专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20220108865A1 APPARATUS OF CHARGED-PARTICLE BEAM SUCH AS ELECTRON MICROSCOPE COMPRISING CO-CONDENSERS FOR CONTINUOUS IMAGE RESOLUTION TUNING 有权
公开(公告)号：US20220108865A1
公开(公告)日：2022-04-07
申请号：US17302031
申请日：2021-04-21
申请人： Zhongwei Chen , Xiaoming Chen , Daniel Tang , Liang-Fu Fan
发明人： Zhongwei Chen , Xiaoming Chen , Daniel Tang , Liang-Fu Fan
IPC分类号： H01J37/141 , H01J37/147 , H01J37/20 , H01J37/28
摘要： The present invention provides an apparatus of charged-particle beam such as an electron microscope with co-condensers. A source of charged particles is configured to emit a beam of charged particles, and the co-condensers including two or more magnetic condensers are configured to coherently focus the beam to a single crossover spot. The invention exhibits numerous technical merits such as continuous image resolution tuning, and automatic switching between multiple resolutions, among others.

2. 发明授权

US11295927B1 Apparatus of charged-particle beam such as electron microscope comprising co-condensers for continuous image resolution tuning 有权
公开(公告)号：US11295927B1
公开(公告)日：2022-04-05
申请号：US17302031
申请日：2021-04-21
申请人： Zhongwei Chen , Xiaoming Chen , Daniel Tang , Liang-Fu Fan
发明人： Zhongwei Chen , Xiaoming Chen , Daniel Tang , Liang-Fu Fan
IPC分类号： H01J37/141 , H01J37/147 , H01J37/28 , H01J37/20
摘要： The present invention provides an apparatus of charged-particle beam such as an electron microscope with co-condensers. A source of charged particles is configured to emit a beam of charged particles, and the co-condensers including two or more magnetic condensers are configured to coherently focus the beam to a single crossover spot. The invention exhibits numerous technical merits such as continuous image resolution tuning, and automatic switching between multiple resolutions, among others.

3. 发明申请

US20150376013A1 METHOD FOR PRODUCING FEW-LAYER GRAPHENE 审中-公开
标题翻译：生产薄层石墨的方法
公开(公告)号：US20150376013A1
公开(公告)日：2015-12-31
申请号：US14654215
申请日：2013-12-20
申请人： Aiping YU , Victor CHABOT , Zhongwei CHEN
发明人： Aiping Yu , Victor Chabot , Zhongwei Chen
IPC分类号： C01B31/04
CPC分类号： C01B31/0469 , C01B32/19 , C01B2204/02 , C01B2204/04
摘要： A method of producing single or few-layer graphene comprises exfoliating graphite with a polymer to form a graphene-polymer composite and subsequently treating the composite to disassociate graphene. The exfoliation process is conducted using sonication. The graphene is disassociated from the polymer by a treatment step such as acid hydrolysis. The method results in highly pure graphene.
摘要翻译：生产单层或几层石墨烯的方法包括用聚合物去除石墨以形成石墨烯 - 聚合物复合材料，随后处理复合材料以分离石墨烯。剥离过程使用超声处理进行。石墨烯通过诸如酸水解的处理步骤与聚合物分离。该方法产生高纯度石墨烯。

