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1. 发明授权

US08270702B2 Wafer center finding with a Kalman filter 有权
标题翻译：用卡尔曼滤波器的晶圆中心发现
公开(公告)号：US08270702B2
公开(公告)日：2012-09-18
申请号：US12875462
申请日：2010-09-03
申请人： Christopher C Kiley , Peter van der Meulen , Forrest T Buzan , Paul E. Fogel
发明人： Christopher C Kiley , Peter van der Meulen , Forrest T Buzan , Paul E. Fogel
IPC分类号： G06K9/00 , G06K9/40
CPC分类号： H01L21/67265 , B65G25/02 , B65G37/00 , H01L21/67161 , H01L21/67196 , H01L21/67742 , H01L21/67745 , H01L21/67748 , H01L21/68792 , Y10S414/129 , Y10S414/136
摘要： A device is provided having a robotic arm for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm. The device also having a processor adapted to apply an extended Kalman Filter to the encoder data to estimate a position of the wafer.
摘要翻译：提供一种具有用于处理晶片的机器人手臂的装置，所述机器人臂包括一个或多个编码器，所述编码器提供识别所述机器人臂的一个或多个部件的位置的编码器数据。该装置还具有适于将扩展卡尔曼滤波器应用于编码器数据以估计晶片的位置的处理器。

2. 发明申请

US20110093237A1 WAFER CENTER FINDING WITH CHARGE-COUPLED DEVICES 有权
标题翻译：使用充电耦合设备的WAFER CENTER发现
公开(公告)号：US20110093237A1
公开(公告)日：2011-04-21
申请号：US12977514
申请日：2010-12-23
申请人： Christopher C. Kiley , Peter van der Meulen , Forrest T. Buzan , Paul E. Fogel
发明人： Christopher C. Kiley , Peter van der Meulen , Forrest T. Buzan , Paul E. Fogel
IPC分类号： G06F15/00 , G01B11/14 , H04N5/228
CPC分类号： H01L21/67265 , B65G25/02 , B65G37/00 , H01L21/67161 , H01L21/67196 , H01L21/67742 , H01L21/67745 , H01L21/67748 , H01L21/68792 , Y10S414/129 , Y10S414/136
摘要： A device for handling a substantially circular wafer is provided. The device includes an interior accessible through a plurality of entrances, and a plurality of sensors consisting of two sensors for each one of the plurality of entrances, each sensor capable of detecting a presence of the substantially circular wafer, at a predetermined location within the interior, wherein the plurality of sensors are arranged so that at least two of the plurality of sensors detect the wafer for any position of the wafer entirely within the interior, wherein a first one of the two sensors is positioned to detect the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances, and a second one of the two sensors is positioned immediately outside a diameter of the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances.
摘要翻译：提供了一种用于处理基本圆形晶片的装置。该装置包括可通过多个入口访问的内部，以及由多个入口中的每一个入口的两个传感器组成的多个传感器，每个传感器能够在内部的预定位置处检测基本圆形的晶片的存在，其中所述多个传感器被布置成使得所述多个传感器中的至少两个传感器在所述内部中完全检测所述晶片的任何位置的晶片，其中所述两个传感器中的第一传感器定位成当所述晶片具有通过多个入口中的一个完全通过内部，并且当晶片已经通过多个入口之一完全通过内部时，两个传感器中的第二个位于晶片直径的正上方。

3. 发明授权

US07792350B2 Wafer center finding 有权
标题翻译：晶圆中心查找
公开(公告)号：US07792350B2
公开(公告)日：2010-09-07
申请号：US11682306
申请日：2007-03-05
申请人： Chris Kiley , Peter van der Meulen , Forest Buzan , Paul E. Fogel
发明人： Chris Kiley , Peter van der Meulen , Forest Buzan , Paul E. Fogel
IPC分类号： G06K9/00 , G06K9/36
CPC分类号： H01L21/67265 , B65G25/02 , B65G37/00 , H01L21/67161 , H01L21/67196 , H01L21/67742 , H01L21/67745 , H01L21/67748 , H01L21/68792 , Y10S414/129 , Y10S414/136
摘要： A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.
摘要翻译：本文公开了一些改进在半导体制造中使用的现有技术的晶片中心发现方法和系统。

