专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明公开

EP3159702A1 ACCELEROMETER 审中-公开
公开(公告)号：EP3159702A1
公开(公告)日：2017-04-26
申请号：EP16194253.7
申请日：2016-10-17
申请人： Honeywell International Inc.
发明人： DWYER, Paul W. , BECKA, Stephen F.
IPC分类号： G01P15/125 , G01P15/13 , G01P15/08
CPC分类号： G01P15/125 , G01P15/132 , G01P2015/0828 , G01P2015/0837
摘要： Accelerometers as disclosed herein include a proof mass assembly and an accelerometer support. In some examples, a combined height and a combined coefficient of thermal expansion (CTE) of the materials of the accelerometer support is configured to substantially match a CTE of material of the non-moving member with a height substantially similar to the combined height of the accelerometer support. In some examples, the accelerometer support is configured to connect to a center raised pad of the proof mass assembly and maintain a capacitance gap between a capacitance plate on a proof mass of the proof mass assembly and a portion of the non-moving member.
摘要翻译：如本文所公开的加速度计包括检验质量组件和加速度计支撑件。在一些示例中，加速度计支撑件的材料的组合高度和组合高度热膨胀系数（CTE）被配置为基本上匹配不移动构件的材料的CTE与基本类似于不可移动构件的材料的组合高度加速度计支持。在一些示例中，加速度计支撑件被配置为连接到检测质量组件的中心凸起垫并且保持检测质量组件的检测质量块上的电容板和非移动部件的一部分之间的电容间隙。

2. 发明授权

EP2932275B1 HUNG MASS ACCELEROMETER WITH DIFFERENTIAL EDDY CURRENT SENSING 有权
标题翻译：麻醉师麻省理工学院麻省理工学院
公开(公告)号：EP2932275B1
公开(公告)日：2017-01-18
申请号：EP13765594.0
申请日：2013-09-10
申请人： Raytheon Company
发明人： ANAGNOST, John Joseph , BULLARD, Andrew Lyle
IPC分类号： G01P15/00 , G01P15/11 , G01P15/13
CPC分类号： G01P15/11 , G01P15/005 , G01P15/132

3. 发明公开

EP2932275A1 HUNG MASS ACCELEROMETER WITH DIFFERENTIAL EDDY CURRENT SENSING 有权
标题翻译：与差动式涡流测量悬挂质量ACCELEROMETER
公开(公告)号：EP2932275A1
公开(公告)日：2015-10-21
申请号：EP13765594.0
申请日：2013-09-10
申请人： Raytheon Company
发明人： ANAGNOST, John Joseph , BULLARD, Andrew Lyle
IPC分类号： G01P15/00 , G01P15/13
CPC分类号： G01P15/11 , G01P15/005 , G01P15/132
摘要： A new class of accelerometer uses a differential Eddy current sensor to sense the displacement of the proof mass. This accelerometer can provide improved performance in an open-loop configuration based on the thermal stability and improved linearity of the differential Eddy current sensor. The accelerometer may provide lower cost alternatives to commercial grade accelerometers and lower cost and higher reliability alternatives to strategic grade accelerometers.

4. 发明授权

EP2175284B1 Micro electro-mechanical systems (MEMS) force balance accelerometer 有权
标题翻译：具有力反馈的微机电系统的加速度传感器（MEMS）
公开(公告)号：EP2175284B1
公开(公告)日：2015-01-14
申请号：EP09172009.4
申请日：2009-10-01
申请人： Honeywell International Inc.
发明人： Dwyer, Paul W. , Roehnelt, Ryan
IPC分类号： G01P15/13
CPC分类号： G01P15/132

5. 发明授权

EP2207040B1 MEMS accelerometer having a flux concentrator between parallel magnets 有权
标题翻译： MEMS加速度计平行磁体之间的通量集中
公开(公告)号：EP2207040B1
公开(公告)日：2011-10-26
申请号：EP09180226.4
申请日：2009-12-21
申请人： Honeywell International Inc.
发明人： Dwyer, Paul W. , Becka, Steve
IPC分类号： G01P15/13 , G01P15/125 , G01P15/08
CPC分类号： G01P15/132 , G01P15/0802 , G01P15/125 , G01P2015/0831

