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    • 21. 发明专利
    • AIR TURBINE DRIVEN STATIC PRESSURE GAS BEARING SPINDLE
    • JPH02196110A
    • 1990-08-02
    • JP1287689
    • 1989-01-20
    • NTN TOYO BEARING CO LTD
    • FUJIKAWA YOSHIO
    • F01D15/06F01D25/16F01D25/24
    • PURPOSE:To make an air turbine into an axial-flow turbine as well as to aim at the promotion of its miniaturization by forming a bearing sleeve to be installed in a housing end into a large diameter, and constituting an air supply fed via a ring groove installed in the outer circumference so as to be sprayed out of a spiral nozzle groove. CONSTITUTION:In an air turbine driven static pressure gas bearing spindle 1, a bearing sleeve 3 is internally fitted in a main spindle 2 provided with an outer diametral part 2', and an air turbine consisting of a thrust plate 10 and a turbine blade 11 set up in its peripheral part. In a thrust supporting bearing sleeve of the bearing sleeve 3, there is provided with a thrust bearing 3a being opposed to the sleeve in holding an air turbine between, and this thrust bearing 3a is formed to be larger in diameter than the conventional one. Then, a circumferential groove 15 and a spiral nozzle groove 17 being opened toward a thrust bearing surface form this circumferential groove 15 are installed in the outer circumference of this bearing 3a at several spots, and thereby compressed charging being led into the circumferential groove 15 is made so as to be sprayed to the turbine blade 11 from the nozzle groove 17.
    • 22. 发明专利
    • Static pressure gas bearing and rotating device
    • 静压气体轴承和旋转装置
    • JP2008298275A
    • 2008-12-11
    • JP2007148385
    • 2007-06-04
    • Ntn CorpNtn株式会社
    • FUJIKAWA YOSHIOHIRATA JUNICHI
    • F16C32/06
    • PROBLEM TO BE SOLVED: To provide a static pressure gas bearing capable of easily adjusting a clearance between a rotor and a radial bearing pad.
      SOLUTION: The static pressure gas bearing supporting the rotor comprises the radial bearing pad 3 supporting the rotor in a radial direction, a linear guide 1c moving the radial bearing pad 3, and a ball stud 4 rockingly uniting the radial bearing pad 3 to a linear guide 1c. A direction in which the linear guide 1c moves the radial bearing pad 3 intersects with a direction in which the rotation center of the rotor and the ball stud 4 are united. In regard to a change amount of a bearing clearance between the outer peripheral surface 2c of the rotor and the radial bearing pad 3, a movement adjusting amount for moving the radial bearing pad 3 by the linear guide 1c is large, so that a minute amount of the bearing clearance can be accurately adjusted.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供能够容易地调节转子和径向轴承瓦块之间的间隙的静压气体轴承。 支撑转子的静压气体轴承包括沿径向支撑转子的径向轴承瓦块3,移动径向轴承瓦块3的直线导轨1c和使径向轴承瓦块3摆动地组合的球形螺柱4 到线性引导件1c。 直线导轨1c移动径向轴承瓦块3的方向与转子和球螺柱4的旋转中心结合的方向相交。 关于转子的外周面2c与径向支承垫3之间的轴承间隙的变化量,用于通过直线导向件1c移动径向轴承瓦片3的移动调整量大,使得微量 的轴承间隙可以精确调整。 版权所有(C)2009,JPO&INPIT
    • 23. 发明专利
    • Static pressure gas bearing spindle
    • 静压气体轴承主轴
    • JP2007247762A
    • 2007-09-27
    • JP2006071534
    • 2006-03-15
    • Ntn CorpNtn株式会社
    • FUJIKAWA YOSHIO
    • F16C32/06
    • PROBLEM TO BE SOLVED: To provide a static pressure gas bearing spindle with a rotating part having a reduced axial length without lowering both the rotating accuracy of the rotating part and the performance of an object fixing means.
      SOLUTION: In the static pressure gas bearing spindle 1, gas is distributed between a ventilation hole 29 and the object fixing means via a rotation side ventilation passage 32 provided in a thrust plate 4 and a fixation side ventilation passage 30 provided in the fixing part to change gas pressure in the object fixing means. The rotation side ventilation passage 32 which has one end connected to the motor side surface of the thrust plate 4 is provided in the thrust plate 4, so as not to require for providing a conventional ventilating sleeve. Thus, the rotating part 2 has a reduced axial length, compared with that of a conventional static pressure gas bearing spindle, without reducing the axial length of a static pressure gas journal bearing.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 解决的问题:为了提供具有减小的轴向长度的旋转部件的静压气体轴承主轴,而不降低旋转部件的旋转精度和物体固定装置的性能。 解决方案:在静压气体轴承心轴1中,气体经由设置在推力板4中的旋转侧通气通道32和设置在该固定侧通气通道30中的通气孔29和物体固定装置之间分配。 固定部件以改变物体固定装置中的气体压力。 在推力板4上设有一端连接推力板4的马达侧表面的旋转侧通气通路32,以便不需要提供常规的通气套筒。 因此,与传统的静压气体轴承主轴相比,旋转部件2具有减小的轴向长度,而不减小静压气体轴颈轴承的轴向长度。 版权所有(C)2007,JPO&INPIT
    • 24. 发明专利
    • Static pressure gas bearing spindle
    • 静压气体轴承主轴
    • JP2006300024A
    • 2006-11-02
    • JP2005126301
    • 2005-04-25
    • Ntn CorpNtn株式会社
    • HIRATA JUNICHIHARAGUCHI TAKASHIFUJIKAWA YOSHIO
    • F01D1/06F01D5/14F01D9/02F16C32/06
    • PROBLEM TO BE SOLVED: To provide an inexpensive static pressure gas bearing spindle having improved efficiency with small energy loss.