4. 发明申请

US20080231866A1 WAFER CENTER FINDING WITH CHARGE-COUPLED DEVICES 有权
标题翻译：使用充电耦合设备的WAFER CENTER发现
公开(公告)号：US20080231866A1
公开(公告)日：2008-09-25
申请号：US12032489
申请日：2008-02-15
申请人： Paul E. Fogel
发明人： Paul E. Fogel
IPC分类号： H01L21/68
CPC分类号： H01L21/67265 , B65G25/02 , B65G37/00 , H01L21/67161 , H01L21/67196 , H01L21/67742 , H01L21/67745 , H01L21/67748 , H01L21/68792 , Y10S414/129 , Y10S414/136
摘要： A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.
摘要翻译：本文公开了一些改进在半导体制造中使用的现有技术的晶片中心发现方法和系统。

5. 发明授权

US08634633B2 Wafer center finding with kalman filter 有权
标题翻译：晶圆中心发现与卡尔曼滤波器
公开(公告)号：US08634633B2
公开(公告)日：2014-01-21
申请号：US13617333
申请日：2012-09-14
申请人： Christopher C Kiley , Peter van der Meulen , Forrest T Buzan , Paul E. Fogel
发明人： Christopher C Kiley , Peter van der Meulen , Forrest T Buzan , Paul E. Fogel
IPC分类号： G06K9/00
CPC分类号： H01L21/681 , B65G25/02 , B65G37/00 , G05B19/02 , H01L21/67259 , H01L21/67742 , H01L21/67748 , H01L21/68 , Y10S901/09 , Y10S901/47
摘要： A device is provided having a robotic arm for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm. The device also having a processor adapted to apply an extended Kalman Filter to the encoder data to estimate a position of the wafer.
摘要翻译：提供一种具有用于处理晶片的机器人手臂的装置，所述机器人臂包括一个或多个编码器，所述编码器提供识别所述机器人臂的一个或多个部件的位置的编码器数据。该装置还具有适于将扩展卡尔曼滤波器应用于编码器数据以估计晶片的位置的处理器。

6. 发明申请

US20130085595A1 WAFER CENTER FINDING WITH KALMAN FILTER 有权
标题翻译：用KALMAN过滤器找到WAFER CENTER
公开(公告)号：US20130085595A1
公开(公告)日：2013-04-04
申请号：US13617333
申请日：2012-09-14
申请人： Christopher C. Kiley , Peter van der Meulen , Forrest T. Buzan , Paul E. Fogel
发明人： Christopher C. Kiley , Peter van der Meulen , Forrest T. Buzan , Paul E. Fogel
IPC分类号： H01L21/68 , G05B19/02
CPC分类号： H01L21/681 , B65G25/02 , B65G37/00 , G05B19/02 , H01L21/67259 , H01L21/67742 , H01L21/67748 , H01L21/68 , Y10S901/09 , Y10S901/47
摘要： A device is provided having a robotic arm for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm. The device also having a processor adapted to apply an extended Kalman Filter to the encoder data to estimate a position of the wafer.
摘要翻译：提供一种具有用于处理晶片的机器人手臂的装置，所述机器人臂包括一个或多个编码器，所述编码器提供识别所述机器人臂的一个或多个部件的位置的编码器数据。该装置还具有适于将扩展卡尔曼滤波器应用于编码器数据以估计晶片的位置的处理器。

7. 发明申请

US20120154822A1 WAFER CENTER FINDING WITH CHARGE-COUPLED DEVICES 有权
标题翻译：使用充电耦合设备的WAFER CENTER发现
公开(公告)号：US20120154822A1
公开(公告)日：2012-06-21
申请号：US13406252
申请日：2012-02-27
申请人： Christopher C. Kiley , Peter van der Meulen , Forrest T. Buzan , Paul E. Fogel
发明人： Christopher C. Kiley , Peter van der Meulen , Forrest T. Buzan , Paul E. Fogel
IPC分类号： G01B11/14
CPC分类号： B65G25/02 , B65G37/00 , H01L21/67161 , H01L21/67196 , H01L21/67742 , H01L21/67745 , H01L21/67748 , H01L21/68792 , Y10S414/139
摘要： A device for handling a substantially circular wafer is provided. The device includes an interior accessible through a plurality of entrances, and a plurality of sensors consisting of two sensors for each one of the plurality of entrances, each sensor capable of detecting a presence of the substantially circular wafer, at a predetermined location within the interior, wherein the plurality of sensors are arranged so that at least two of the plurality of sensors detect the wafer for any position of the wafer entirely within the interior, wherein a first one of the two sensors is positioned to detect the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances, and a second one of the two sensors is positioned immediately outside a diameter of the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances.
摘要翻译：提供了一种用于处理基本圆形晶片的装置。该装置包括可通过多个入口访问的内部，以及由多个入口中的每一个入口的两个传感器组成的多个传感器，每个传感器能够在内部的预定位置处检测基本圆形的晶片的存在，其中所述多个传感器被布置成使得所述多个传感器中的至少两个传感器在所述内部中完全检测所述晶片的任何位置的晶片，其中所述两个传感器中的第一传感器定位成当所述晶片具有通过多个入口中的一个完全通过内部，并且当晶片已经通过多个入口之一完全通过内部时，两个传感器中的第二个位于晶片直径的正上方。

