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11. 发明申请

US20090220835A1 Platinum and Platinum Based Alloy Nanotubes as Electrocatalysts for Fuel Cells 有权
标题翻译：铂和铂基合金纳米管作为燃料电池的电催化剂
公开(公告)号：US20090220835A1
公开(公告)日：2009-09-03
申请号：US12224197
申请日：2007-02-24
申请人： Yan Yushan , Zhongwei Chen
发明人： Yan Yushan , Zhongwei Chen
IPC分类号： H01M8/10 , H01M4/88
CPC分类号： H01M4/92 , C22C5/04 , H01M4/8814 , H01M4/921 , H01M4/928 , H01M2008/1095 , Y02E60/50 , Y02E60/523
摘要： Electrocatalyst durability has been recently recognized as one of the most important issues that have to be addressed before the commercialization of the proton exchange membrane fuel cells (PEMFCs). The present invention is directed to a new class of cathode catalysts based on supportless platinum nanotubes (PtNTs) and platinum alloy nanotubes, for example, platinum-palladium nanotubes (PtPdNTs), that have remarkable durability and high catalytic activity. Due to their unique combination of dimensions at multiple length scales, the platinum nanotubes of the present invention can provide high platinum surface area due to their nanometer-sized wall thickness, and have the potential to eliminate or alleviate most of the degradation pathways of the commercial carbon supported platinum catalyst (Pt/C) and unsupported platinum-black (PtB) as a result of their micrometer-sized length. The platinum nanotube catalysts of the present invention asymptotically approach a maximum of about twenty percent platinum surface area loss in durability test, while the commercial PtB and Pt/C catalysts lose about fifty-one percent and ninety percent of their initial surface area, respectively. Moreover, the PtNT and PtPdNT catalysts of the present invention show higher mass activity and much higher specific activity than commercial Pt/C and PtB catalysts.
摘要翻译：电催化剂耐久性最近被认为是在质子交换膜燃料电池（PEMFC）商业化之前必须解决的最重要的问题之一。本发明涉及一类新型的基于无支撑铂纳米管（PtNTs）和铂合金纳米管（例如铂 - 钯纳米管（PtPdNTs））的阴极催化剂，其具有显着的耐久性和高催化活性。由于它们在多个长度尺度上的独特的尺寸组合，本发明的铂纳米管由于其纳米尺寸的壁厚可以提供高的铂表面积，并且具有消除或减轻商业的大部分降解途径的潜力碳负载的铂催化剂（Pt / C）和无支撑的铂黑（PtB），由于其微米尺寸的长度。本发明的铂纳米管催化剂在耐久性试验中渐近地接近约百分之二十的铂表面积损失，而商业PtB和Pt / C催化剂分别损失其初始表面积的百分之五十一和百分之九十。此外，本发明的PtNT和PtPdNT催化剂显示比商业Pt / C和PtB催化剂更高的质量活性和更高的比活性。

12. 发明授权

US06815345B2 Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing 失效
标题翻译：基于半导体晶片制造中的测试结构的通孔/接触孔蚀刻工艺的在线监测方法
公开(公告)号：US06815345B2
公开(公告)日：2004-11-09
申请号：US10302809
申请日：2002-11-21
申请人： Yan Zhao , Chang-Chun (Roland) Yeh , Zhongwei Chen , Jack Jau
发明人： Yan Zhao , Chang-Chun (Roland) Yeh , Zhongwei Chen , Jack Jau
IPC分类号： H01L2144
CPC分类号： H01L22/34 , H01L21/76802 , H01L22/24
摘要： A method for in-line monitoring of via/contact etching process based on a test structure is described. The test structure is comprised of via/contact holes of different sizes and densities in a layout such that, for a certain process, the microloading or RIE lag induced non-uniform etch rate produce under-etch in some regions and over-etch in others. A scanning electron microscope is used to distinguish these etching differences in voltage contrast images. Image processing and simple calibration convert these voltage contrast images into a “fingerprint” image characterizing the etching process in terms of thickness over-etched or under-etched. Tolerance of shifting or deformation of this image can be set for validating the process uniformity. This image can also be used as a measure to monitor long-term process parameter shifting, as well as wafer-to-wafer or lot-to-lot variations. Advanced process control (APC) can be performed in-line with the guidance of this image so that potential electrical defects are avoided and process yield ramp accelerated.
摘要翻译：描述了一种基于测试结构进行通孔/接触蚀刻工艺在线监测的方法。测试结构由布局不同尺寸和密度的通孔/接触孔组成，使得对于某些工艺，微加载或RIE滞后引起的不均匀蚀刻速率在一些区域产生蚀刻不良并且在其它区域中过度蚀刻。使用扫描电子显微镜来区分电压对比图像中的这些蚀刻差异。图像处理和简单校准将这些电压对比图像转换成表征蚀刻工艺的“指纹”图像，就厚度过蚀刻或欠蚀刻而言。该图像的偏移或变形的公差可以设置为验证过程的均匀性。该图像也可用作监视长期过程参数移位以及晶圆到晶圆或批次间变化的度量。先进的过程控制（APC）可以与该图像的引导一起进行，以便避免潜在的电气缺陷，加速产出斜率。

