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    • 1. 发明专利
    • Method for forming fine structure and mold for nanoimprint having fine structure, and method of producing porus alumina composite
    • 用于形成具有微细结构的纳米结构的微细结构和模具的方法以及生产多孔铝复合材料的方法
    • JP2013057102A
    • 2013-03-28
    • JP2011196169
    • 2011-09-08
    • Kanagawa Acad Of Sci & Technol財団法人神奈川科学技術アカデミー
    • MASUDA HIDEKI
    • C25D11/04C23F1/02C25D1/00C25D11/18C25D11/24
    • PROBLEM TO BE SOLVED: To provide a method for producing a substrate having a fine structure in which the shape is controlled and which has a high aspect ratio in relation to depth.SOLUTION: A method for forming a fine structure is characterized by forming a fine structure having a cross-sectional shape corresponding to a resist pattern and an aspect ratio of 1 or more by forming a resist pattern on the surface of anodically oxidized porous alumina and then applying a wet etching treatment to the resulting porous alumina in order to selectively solve and remove parts where the resist pattern is not formed. A mold for nanoimprint has a fine structure formed by the method. A method for producing a porous alumina composite is characterized by forming a resist pattern on the surface of anodically oxidized porous alumina, then forming through-holes having a cross-sectional shape corresponding to the resist pattern by applying a wet etching treatment to the resulting porous alumina in order to selectively solve and remove parts where the resist pattern is not formed, and filling a substance different from alumina into the through-holes.
    • 解决的问题:提供一种具有精细结构的基板的制造方法,其中形状被控制并且相对于深度具有高纵横比。 解决方案:用于形成精细结构的方法的特征在于通过在阳极氧化多孔的表面上形成抗蚀剂图案,形成具有与抗蚀剂图案对应的横截面形状和长宽比为1以上的微细结构 氧化铝,然后对所得多孔氧化铝进行湿蚀刻处理,以选择性地求解并除去未形成抗蚀剂图案的部分。 用于纳米压印的模具具有通过该方法形成的精细结构。 多孔氧化铝复合体的制造方法的特征在于,在阳极氧化多孔质氧化铝的表面上形成抗蚀剂图案,然后通过对所得的多孔氧化铝进行湿式蚀刻处理,形成具有与抗蚀剂图案对应的截面形状的通孔 氧化铝,以选择性地去除并除去未形成抗蚀剂图案的部分,并将不同于氧化铝的物质填充到通孔中。 版权所有(C)2013,JPO&INPIT
    • 3. 发明专利
    • Roll-like mold for imprint and method of manufacturing the same
    • 用于印刷的辊状模具及其制造方法
    • JP2012195600A
    • 2012-10-11
    • JP2012110771
    • 2012-05-14
    • Kanagawa Acad Of Sci & Technol財団法人神奈川科学技術アカデミー
    • MASUDA HIDEKIYAGISHITA TAKASHINISHIO KAZUYUKIKUMAGAI NAOKO
    • H01L21/027B29C33/42B29C59/04C25D11/14C25D11/24
    • PROBLEM TO BE SOLVED: To provide a roll-like mold, along with its manufacturing method, in which a fine rough is formed on the surface with no seam, with mechanical strength being excellent.SOLUTION: A roll-like mold for continuous imprinting has a rough that is formed by utilizing a regular fine hole array of anode oxidation porous alumina formed on the surface with no seam. In order to manufacture it, a roll-like mold that has a hole array structure or pillar array structure on the surface is used. In order to manufacture it, a pipe or round rod of aluminum material in which anode oxidation porous alumina layer is formed is used as a mold, to pack fine holes of the anode oxidation porous alumina layer with a material. By melting and removing the mold, a roll-like mold is manufactured in which a fine hole array is transferred. The resultant roll-like mold can be used as an imprint mold for continuously transferring a fine pattern on the surface of a substrate such as polymer with no seam.
    • 要解决的问题:为了提供一种辊状模具及其制造方法,其中在没有接缝的表面上形成细小的粗糙度,机械强度优异。 解决方案:用于连续压印的辊状模具具有通过利用形成在表面上而没有接缝的阳极氧化多孔氧化铝的规则的细孔阵列形成的粗糙。 为了制造它,使用在表面上具有孔阵列结构或柱阵列结构的辊状模具。 为了制造它,使用其中形成有阳极氧化多孔氧化铝层的铝材料管或圆棒作为模具,用材料包装阳极氧化多孔氧化铝层的细孔。 通过熔融和去除模具,制造其中转移微孔阵列的辊状模具。 所得到的辊状模具可以用作压印模具,用于在没有接缝的情况下在诸如聚合物的基板的表面上连续转印精细图案。 版权所有(C)2013,JPO&INPIT
    • 4. 发明专利
    • Porous microparticle and method for manufacturing the same
    • 多孔微球及其制造方法
    • JP2012162770A
    • 2012-08-30
    • JP2011024012
    • 2011-02-07
    • Kanagawa Acad Of Sci & Technol財団法人神奈川科学技術アカデミー
    • MASUDA HIDEKIYAGISHITA TAKASHIIMAIZUMI MASAHIKO
    • C25F3/14C25D11/00C25F3/02C25F3/04C25F3/08C25F3/12H01G9/052H01M4/38
    • Y02E60/12
    • PROBLEM TO BE SOLVED: To provide a method for manufacturing a porous microparticle in which fine pores having a controlled size and a controlled depth or the like are formed on the entire surface without subjecting a troublesome step with a high throughput, and a porous microparticle manufactured by the method.SOLUTION: In the method for manufacturing the porous microparticle, the microparticles 9 containing at least any one of the metal or the semiconductor are dispersed in a barrel 4 provided in electrolytic solution 3. When the microparticles are contacted directly or indirectly through the other microparticles with an electrode 5 disposed in the barrel, a porous structure is formed on the surface of the microparticle by advancing the electrochemical reaction to form the fine pores on the surface of the microparticles. The porous microparticle manufactured by the method is provided.
    • 解决的问题:提供一种制造多孔微粒的方法,其中在整个表面上形成具有受控尺寸和受控深度等的细孔,而不会产生具有高生产量的麻烦的步骤,并且 通过该方法制造的多孔微粒。 解决方案:在多孔微粒的制造方法中,将包含金属或半导体中的至少任一种的微粒9分散在设置在电解液3中的筒体4中。当微粒直接或间接地通过 其他具有设置在筒体中的电极5的微粒,通过推进电化学反应在微粒的表面上形成微孔,在微粒的表面上形成多孔结构。 提供通过该方法制造的多孔微粒。 版权所有(C)2012,JPO&INPIT