6. 发明公开

EP2278341A1 Translational mass in-plane mems accelerometer 审中-公开
标题翻译：在Ebene的Translationsmassen-MEMS-Beschleunigungsmesser
公开(公告)号：EP2278341A1
公开(公告)日：2011-01-26
申请号：EP10168029.6
申请日：2010-06-30
申请人： Honeywell International Inc.
发明人： Dwyer, Paul W. , Strehlow, John
IPC分类号： G01P15/08 , G01P15/105 , G01P15/13
CPC分类号： G01P15/132 , G01P15/0802 , G01P15/125
摘要： An in-plane Micro Electro-Mechanical Systems (MEMS) accelerometer device with improved performance. An example MEMS device includes one or more components for generating a magnetic flux field perpendicular to a major plane. The device also includes a substrate, a proof mass (44), a hinge element (48-1, 48-2) that flexibly connects the proof mass to the substrate, the major plane corresponds to a major surface of the proof mass, a plurality of conductive leads (46-1, 46-2, 46-3) located at a position on the proof mass proximate the magnetic flux field, a plurality of conductive springs (50-1, 50-2, 50-3), each of the springs are electrically connected to a corresponding one of the conductive leads, and a plurality of anchor pads (60-1, 60-2, 60-3) connected to the substrate and one of the conductive springs. Isolation trenches directly connect to outer edges of the leads that are adjacent to other leads or proof mass material. The leads and springs include a plurality of slots (86, 90).
摘要翻译：具有改进性能的平面内微机电系统（MEMS）加速度计装置。示例性MEMS器件包括用于产生垂直于主平面的磁通场的一个或多个部件。该装置还包括基板，检测质量块（44），将证明物质柔性地连接到基底的铰链元件（48-1,48-2），主平面对应于证明物质的主表面，多个导电弹簧（46-1,46-2,46-3），位于靠近磁通场的证明物质上的一个位置，多个导电弹簧（50-1,50-2,50-3）每个弹簧电连接到相应的一个导电引线，以及连接到基板和导电弹簧之一的多个锚定垫（60-1,60-2,60-3）。绝缘沟槽直接连接到与其他引线或检验质量材料相邻的引线的外边缘。引线和弹簧包括多个槽（86,90）。

7. 发明公开

EP2234124A2 Using pole pieces to guide magnetic flux through a mems device and method of making 审中-公开
标题翻译：使用的磁极片用于通过MEMS器件及其制造方法引导的磁通
公开(公告)号：EP2234124A2
公开(公告)日：2010-09-29
申请号：EP10154180.3
申请日：2010-02-19
申请人： Honeywell International Inc.
发明人： Roehnelt, Ryan
IPC分类号： H01F3/10 , H01F7/06 , H01F7/08 , G01P15/08
CPC分类号： G01P15/132 , B81B3/0086 , G01P15/0802 , G01P15/125 , G01P2015/0814
摘要： Two opposing substrate layers (128, 124) each having one or more recesses (122, 130) filled with magnetic material guide the flow of flux through a coil (44) in a MEMS device layer (60) to provide for closed-loop operation. Flux flows from one pole piece through the coil to a second pole piece. A method of making using lithographic etching techniques is also provided.
摘要翻译：两个相对的基板层（128，124）均具有通过在MEMS器件层（60）的线圈（44）填充有磁性材料引导磁通的流动的一个或多个凹部（122，130），以提供用于闭环操作，磁通通过线圈的第二极片从一个极片流动。因此提供了一种使用光刻蚀刻技术制造的方法。

8. 发明公开

EP2211186A1 System and method for increased flux density d'Arsonval mems accelerometer 审中-公开
标题翻译：系统和VerfahrenfürD'Arsonval-MEMS-Beschleunigungsmesser miterhöhterFlussdichte
公开(公告)号：EP2211186A1
公开(公告)日：2010-07-28
申请号：EP10150570.9
申请日：2010-01-12
申请人： Honeywell International Inc.
发明人： Dwyer, Paul W.
IPC分类号： G01P15/13 , G01P15/08 , G01P15/125
CPC分类号： G01P15/132 , G01P15/0802 , G01P15/125 , G01P2015/0831
摘要： An increased flux density D'Arsonval Micro-Electro-Mechanical Systems (MEMS) device increases flux density. The increased flux density D'Arsonval Micro-Electro-Mechanical Systems (MEMS) device includes a housing (206), a proof mass (202) suspended within the housing (206) by at least one torsional flexure (204), a second torsional rebalancing magnet (208b), and a current coil (214) disposed on the proof mass (202). A portion of the current coil (214) is disposed between the first torsional rebalancing magnet (208a) and the second torsional rebalancing magnet (208b). A field generated in response to a current in the current coil (214) interacts with a magnetic field generated by the first torsional rebalancing magnet (208a) and the second torsional rebalancing magnet (208b). The magnetic field generates a rebalancing force that stabilizes a position of the proof mass (202).
摘要翻译：增加的通量密度D'Arsonval微机电系统（MEMS）器件增加了通量密度。增加的通量密度D'Arsonval微机电系统（MEMS）装置包括壳体（206），通过至少一个扭转挠曲件（204）悬挂在壳体（206）内的检测质量块（202），第二扭转重新平衡磁体（208b）和设置在证明块（202）上的电流线圈（214）。电流线圈（214）的一部分设置在第一扭转重新平衡磁体（208a）和第二扭转重新平衡磁体（208b）之间。响应于电流线圈（214）中的电流产生的场与由第一扭转重新平衡磁体（208a）和第二扭转重新平衡磁体（208b）产生的磁场相互作用。磁场产生使得校准质量块（202）的位置稳定的重新平衡力。