8. 发明授权

US07859685B2 Wafer center finding with charge-coupled devices 有权
标题翻译：晶圆中心寻找与电荷耦合器件
公开(公告)号：US07859685B2
公开(公告)日：2010-12-28
申请号：US12032489
申请日：2008-02-15
申请人： Paul E. Fogel
发明人： Paul E. Fogel
IPC分类号： G01B11/14
CPC分类号： H01L21/67265 , B65G25/02 , B65G37/00 , H01L21/67161 , H01L21/67196 , H01L21/67742 , H01L21/67745 , H01L21/67748 , H01L21/68792 , Y10S414/129 , Y10S414/136
摘要： A device having a robotic arm within a robot chamber. The robotic arm includes an end effector adapted to handle a wafer. A linear array of charge-coupled devices are provided within the interior of the robot chamber, the linear array positioned to acquire image data from a measurement volume in one or more predetermined locations within the robot chamber.
摘要翻译：一种在机器人腔室内具有机器臂的装置。机器臂包括适于处理晶片的端部执行器。电子耦合器件的线性阵列设置在机器人腔室的内部，线性阵列被定位成从机器人腔室内的一个或多个预定位置的测量体积获取图像数据。

9. 发明申请

US20090095886A1 WAFER PRESENCE DETECTION 有权
标题翻译：波形存在检测
公开(公告)号：US20090095886A1
公开(公告)日：2009-04-16
申请号：US12195095
申请日：2008-08-20
申请人： Peter van der Meulen , Paul E. Fogel
发明人： Peter van der Meulen , Paul E. Fogel
IPC分类号： H01J40/14 , B25J15/06
CPC分类号： H01L21/67265
摘要： The presence of a workpiece on an end effector of a vacuum robotic handler is detecting using any of a number of non-contact techniques in which some or all of the detection hardware is positioned outside a vacuum chamber that encloses the vacuum robotic handler. Various deployments include laser beam breaking, analysis of radar reflection signals, or analysis of radio frequency identification tag signatures. By providing non-physical couplings between hardware inside and outside of a vacuum environment, integrity of the vacuum is improved. These non-contact techniques are further adapted as described herein to multi-wafer and multi-end effector environments so that independent detection of multiple wafers (e.g., for each end effector) can be performed.
摘要翻译：在真空机器人处理器的末端执行器上存在工件是使用许多非接触技术中的任何一种来检测的，其中一些或全部检测硬件位于包围真空机器人处理器的真空室外部。各种部署包括激光束破碎，雷达反射信号分析或射频识别标签签名分析。通过在真空环境内部和外部的硬件之间提供非物理耦合，提高了真空的完整性。这些非接触技术如本文所述进一步适应于多晶片和多端效应器环境，使得可以执行多个晶片（例如，对于每个末端执行器）的独立检测。

10. 发明申请

US20080135788A1 WAFER CENTER FINDING WITH CONTACT IMAGE SENSORS 审中-公开
标题翻译：寻找与接触式图像传感器的WAFER CENTER
公开(公告)号：US20080135788A1
公开(公告)日：2008-06-12
申请号：US12032463
申请日：2008-02-15
申请人： Paul E. Fogel
发明人： Paul E. Fogel
IPC分类号： G01V8/00
CPC分类号： H01L21/681
摘要： A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.
摘要翻译：本文公开了一些改进在半导体制造中使用的现有技术的晶片中心发现方法和系统。

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