) that constitute a diaphragm part (12) are formed by a thin film forming technique. When a resonance frequency in a resonance vibration mode calculated from dimensions of a structure of an angular velocity sensor (10) and an elastic parameter of a material thereof is defined as f kilohertz, a mass of a weight part (14) is defined as M milligrams, a circumference of the diaphragm part (12) is defined as r meters, a stress applied to a piezoelectric layer (32) is defined as Ã p pascals, a thickness thereof is defined as t p meters, a stress applied to an n-th layer from the side of the weight part (14) in a vibration plate portion constituted by a plurality of layers including a lower electrode and the vibration plate layers (21, 22) is defined as Ã n pascals, and a thickness thereof is defined as t n meters (where n is a natural number), T eff expressed by T eff = r(Ã p t p + £Ã n t n )/M satisfies {(-0.36f 2 + 210)/33} ‰¤ T eff ‰¤ {(0.44f 2 + 210)/33}.
摘要翻译：通过薄膜形成技术形成构成隔膜部分（12）的一个或多个振动板层（21,22）。当根据角速度传感器（10）的结构的尺寸和其材料的弹性参数计算的共振振动模式中的共振频率被定义为f千赫兹时，重量部分（14）的质量被定义为M 毫微米，膜片部分（12）的圆周被定义为r米，施加到压电层（32）的应力被定义为p帕斯卡，其厚度被定义为tp米，施加到n- 在由包括下电极和振动板层（21,22）的多个层构成的振动板部分中，从配重部分（14）侧的第三层被定义为≈帕斯卡，并且其厚度被限定作为tn米（其中n是自然数），由T eff = r（Ãppp +∈ntn）/ M表示的T eff满足{（-0.36f 2 + 210）/ 33}‰T eff‰{ （0.44f 2 + 210）/ 33}。

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