4. 发明授权

US09214680B2 Platinum and platinum based alloy nanotubes as electrocatalysts for fuel cells 有权
标题翻译：铂和铂基合金纳米管作为燃料电池的电催化剂
公开(公告)号：US09214680B2
公开(公告)日：2015-12-15
申请号：US12224197
申请日：2007-02-24
申请人： Yan Yushan , Zhongwei Chen
发明人： Yan Yushan , Zhongwei Chen
IPC分类号： B01J23/56 , H01M4/92 , C22C5/04 , H01M4/88 , H01M8/10
CPC分类号： H01M4/92 , C22C5/04 , H01M4/8814 , H01M4/921 , H01M4/928 , H01M2008/1095 , Y02E60/50 , Y02E60/523
摘要： Electrocatalyst durability has been recently recognized as one of the most important issues that have to be addressed before the commercialization of the proton exchange membrane fuel cells (PEMFCs). The present invention is directed to a new class of cathode catalysts based on supportless platinum nanotubes (PtNTs) and platinum alloy nanotubes, for example, platinum-palladium nanotubes (PtPdNTs), that have remarkable durability and high catalytic activity. Due to their unique combination of dimensions at multiple length scales, the platinum nanotubes of the present invention can provide high platinum surface area due to their nanometer-sized wall thickness, and have the potential to eliminate or alleviate most of the degradation pathways of the commercial carbon supported platinum catalyst (Pt/C) and unsupported platinum-black (PtB) as a result of their micrometer-sized length. The platinum nanotube catalysts of the present invention asymptotically approach a maximum of about twenty percent platinum surface area loss in durability test, while the commercial PtB and Pt/C catalysts lose about fifty-one percent and ninety percent of their initial surface area, respectively. Moreover, the PtNT and PtPdNT catalysts of the present invention show higher mass activity and much higher specific activity than commercial Pt/C and PtB catalysts.
摘要翻译：电催化剂耐久性最近被认为是在质子交换膜燃料电池（PEMFC）商业化之前必须解决的最重要的问题之一。本发明涉及一类新型的基于无支撑铂纳米管（PtNTs）和铂合金纳米管（例如铂 - 钯纳米管（PtPdNTs））的阴极催化剂，其具有显着的耐久性和高催化活性。由于它们在多个长度尺度上的独特的尺寸组合，本发明的铂纳米管由于其纳米尺寸的壁厚可以提供高的铂表面积，并且具有消除或减轻商业的大部分降解途径的潜力碳负载的铂催化剂（Pt / C）和无支撑的铂黑（PtB），由于其微米尺寸的长度。本发明的铂纳米管催化剂在耐久性试验中渐近地接近约百分之二十的铂表面积损失，而商业PtB和Pt / C催化剂分别损失其初始表面积的百分之五十一和百分之九十。此外，本发明的PtNT和PtPdNT催化剂显示比商业Pt / C和PtB催化剂更高的质量活性和更高的比活性。

5. 发明授权

US08624186B2 Movable detector for charged particle beam inspection or review 有权
标题翻译：用于带电粒子束检测或检查的可移动检测器
公开(公告)号：US08624186B2
公开(公告)日：2014-01-07
申请号：US12787139
申请日：2010-05-25
申请人： Yi-Xiang Wang , Joe Wang , Xuedong Liu , Zhongwei Chen
发明人： Yi-Xiang Wang , Joe Wang , Xuedong Liu , Zhongwei Chen
IPC分类号： H01J37/244
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/024 , H01J2237/24465 , H01J2237/24475 , H01J2237/2448 , H01J2237/24495 , H01J2237/2611 , H01J2237/2817
摘要： The present invention generally relates to a detection unit of a charged particle imaging system. More particularly, portion of the detection unit can move into or out of the detection system as imaging condition required. With the assistance of a Wein filter (also known as an E×B charged particle analyzer) and a movable detector design, the present invention provides a stereo imaging system that suitable for both low current, high resolution mode and high current, high throughput mode. Merely by way of example, the invention has been applied to a scanning electron beam inspection system. But it would be recognized that the invention could apply to other system using charged particle beam as an observation tool.
摘要翻译：本发明一般涉及带电粒子成像系统的检测单元。更具体地，检测单元的一部分可以作为所需的成像条件移入或移出检测系统。在Wein滤波器（也称为E×B带电粒子分析仪）和可移动检测器设计的帮助下，本发明提供了一种适用于低电流，高分辨率模式和高电流，高通量模式的立体成像系统。仅作为示例，本发明已经应用于扫描电子束检查系统。但是应当认识到，本发明可以应用于使用带电粒子束作为观测工具的其它系统。

