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    • 20. 发明授权
    • Fourier transform infrared spectrometer
    • US11009454B2
    • 2021-05-18
    • US16693494
    • 2019-11-25
    • Shimadzu Corporation
    • Shinya Wakuda
    • G01N21/27G01N21/25G01N21/359G01N21/35
    • In an FTIR 1, a beam splitter 12, fixed mirror 13 and movable mirror 14 are shared by a main interferometer 10 including a multiwavelength infrared light source 11 and a control interferometer 20 including a semiconductor laser 21. A first detector 16 detects infrared interference light generated by the main interferometer 10 and transmitted through or reflected by a sample. A second detector 26 detects monochromatic interference light generated by the control interferometer 20. A spectrum creator 32 determines an optical path difference between an optical path via the fixed mirror 13 and an optical path via the movable mirror 14, based on the intensity and uncalibrated oscillation wavelength of the monochromatic interference light detected by the second detector 26, and creates a spectrum by performing fast Fourier transform on an interferogram which shows a distribution of the intensity of the infrared interference light detected by the first detector 16 with respect to the optical path difference. An oscillation wavelength calibrator 34 locates an absorption peak of carbon dioxide from the peaks in the spectrum created by the spectrum creator 32, and compares a wavenumber or wavelength of the absorption peak with a true absorption wavenumber or wavelength of carbon dioxide to determine a calibrated oscillation wavelength of the semiconductor laser 21.