13. 发明授权

US11593938B2 Rapid and automatic virus imaging and analysis system as well as methods thereof 有权
公开(公告)号：US11593938B2
公开(公告)日：2023-02-28
申请号：US17452999
申请日：2021-10-31
申请人： Zhongwei Chen , Xiaoming Chen , Daniel Tang , Liang-Fu Fan
发明人： Zhongwei Chen , Xiaoming Chen , Daniel Tang , Liang-Fu Fan
IPC分类号： G06T7/00 , G06T7/50 , H01J37/28
摘要： A rapid and automatic virus imaging and analysis system includes (i) electron optical sub-systems (EOSs), each of which has a large field of view (FOV) and is capable of instant magnification switching for rapidly scanning a virus sample; (ii) sample management sub-systems (SMSs), each of which automatically loads virus samples into one of the EOSs for virus sample scanning and then unloads the virus samples from the EOS after the virus sample scanning is completed; (iii) virus detection and classification sub-systems (VDCSs), each of which automatically detects and classifies a virus based on images from the EOS virus sample scanning; and (iv) a cloud-based collaboration sub-system for analyzing the virus sample scanning images, storing images from the EOS virus sample scanning, and storing and analyzing machine data associated with the EOSs, the SMSs, and the VDCSs.

14. 发明授权

US11569059B2 Apparatus of charged-particle beam such as electron microscope comprising plasma generator, and method thereof 有权
公开(公告)号：US11569059B2
公开(公告)日：2023-01-31
申请号：US17644789
申请日：2021-12-17
申请人： Zhongwei Chen , Xiaoming Chen , Daniel Tang , Liang-Fu Fan
发明人： Zhongwei Chen , Xiaoming Chen , Daniel Tang , Liang-Fu Fan
IPC分类号： H01J37/26 , B08B7/00 , H01J37/244
摘要： The present invention provides an apparatus of charged-particle beam e.g. an electron microscope comprising an in-column plasma generator for selectively cleaning BSE detector and BF/DF detector. The plasma generator is located between a lower pole piece of objective lens and the BF/DF detectors, but outside trajectory area of the charged-particles from the sample stage to the BF/DF detector.

15. 发明授权

US11355312B2 Stage driving system and apparatus or device such as apparatus of charged-particle beam comprising the same 有权
公开(公告)号：US11355312B2
公开(公告)日：2022-06-07
申请号：US17444192
申请日：2021-08-01
申请人： Zhongwei Chen , Xiaoming Chen , Daniel Tang , Liang-Fu Fan
发明人： Zhongwei Chen , Xiaoming Chen , Daniel Tang , Liang-Fu Fan
IPC分类号： H01J37/28 , H01J37/20 , H01J37/317 , H01J37/141
摘要： The present invention provides a driving system comprising two actuators for moving a stage through two elastic connectors; and a general apparatus/device comprising such a driving system, such as a machine tool, an analytical instrument, an optical microscope, and an apparatus of charged-particle beam such as electron microscope and an electron beam lithographical apparatus. When used in an electron microscope, the stage can be used as a specimen stage or a plate having apertures for electron beam to pass through. The novel stage driving system exhibits numerous technical merits such as simpler structure, better manufacturability, improved cost-effectiveness, and higher reliability, among others.

16. 发明申请

US20220108867A1 DIGITAL DETECTOR, APPARATUS OF CHARGED-PARTICLE BEAM SUCH AS ELECTRON MICROSCOPE COMPRISING THE SAME, AND METHOD THEREOF 有权
公开(公告)号：US20220108867A1
公开(公告)日：2022-04-07
申请号：US17305514
申请日：2021-07-08
申请人： Zhongwei Chen , Xiaoming Chen , Daniel Tang , Liang-Fu Fan
发明人： Zhongwei Chen , Xiaoming Chen , Daniel Tang , Liang-Fu Fan
IPC分类号： H01J37/244 , H01J37/28 , H01J37/22
摘要： The present invention provides a digital high-resolution detector for detecting X-ray, UV light or charged particles. In various embodiments, the digital detector comprises an array of CMOS or CCD pixels and a layer of conversion material on top of the array designed for converting incident X-ray, UV light or charged particles into photons for CMOS or CCD sensors to capture. The thin and high-resolution detector of the invention is particularly useful for monitoring and aligning beams in, and optimizing system performance of, an apparatus of charged-particle beam e.g. an electron microscope.

