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    • 98. 发明申请
    • MEDIUM TRANSPORT APPARATUS
    • 中型运输工具
    • US20070216912A1
    • 2007-09-20
    • US11510665
    • 2006-08-28
    • Tatsuya Mihara
    • Tatsuya Mihara
    • G01N21/86G01B11/14G01V8/00
    • G11B15/6835G11B17/225
    • A belt-like pattern reading unit reads a belt-like pattern given to the media storage cell using an image unit provided in a hold unit. A deflection amount calculating unit measures a deviation from a reference position of a horizontal pattern borderline corresponding to a position of the hold unit on a arm unit based on the read belt-like pattern, calculates a deflection amount of the arm unit based on the measured deviation, and stores a correction value of a position corresponding to the deflection amount in a correction value storing unit. A servo control unit controls movement of the hold unit using the correction value.
    • 带状图案读取单元使用设置在保持单元中的图像单元来读取给予介质存储单元的带状图案。 挠度量计算单元基于读取的带状图案来测量与臂单元上的保持单元的位置对应的水平图案边界线的基准位置的偏差,基于测量到的测量值来计算臂单元的偏转量 并且将与偏转量相对应的位置的校正值存储在校正值存储单元中。 伺服控制单元使用校正值来控制保持单元的移动。
    • 99. 发明申请
    • Optical ranging sensor and warm water wash toilet seat
    • 光学测距传感器和温水洗马桶座
    • US20070210267A1
    • 2007-09-13
    • US11710986
    • 2007-02-27
    • Kentaroh IshiiIsamu OhkuboAkifumi Yamaguchi
    • Kentaroh IshiiIsamu OhkuboAkifumi Yamaguchi
    • G01N21/86G01V8/00
    • G01S17/48
    • A light receiving device 12 that receives reflected light condensed by a light receiving condenser means 14 has two first and second electrodes 15, 16 provided on a light receiving surface at prescribed intervals along a baseline that connects a light emitting device 11 with the light receiving device and a resistive region 21 provided between the two electrodes. An electric charge generated at the incident position of light incident on the light receiving surface of the light receiving device 12 becomes a photo current and outputted from the first and second electrodes 15, 16 via the resistive region 21. The resistance value of the resistive region 21 of the light receiving device 12 is distributed so as to be roughly inversely proportional to a distance from the optical axis of the light receiving condenser means 14 to the incident position of a light spot on the light receiving surface.
    • 接收由受光聚光器装置14会聚的反射光的光接收装置12具有沿着将发光装置11与光接收装置连接的基线以规定间隔设置在受光面上的两个第一和第二电极15,16 以及设置在两个电极之间的电阻区域21。 在入射到光接收装置12的光接收表面的光的入射位置处产生的电荷变成光电流,并且经由电阻区域21从第一和第二电极15,16输出。 光接收装置12的电阻区域21的电阻值被分布成与从光接收电容器14的光轴到光接收表面上的光点的入射位置大致成反比 。
    • 100. 发明授权
    • Method and apparatus for determining grid dimensions using scatterometry
    • 使用散射法确定网格尺寸的方法和装置
    • US07262864B1
    • 2007-08-28
    • US09897573
    • 2001-07-02
    • Richard J. MarkleKevin R. LensingJ. Broc StirtonMarilyn I. Wright
    • Richard J. MarkleKevin R. LensingJ. Broc StirtonMarilyn I. Wright
    • G01B11/14G01N21/86G01V8/00H01L21/00H01L21/66G01R31/26
    • G01B11/24G03F7/70625
    • A test structure includes a first plurality of lines and a second plurality of lines intersecting the first plurality of lines. The first and second pluralities of lines defining a grid having openings. A method for determining grid dimensions includes providing a wafer having a test structure comprising a plurality of intersecting lines that define a grid having openings; illuminating at least a portion of the grid with a light source; measuring light reflected from the illuminated portion of the grid to generate a reflection profile; and determining a dimension of the grid based on the reflection profile. A metrology tool is adapted to receive a wafer having a test structure comprising a plurality of intersecting lines that define a grid having openings. The metrology tool includes a light source, a detector, and a data processing unit. The light source is adapted to illuminate at least a portion of the grid. The detector is adapted to measure light reflected from the illuminated portion of the grid to generate a reflection profile. The data processing unit is adapted to determine a dimension of the grid based on the reflection profile.
    • 测试结构包括与第一组多行相交的第一多行和第二多行。 限定具有开口的网格的第一和第二多行线。 用于确定网格尺寸的方法包括提供具有测试结构的晶片,该测试结构包括限定具有开口的网格的多个相交线; 用光源照亮网格的至少一部分; 测量从所述格栅的被照亮部分反射的光以产生反射分布; 以及基于所述反射分布来确定所述网格的尺寸。 测量工具适于接收具有测试结构的晶片,该测试结构包括限定具有开口的格栅的多个相交线。 计量工具包括光源,检测器和数据处理单元。 光源适于照亮网格的至少一部分。 检测器适于测量从栅格的照明部分反射的光以产生反射分布。 数据处理单元适于基于反射分布来确定网格的尺寸。