9. 发明公开

EP2175284A1 Micro electro-mechanical systems (MEMS) force balance accelerometer 有权
标题翻译： Beschleunigungssensor mitKraftrückkopplungals mikroelektromechanisches System（MEMS）
公开(公告)号：EP2175284A1
公开(公告)日：2010-04-14
申请号：EP09172009.4
申请日：2009-10-01
申请人： Honeywell International Inc.
发明人： Dwyer, Paul W. , Roehnelt, Ryan
IPC分类号： G01P15/13
CPC分类号： G01P15/132
摘要： Micro Electro-Mechanical Systems (MEMS) accelerometer (40) and acceleration sensing methods. A MEMS accelerometer includes a proof mass (68), a planar coil (72) on the proof mass, a magnet (50), a first pole piece (54) positioned proximate a first side of the proof mass, and a second pole piece (52). A magnetic flux field passes from the magnet, through the first pole piece, through the planar coil at an angle between approximately 30 degrees and approximately 60 degrees relative to the coil plane, and into the second pole piece. The first pole piece may extend into a first recessed area of a first housing layer and the second pole piece may extend into a second recessed area of a second housing layer. A method includes sensing a capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil.
摘要翻译：微机电系统（MEMS）加速度计（40）和加速度传感方法。 MEMS加速度计包括检测质量块（68），检测质量块上的平面线圈（72），磁体（50），邻近校准块第一侧定位的第一极片（54）和第二极片（52）。磁通场从磁体通过第一极片通过平面线圈以相对于线圈平面约30度至约60度之间的角度通过，并进入第二极靴。第一极靴可以延伸到第一壳体层的第一凹陷区域中，并且第二极靴可以延伸到第二壳体层的第二凹陷区域中。一种方法包括感测MEMS加速度计中的传感器的电容，并通过发送电流通过平面线圈来重新平衡MEMS加速度计。

10. 发明公开

EP1830193A1 Servo accelerometer 有权
标题翻译：伺服Beschleunigungsmesser
公开(公告)号：EP1830193A1
公开(公告)日：2007-09-05
申请号：EP07250845.0
申请日：2007-02-28
申请人： Innalabs Technologies, Inc.
发明人： Chernyak, Mykola G., c/o Innalabs Tech. Inc. , Skrypkovskyy, Gennadiy A., c/o Innalabs Tech. Inc.
IPC分类号： G01P15/13
CPC分类号： G01P15/132 , G01P15/11
摘要： A servo compensating accelerometer includes a top housing half and a bottom housing half rigidly connected together, and each having coaxial threaded openings. A sensing element is positioned between the top and bottom halves and affixed to the bottom half. Top and bottom magnetic systems, each of which has a magnetic conductor, a permanent magnet and a field concentrator, the magnetic systems being mounted within the respective top and bottom halves of the housing using the threaded openings. A momentum sensor includes the top and bottom magnetic systems, and also includes two movable coils mounted on a plate and positioned within the magnetic systems. A differential angle sensor includes toroidal excitation coils located on the permanent magnets, the magnetic systems and the coils of the momentum sensor. Zero bias of the accelerometer's angular displacement sensor is tuned by adjusting the position of the magnetic systems by moving them in the threaded openings. Stop screws can be used to fix position of the magnetic systems relative to the top and bottom halves of the housing. Two perpendicular mounting surfaces are located on the bottom half of the housing. An electrical circuit that includes a preamplifier, a demodulator, a correcting element, a high frequency generator, an amplifier, the excitation coils and the movable coils, which collectively form a feedback circuit, and generate an output of the accelerometer using an inductor, a resistor, a capacitor and a filter. The sensing element, in one embodiment, can be metallic.
摘要翻译：伺服补偿加速度计包括顶部壳体半部和刚性连接在一起的底部壳体半部，每个具有同轴螺纹开口。感测元件位于顶部和底部两半之间并固定到下半部分。顶部和底部磁性系统，其中每个具有磁性导体，永磁体和场集中器，所述磁性系统使用螺纹开口安装在壳体的相应顶部和底部半部内。动量传感器包括顶部和底部磁性系统，并且还包括安装在板上并定位在磁性系统内的两个可动线圈。差分角度传感器包括位于永磁体上的环形激励线圈，动量传感器的磁系统和线圈。加速度计的角位移传感器的零偏置通过在螺纹开口中移动来调节磁性系统的位置来调节。可以使用止动螺钉来固定磁体系相对于壳体的顶部和底部两半的位置。两个垂直的安装表面位于外壳的下半部分。一种电路，包括前置放大器，解调器，校正元件，高频发生器，放大器，激励线圈和可动线圈，它们共同形成反馈电路，并且使用电感器产生加速度计的输出，电阻器，电容器和滤波器。在一个实施例中，感测元件可以是金属的。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式