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1. 发明专利

JP2000291657A HYDROSTATIC GAS BEARING 失效
公开(公告)号：JP2000291657A
公开(公告)日：2000-10-20
申请号：JP9520499
申请日：1999-04-01
申请人： NTN TOYO BEARING CO LTD
发明人： ITO TAKANOBU , FUJIKAWA YOSHIO
IPC分类号： F16C33/16 , F16C32/06
摘要： PROBLEM TO BE SOLVED: To easily manufacture a slot drawing-type hydrostatic air bearing and put the same to practical use. SOLUTION: In a hydrostatic gas bearing of a journal bearing 13 and a thrust bearing 15, comprising a rotary shaft 1 and the bearing surfaces 18, 23 opposite to a thrust plate 2 integrally mounted on the rotary shaft 1, and jetting the compressed air from the slot clearances 20, 25 toward the rotary shaft 1 and the bearing clearances 12, 14 formed between the thrust plate 2 and the bearing surfaces 18, 23 for holding the rotary shaft 1 and the thrust plate 2 in the non-contact state, the bearing surfaces 18, 23 having the opened slot clearances 20, 25 are made of graphite.

2. 发明专利

JP2000110836A STATIC PRESSURE BEARING DEVICE 失效
公开(公告)号：JP2000110836A
公开(公告)日：2000-04-18
申请号：JP28457898
申请日：1998-10-06
申请人： NTN TOYO BEARING CO LTD
发明人： OZAKI TAKAMI , FUJIKAWA YOSHIO
IPC分类号： B23B19/02 , F16C32/06
摘要： PROBLEM TO BE SOLVED: To prevent overload by providing a measuring means for a static pressure bearing clearance in the static bearing device supporting a movable body to a fixed body by a static pressure of fluid in the static pressure bearing clearance. SOLUTION: The pressure P1, P2 of static pressure bearing clearances d1, d2 is measured so that load of each static pressure bearing part, namely, the load of clearances d1, d2 between the fixed body 1 and a rotor, or of each static pressure bearing part changes in the clearances d1, d2 can be found (found by multiplication of bearing rigidity by bearing clearance) and the displacement of the rotor can be found by conversion. The measured value or the converted value are transmitted to the outside. When the converted value is transmitted to the outside, a pressure sensor 6 itself or a signal transmission means 7 has a function of converting. The signal transmitted to the outside is thus monitored so that the overload of the static pressure bearing device 10 can be prevented.

3. 发明专利

JPH07237068A SPINDLE WITH AUTOMATIC TOOL CHANGING MECHANISM 失效
公开(公告)号：JPH07237068A
公开(公告)日：1995-09-12
申请号：JP2999594
申请日：1994-02-28
申请人： NTN TOYO BEARING CO LTD
发明人： FUJIKAWA YOSHIO , YAMAZAKI SHIZUKA , NAKAMURA KOJI
IPC分类号： B23Q3/155
摘要： PURPOSE:To prevent the lowering of concentricity between a main spindle and a tool and maintain the concentricity over a long period of time. CONSTITUTION:The rear end face 10a of a draw bar 10 is formed into the protruding spherical face, and the tip face 12a of a push rod 12 is formed into the flat face. The spherical face center of the rear end face 10a is on an axis. Since the tip face 12a of the push rod 12 and the rear end face 10a of the draw bar 10 are brought into contact always at one point on the axis, partial contact to be the factor of lowering of the concentricity between a collet chuck 9 and a main spindle 2 is not caused.

4. 发明专利

JPH06312303A STATIC PRESSURE GAS BEARING SPINDLE 失效
公开(公告)号：JPH06312303A
公开(公告)日：1994-11-08
申请号：JP10246093
申请日：1993-04-28
申请人： NTN TOYO BEARING CO LTD
发明人： FUJIKAWA YOSHIO
IPC分类号： B23B19/02 , F16C32/06
摘要： PURPOSE:To reduce the inertial moment of a main spindle, and to reduce the rise time and the fall time of the rotation, in a spindle in which the main spindle is held by a static pressure gas bearing. CONSTITUTION:A main spindle 2 is formed of an iron system alloy of hollow shaft 5 to compose a journal bearing, and a thrust plate 6 which consists of an aluminum alloy, and by making a thrust bearing part in a light weight, the inertial moment is reduced. A chromium plating layer 15 is provided on the surface of the hollow shaft 5, an alumite layer 16 is formed on the surface of the thrust plate 6, and the generation of a seizure by the contact with the bearing surface is prevented.