      SOLUTION: The static pressure gas bearing spindle 1 comprises: a nozzle 62 for jetting gas; a main shaft 2 to be rotated with a plurality of rotary blades receiving the gas jetted from the nozzle 62; and static pressure gas bearings 3, 4 for journaling the main shaft 2. The rotary blades each include: a first face formed on the front side in the direction of rotating the main shaft 2; and a second face formed on the rear side. The first face has a front flat portion formed on the outer periphery side of the main shaft 2 and a front curved portion formed on the inner periphery side of the main shaft 2 protruding in the direction of the rotating the rotary blades. In the state where the outer periphery side end of the front flat portion is moved closest to the outlet of the nozzle 62, the direction of jetting the gas is substantially parallel to the front flat portion. The second face has a rear curved portion formed protruding in the direction of rotating the main shaft 2.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种廉价的静压气体轴承心轴,其具有改善的效率并且具有小的能量损失。 静压气体轴承锭子1包括:用于喷射气体的喷嘴62; 主轴2与多个旋转叶片一起旋转,接收从喷嘴62喷出的气体; 以及用于对主轴2进行记录的静压气体轴承3,4。旋转叶片各自包括:在主轴2的旋转方向上形成在前侧的第一面; 以及形成在后侧的第二面。 第一面具有形成在主轴2的外周侧上的前平面部分和形成在主轴2的内周侧上的,沿着旋转叶片旋转的方向突出的前弯曲部分。 在前平坦部分的外周侧端部最靠近喷嘴62的出口移动的状态下,喷射气体的方向基本上平行于前平坦部分。 第二面具有形成为沿主轴2旋转的方向突出的后弯曲部分。(C)2007,JPO&INPIT
    • 25. 发明专利
    • Fine pattern correcting device and coating stylus for correction
    • 精细图案校正装置和涂层矫正器
    • JP2006039356A
    • 2006-02-09
    • JP2004221529
    • 2004-07-29
    • Ntn CorpNtn株式会社
    • SARUTA MASAHIROFUJIKAWA YOSHIO
    • G09F9/00G02B5/20
    • PROBLEM TO BE SOLVED: To provide a fine pattern correcting device and a coating stylus for correction that facilitate history management of the coating stylus, and can prevent trouble due to abrasion beforehand and maintain the quality of coating correction. SOLUTION: The fine pattern correcting device is provided for correcting a pattern defect part of a fine pattern provided on a plane substrate by applying correcting liquid with the coating stylus 13. An IC tag 17 is provided to a base part 15 of the coating stylus 13. Further, a head 18 which reads and write data out of and to the IC tag 17 is provided in a position where the head is communicable with the IC tag 17. Further, the correcting device is provided with a coating frequency writing means 41 of recording the coating frequency of the coating stylus 13 to the IC tag 17 through the head 18. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种用于校正的精细图案校正装置和涂层触针,其有利于涂层触针的历史管理,并且可以预防预防磨损的问题并保持涂层校正的质量。 解决方案:精细图案校正装置用于通过用涂层触针13施加校正液来校正设置在平面基板上的精细图案的图案缺陷部分。IC标签17设置在 另外,在IC标签17的头部可以连接的位置,设置读取和写入IC标签17的数据的头部18.此外,校正装置具有涂层频率写入 用于通过头部18将涂层触针13的涂覆频率记录到IC标签17的装置41.权利要求:(C)2006,JPO&NCIPI
    • 30. 发明专利
    • STATIC PRESSURE AIR BEARING SPINDLE
    • JPH08323504A
    • 1996-12-10
    • JP13351295
    • 1995-05-31
    • NTN TOYO BEARING CO LTD
    • FUJIKAWA YOSHIOFUJII SHOJI
    • B23B19/02F16C32/06
    • PURPOSE: To reduce weight of a spindle by forming a member to form an outside diameter wall of a bearing part out of a nonmetallic material having small specific gravity, and forming a female screw part of a fixing part of the other bearing part out of a metallic material CONSTITUTION: In a static pressure air bearing spindle, a housing 23' to form an outside diameter wall of a first bearing part X and a housing 25' to form an outside diameter wall of a second bearing part Y, are formed of a nonmetallic material such as ceramics, synthetic resin and graphite having specific gravity smaller than a metallic material. According to this, a metallic annular member 1 having a female screw la is fixed to an outside diameter of the housing 23'. Since the female screw 1a of this fixing part 3 is arranged on the metallic annular member 1, the housing 23' and the housing 25' are formed of a nonmetallic material, and even when weight of the bearing parts is reduced, there is no fear of damage of a female screw 1a part.