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    • 8. 发明公开
    • 락톤 함유 화합물, 고분자 화합물, 레지스트 재료 및 패턴형성 방법
    • 含有LACTONE的化合物,聚合物,电阻组合物和图案处理
    • KR1020070074476A
    • 2007-07-12
    • KR1020070001259
    • 2007-01-05
    • 신에쓰 가가꾸 고교 가부시끼가이샤
    • 하세가와,고지와따나베,사또시하따께야마,준긴쇼,다께시다찌바나,세이이찌로
    • C07D307/00C07D307/94G03F7/039
    • G03F7/0392C07D307/00C08F220/24C08F220/28G03F7/0046G03F7/0395G03F7/0397Y10S430/108Y10S430/111
    • A lactone-containing compound is provided to be used as a useful monomer for producing a polymer for formulating a radiation-sensitive resist composition which has high transparency to radiation of up to 500 nm and exhibits good development properties. A polymer compound showing high resolution obtained from the lactone-containing compound is provided to inhibit dissolution in water and penetration of water when being used as a base resin of a radiation-sensitive resist composition, thereby being very effective for precise and fine processing as a resist material. The lactone-containing compound is represented by the formula(1), wherein A^1 is a polymerizable functional group having a carbon-to-carbon double bond, R^ is a straight, branched or cyclic monovalent C1-10 hydrocarbon group in which some or all hydrogen atoms on constituent carbons are substituted by fluorine atoms, and W is CH2, O or S. The polymer comprises recurring units derived from the lactone-containing compound. The resist composition comprises the polymer as a base resin. The method for forming a pattern comprises the steps of: (a) applying the resist composition into a substrate to form a coating; (b) heat-treating the coating; (c) exposing the coating to high-energy radiation or electron beam through a photomask, optionally heat-treating the exposed coating; and (d) developing it with a developer.
    • 提供含内酯化合物用作制备用于配制辐射敏感性抗蚀剂组合物的聚合物的有用单体,其对高达500nm的辐射具有高透明度并且显示出良好的显影性能。 提供从含内酯化合物获得的高分辨率的高分子化合物,用作在用作辐射敏感性抗蚀剂组合物的基础树脂时在水中溶解和渗透,因此对于作为 抗拒材料。 含有内酯的化合物由式(1)表示,其中A 1是具有碳 - 碳双键的可聚合官能团,R 1是直链,支链或环状的一价C 1-10烃基,其中 构成碳上的一些或全部氢原子被氟原子取代,W是CH 2,O或S.聚合物包含衍生自含内酯化合物的重复单元。 抗蚀剂组合物包含作为基础树脂的聚合物。 形成图案的方法包括以下步骤:(a)将抗蚀剂组合物施加到基底中以形成涂层; (b)对涂层进行热处理; (c)通过光掩模将涂层暴露于高能辐射或电子束,任选地热处理暴露的涂层; 和(d)与开发商一起开发。