5. 发明专利

JPH02217617A CONTROLLING METHOD FOR SPINDLE USING STATIC PRESSURE GAS BEARING 失效
公开(公告)号：JPH02217617A
公开(公告)日：1990-08-30
申请号：JP3996889
申请日：1989-02-20
申请人： NTN TOYO BEARING CO LTD
发明人： YAMAZAKI SHIZUKA , FUJIKAWA YOSHIO , NIKI MOTOHARU
IPC分类号： F16C32/06
摘要： PURPOSE:To restrain the increase of vibration of a spindle when it passes at critical speed so as to make balancing work unnecessary by supplying air to a bearing at less than predetermined pressure before the rotating speed of the spindle exceeds the resonant point, and reducing the air supply pressure to below predetermined pressure after the speed exceeds the resonant point. CONSTITUTION:When a spindle 2 is rotated, a rotating speed detector 4 measures the rotating speed and outputs it to a pressure control valve controller 7. The controller 7 receives the output signal and next actuates a pressure control valve 6 so as to vary air supply pressure to a bearing 3, 3: i.e. when the rotating speed of the spindle is in the range of 0 to (b) point, a great amplitude is shown by the resonant point if the air supply pressure is P2, while if the air supply pressure is P1 a stable, low amplitude is shown. When the rotating speed is (b) to (a) point, a great amplitude is shown by the resonant point if the air supply pressure is P1, while if the air supply pressure is P2 a low, stable amplitude is shown. Thus, when the rotating speed is 0 to (b), the pressure is P1, while when the speed is more than (a) point the pressure is changed to P2 again, whereby it is made possible to rotate the spindle off each resonant point.

6. 发明专利

JP2001200844A HYDROSTATIC GAS BEARING SPINDLE 失效
公开(公告)号：JP2001200844A
公开(公告)日：2001-07-27
申请号：JP2000180959
申请日：2000-06-16
申请人： NTN TOYO BEARING CO LTD
发明人： FUJIKAWA YOSHIO , ITO TAKANOBU
IPC分类号： F16C32/06 , H01L21/68 , H01L21/683
摘要： PROBLEM TO BE SOLVED: To provide a compact hydrostatic gas bearing spindle capable of enhancing the ultimate vacuum in a vacuum chamber. SOLUTION: In a hydrostatic gas bearing spindle in which a rotary shaft 5 is provided in a housing 4 through bearing clearance, compressed gas is introduced into the bearing clearance, and the rotary shaft 5 is supported in the housing in non-contact manner, a negative pressure generator 28 for generating negative pressure by the flow of compressed gas, is provided inside the housing 4, and the gas discharged from the bearing clearance is adapted to be sucked by the negative pressure generator 28. The leakage of compressed gas to the vacuum chamber is prevented in non-contact manner.

7. 发明专利

JP2001140884A STATIC PRESSURE GAS BEARING SPINDLE 失效
公开(公告)号：JP2001140884A
公开(公告)日：2001-05-22
申请号：JP2000258964
申请日：2000-08-29
申请人： NTN TOYO BEARING CO LTD
发明人： FUJIKAWA YOSHIO , ITO TAKANOBU
IPC分类号： B23Q1/26 , B23Q1/38 , B23Q1/70 , F16C32/06
摘要： PROBLEM TO BE SOLVED: To provide a static pressure gas bearing spindle particularly suitable for use in a vacuum because the leakage of bearing exhaust to the outside is sufficiently reduced, and in which a rotating shaft is supported within a bearing housing by means of compressed gas without making contact therewith. SOLUTION: In the static pressure gas bearing spindle, the rotating shaft 1 is provided within the bearing housing 3 with a bearing clearance 7 therebetween and the compressed gas is introduced into the bearing clearance 7 to support the rotating shaft 1 against the bearing housing 3 without contact therebetween. An exhaust suction means for sucking the gas exhausted from the bearing clearance 7 is provided inside the rotating shaft 1 to fully reduce, without contact, the leakage of the compressed gas into a vacuum chamber. Further, a negative pressure generator 19 for generating negative pressure by introduction of the compressed gas is built into the rotating shaft 1 and a suction groove 18 is provided in a position intermediate between a seal clearance 17, provided in a path extending from the outside of the housing 3 to the bearing clearance 7, and the bearing clearance 7. A suction passage 26 connecting the negative pressure portion of the negative pressure generator 19 to the suction groove 18 is provided within the rotating shaft 1.