17. 发明申请

US20180048041A1 Tri-Electrode Zinc-Air Battery with Flowing Electrolyte 审中-公开
公开(公告)号：US20180048041A1
公开(公告)日：2018-02-15
申请号：US15555668
申请日：2016-03-04
申请人： Zhongwei CHEN , Hao LIU
发明人： Zhongwei CHEN , Hao LIU
IPC分类号： H01M12/02 , H01M4/38 , H01M12/08
CPC分类号： H01M12/02 , H01M4/38 , H01M4/8657 , H01M4/9041 , H01M8/083 , H01M8/186 , H01M8/225 , H01M12/065 , H01M12/08 , H01M2004/027 , H01M2004/8684 , H01M2004/8689 , Y02E60/128
摘要： A rechargeable tri-electrode single flow zinc air battery which is capable of providing theoretically unlimited cycle life is provided. The tri-electrode configuration consists of one anode and two cathodes, one for charging and another for discharging. The charge cathode may comprise a water-permeable metal mesh and/or metal foam, which avoids carbon corrosion. The discharge cathode is a catalytic oxygen reduction electrode. The anode comprises an inert, conductive electrode allowing for zinc deposition during battery charging, and zinc dissolving during battery discharging. The flowing electrolyte removes zinc ions from the anode preventing or minimizing the formation of zinc oxides during discharging, and clean the anode after each full discharge.

18. 发明授权

US09590253B2 Core-shell structured bifunctional catalysts for metal air battery/fuel cell 有权
标题翻译：用于金属空气电池/燃料电池的核壳结构双功能催化剂
公开(公告)号：US09590253B2
公开(公告)日：2017-03-07
申请号：US13941139
申请日：2013-07-12
申请人： Zhongwei Chen , Zhu Chen
发明人： Zhongwei Chen , Zhu Chen
IPC分类号： H01M4/90 , H01M4/86 , H01M4/96 , H01M12/06
CPC分类号： H01M4/9016 , H01M4/8615 , H01M4/96 , H01M12/06 , Y02E60/50
摘要： The present invention relates to a bifunctional catalyst for use with air metal batteries and fuel cell. The bifunctional catalyst comprising a core and a shell, where the core comprises a metal oxide and the shell comprises a carbon nanostructure. In a further aspect the bifunctional catalyst is catalytically active for oxygen reduction and oxygen evolution reactions.
摘要翻译：本发明涉及一种用于空气金属电池和燃料电池的双功能催化剂。包含核和壳的双功能催化剂，其中芯包含金属氧化物，壳包含碳纳米结构。在另一方面，双功能催化剂对氧还原和析氧反应具有催化活性。

19. 发明授权

US09581245B2 Metal seal for ultra high vacuum system 有权
标题翻译：超高真空系统金属密封
公开(公告)号：US09581245B2
公开(公告)日：2017-02-28
申请号：US13437107
申请日：2012-04-02
申请人： Qingpo Xi , Tao Li , Feng Cao , Fumin He , Zhongwei Chen
发明人： Qingpo Xi , Tao Li , Feng Cao , Fumin He , Zhongwei Chen
IPC分类号： F16L23/20 , F16J15/08
CPC分类号： F16J15/0881 , F16L23/20
摘要： A metal seal flange assembly for a vacuum system is presented. Its metal gasket has a crossectional shape that is an irregular hexagon with two acute angles between the longest side and the second- and third-longest sides, respectively. The longest side of the irregular hexagon is the vertical inner wall of the metal gasket. This design can reduce the normal force required to seal the metal seal flange assembly and reduce the number of bolts needed, enabling use in a limited working space.
摘要翻译：提出了一种用于真空系统的金属密封法兰组件。其金属垫片的横截面形状是不规则六边形，分别在最长侧和第二和第三最长边之间具有两个锐角。不规则六边形的最长边是金属垫片的垂直内壁。这种设计可以减少密封金属密封凸缘组件所需的法向力，并减少所需的螺栓数量，从而在有限的工作空间中使用。

20. 发明申请

US20150349325A1 BI-FUNCTIONAL ELECTRODE FOR METAL-AIR BATTERIES AND METHOD FOR PRODUCING SAME 审中-公开
标题翻译：用于金属气体电池的双功能电极及其制造方法
公开(公告)号：US20150349325A1
公开(公告)日：2015-12-03
申请号：US14654256
申请日：2013-12-20
申请人： Zhongwei CHEN , Dong Un LEE , Woong Hey PARK , Kun FENG
发明人： Zhongwei Chen , Dong Un Lee , Hey Woong Park , Kun Feng
IPC分类号： H01M4/04 , H01M4/86 , H01M12/08 , H01M4/88
CPC分类号： H01M4/0497 , C30B7/14 , C30B29/16 , C30B29/60 , H01M4/0471 , H01M4/8615 , H01M4/88 , H01M4/8803 , H01M4/8825 , H01M4/9016 , H01M12/08
摘要： A method of producing a bi-functional electrode for a metal-air battery or fuel cell comprises growing metal oxide nanowires directly on a metal support using a chemical deposition process. Preferably, the chemical process comprises an ammonium evaporation process. The metal support is preferably a porous metal structure, such as a metal mesh or foam. The metal oxide nanowires are formed of any transition metal or mixed transition metal. Preferably, the nanowires comprise cobalt oxide nanowires.
摘要翻译：制造金属 - 空气电池或燃料电池用双功能电极的方法包括使用化学沉积工艺在金属载体上直接生长金属氧化物纳米线。优选地，化学方法包括铵蒸发方法。金属载体优选为多孔金属结构，例如金属网或泡沫。金属氧化物纳米线由任何过渡金属或混合过渡金属形成。优选地，纳米线包括氧化钴纳米线。

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