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    • 95. 发明申请
    • SOLID STATE LIGHT EMITTING DEVICES BASED ON CRYSTALLOGRAPHICALLY RELAXED STRUCTURES
    • 基于晶体放大结构的固态发光器件
    • US20130214251A1
    • 2013-08-22
    • US13879824
    • 2011-10-20
    • Abraham Rudolf BalkenendeMarcus Antonius VerschuurenGeorge Immink
    • Abraham Rudolf BalkenendeMarcus Antonius VerschuurenGeorge Immink
    • H01L33/06
    • H01L33/24H01L21/0237H01L21/02458H01L21/0254H01L21/0262H01L21/02639H01L27/156H01L33/007H01L33/0075H01L33/04H01L33/06H01L33/08H01L33/12H01L33/32
    • The present invention discloses a method for manufacturing a solid state light emitting device having a plurality of light-sources, the method comprising the steps of: providing a substrate having a growth surface; providing a mask layer on the growth surface, the mask layer having a plurality of openings through which the growth surface is exposed, wherein a largest lateral dimension of each of said openings is less than 0.3 μm and wherein the mask layer may comprise a first mask layer portion and a second mask layer portion, having the same surface area and comprising a plurality of openings wherein the first mask layer portion exhibits a first ratio between an exposed area of the growth surface and an unexposed area of the growth surface, and wherein the second mask layer portion exhibits a second ratio between an exposed area of the growth surface and an unexposed area of said growth surface, the second ratio being different from the first ratio; growing a base structure on the growth surface in each of the openings of the mask layer; and growing at least one light-generating quantum well layer on the surface of each of the base structures.
    • 本发明公开了一种制造具有多个光源的固态发光器件的方法,该方法包括以下步骤:提供具有生长表面的衬底; 在所述生长表面上提供掩模层,所述掩模层具有多个开口,生长表面暴露在所述多个开口中,其中每个所述开口的最大横向尺寸小于0.3μm,并且其中所述掩模层可以包括第一掩模 层部分和第二掩模层部分,具有相同的表面积并且包括多个开口,其中第一掩模层部分在生长表面的暴露区域和生长表面的未曝光区域之间呈现第一比率,并且其中 第二掩模层部分在生长表面的曝光区域和所述生长表面的未曝光区域之间呈现第二比例,第二比例与第一比率不同; 在掩模层的每个开口中的生长表面上生长基底结构; 并且在每个基础结构的表面上生长至少一个发光量子阱层。