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    • 2. 发明专利
    • Solid state imaging device and manufacturing method thereof
    • 固态成像装置及其制造方法
    • JP2006319129A
    • 2006-11-24
    • JP2005140163
    • 2005-05-12
    • Fuji Photo Film Co Ltd富士写真フイルム株式会社
    • AIDA TSUTOMUHANAOKA HIDEYASU
    • H01L27/14
    • H01L27/14627H01L27/14685
    • PROBLEM TO BE SOLVED: To provide a high sensitivity solid state imaging device which is easily manufactured by controlling the curvature of a condenser lens with high precision, and by forming a condenser lens having high condensing efficiency.
      SOLUTION: This manufacturing method of the solid state imaging device comprises steps of: forming an imaging portion equipped with a photoelectric conversion portion and a charge transfer portion for transferring the charge formed in the photoelectric conversion portion; and forming the condenser lens on the imaging portion via a planarized film. The method also comprises steps of: forming a first optical film having a lens shape by patterning a lens substrate; and forming a second optical film on the first optical film by controlling the film formation condition so that a lens having a desired curvature is constructed.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 解决的问题:提供一种通过高精度地控制聚光透镜的曲率并且形成具有高冷凝效率的聚光透镜而容易制造的高灵敏度固态成像装置。 解决方案:固态成像装置的制造方法包括以下步骤:形成配备有光电转换部分和电荷转移部分的成像部分,用于转移在光电转换部分中形成的电荷; 以及经由平坦化膜在成像部分上形成聚光透镜。 该方法还包括以下步骤:通过图案化透镜基底来形成具有透镜形状的第一光学膜; 以及通过控制成膜条件在第一光学膜上形成第二光学膜,从而构成具有所需曲率的透镜。 版权所有(C)2007,JPO&INPIT