8. 发明专利

JP2000246565A STATIC PRESSURE GAS BEARING SPINDLE 失效
公开(公告)号：JP2000246565A
公开(公告)日：2000-09-12
申请号：JP4619099
申请日：1999-02-24
申请人： NTN TOYO BEARING CO LTD
发明人： FUJIKAWA YOSHIO , ASAHARA AKINOBU , FUJII SHOJI , ITO TAKANOBU
IPC分类号： B23Q3/15 , B23B19/02 , B23Q1/00 , B23Q1/38 , B23Q1/70 , F16C32/06
摘要： PROBLEM TO BE SOLVED: To maintain the accuracy of a rotary shaft highly by installing an electrostatic chuck on the rotary shaft supported in a noncontact state by a static pressure gas bearing and supplying a current in noncontact from an outer electric source to the electrode of the electrostatic chuck. SOLUTION: In this spindle, an insulated anode side discharge member 25 and cathode side discharge member 26 are provided in a housing 1. The high pressure direct current electric source 27 of a housing 1 outside is connected between respective discharge members 25, 26 and a rotary shaft 4 is constituted by the combination of a mutually insulated anode shaft part 7 with a cathode shaft part 8. The anode side discharge surface 28 and cathode side discharge surface 29 faced to the anode side discharge member 25 and cathode side discharge member 26 respectively with the minute clearance are provided on these respective shaft parts. An electrostatic chuck 33 having positive/negative electrodes 35, 36 conducted to the anode shaft part 7 and cathode shaft part 8 is installed on the tip of this rotary shaft 4 and by the discharge current flowing between respective discharge members 25, 26 and respective discharge surfaces 28, 29, the current is supplied between the positive/negative electrodes 35, 36.

9. 发明专利

JPH1113764A HYDROSTATIC AIR BEARING 失效
公开(公告)号：JPH1113764A
公开(公告)日：1999-01-22
申请号：JP16573497
申请日：1997-06-23
申请人： NTN TOYO BEARING CO LTD
发明人： FUJII SHOJI , FUJIKAWA YOSHIO
IPC分类号： F16C32/06
摘要： PROBLEM TO BE SOLVED: To prevent the occurrence of deformation and movement of a bearing sleeve by a pressure of compressed air fed to a thrust bearing throttle hole and to prevent leakage of compressed air through a contact surface between the bearing sleeve and a housing. SOLUTION: In a hydrostatic air bearing spindle having a bearing sleeve 2 fixed at making contact with a housing 1, an air supply passage 22b communicated with a thrust bearing throttle hole 22a and passing through the bearing sleeve 2 and opened to the outside diameter surface is provided. The bearing sleeve 2 is a part to axially support a main shaft 3 through static pressure air by a thrust bearing surface having a plurality of fine thrust bearing throttle holes 22a.

10. 发明专利

JPH1110420A STATIC PRESSURE AIR BEARING SPINDLE 失效
公开(公告)号：JPH1110420A
公开(公告)日：1999-01-19
申请号：JP16573597
申请日：1997-06-23
申请人： NTN TOYO BEARING CO LTD
发明人： NAKAMURA KOJI , FUJIKAWA YOSHIO
IPC分类号： B23Q5/32 , B23B37/00 , F16C32/06
摘要： PROBLEM TO BE SOLVED: To enable high-accuracy and high speed rotation and conduct fine precision cutting efficiently by providing an excitation means non-contact operated on a vibrator to excite a spindle, and a rotary driving means operated on a part of the spindle to which rotation is given to non-contact rotate the spindle. SOLUTION: When electric power is supplied from a high-frequency power supply to an exciting coil 13 which is an excitation means fixed to a housing 40 in such a manner as to surround a vibrator 10, a high-frequency a.c. magnetic field axially piercing the vibrator 10 is generated so that the vibrator 10 is elongated and contracted in the axial direction to generate vibration. By the combination of the excitation means and the static pressure gas bearings 4-6, 7,8, high-speed rotation is enabled with high accuracy, and fine working with a small-diameter tool such as boring, milling or the like can be conducted with high accuracy and efficiently. A spindle 1 is rotated by a motor comprising a motor rotor 17 and a motor stator 18.

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