6. 发明申请

US20130164652A1 CARBON BASED ELECTROCATALYSTS FOR FUEL CELLS 审中-公开
标题翻译：用于燃料电池的基于碳的电解质
公开(公告)号：US20130164652A1
公开(公告)日：2013-06-27
申请号：US13478901
申请日：2012-05-23
申请人： Yushan Yan , Xin Wang , Wenzhen Li , Mahesh Waje , Zhongwei Chen , William Goddard , Wei-Qiao Deng
发明人： Yushan Yan , Xin Wang , Wenzhen Li , Mahesh Waje , Zhongwei Chen , William Goddard , Wei-Qiao Deng
IPC分类号： H01M8/10
CPC分类号： H01M4/881 , H01M4/8605 , H01M4/92 , H01M4/926 , H01M8/1004 , H01M8/1011 , Y02E60/523
摘要： Novel proton exchange membrane fuel cells and direct methanol fuel cells with nanostructured components are configured with higher precious metal utilization rate at the electrodes, higher power density, and lower cost. To form a catalyst, platinum or platinum-ruthenium nanoparticles are deposited onto carbon-based materials, for example, single-walled, dual-walled, multi-walled and cup-stacked carbon nanotubes. The deposition process includes an ethylene glycol reduction method. Aligned arrays of these carbon nanomaterials are prepared by filtering the nanomaterials with ethanol. A membrane electrode assembly is formed by sandwiching the catalyst between a proton exchange membrane and a diffusion layer that form a first electrode. The second electrode may be formed using a conventional catalyst. The several layers of the MEA are hot pressed to form an integrated unit. Proton exchange membrane fuel cells and direct methanol fuel cells are developed by stacking the membrane electrode assemblies in a conventional manner.
摘要翻译：新型质子交换膜燃料电池和具有纳米结构组分的直接甲醇燃料电池配置在电极上的贵金属利用率更高，功率密度更高，成本更低。为了形成催化剂，将铂或铂 - 钌纳米颗粒沉积在碳基材料上，例如单壁，双壁，多壁和杯堆叠碳纳米管。沉积工艺包括乙二醇还原法。通过用乙醇过滤纳米材料来制备这些碳纳米材料的对准阵列。通过将催化剂夹在质子交换膜和形成第一电极的扩散层之间形成膜电极组件。第二电极可以使用常规的催化剂形成。 MEA的几层被热压形成一个集成的单元。质子交换膜燃料电池和直接甲醇燃料电池通过以常规方式堆叠膜电极组件来开发。

7. 发明申请

US20120145917A1 APPARATUS OF PLURAL CHARGED PARTICLE BEAMS WITH MULTI-AXIS MAGNETIC LENS 有权
公开(公告)号：US20120145917A1
公开(公告)日：2012-06-14
申请号：US12968221
申请日：2010-12-14
申请人： ZHONGWEI CHEN , WEIMING REN , KENICHI KANAI , XUEDONG LIU
发明人： ZHONGWEI CHEN , WEIMING REN , KENICHI KANAI , XUEDONG LIU
IPC分类号： H01J3/32
CPC分类号： H01J37/141 , H01J37/28 , H01J2237/1035 , H01J2237/1415 , H01J2237/1534
摘要： An apparatus basically uses a simple and compact multi-axis magnetic lens to focus each of a plurality of charged particle beams on sample surface at the same time. In each sub-lens module of the multi-axis magnetic lens, two magnetic rings are respectively inserted into upper and lower holes with non-magnetic radial gap. Each gap size is small enough to keep a sufficient magnetic coupling and large enough to get a sufficient axial symmetry of magnetic scale potential distribution in the space near to its optical axis. This method eliminates the non-axisymmetric transverse field in each sub-lens and the round lens field difference among all sub-lenses at the same time; both exist inherently in a conventional multi-axis magnetic lens. In the apparatus, some additional magnetic shielding measures such as magnetic shielding tubes, plates and house are used to eliminate the non-axisymmetric transverse field on the charged particle path from each charged particle source to the entrance of each sub-lens and from the exit of each sub-lens to the sample surface.

8. 发明申请

US20120145900A1 APPARATUS OF PLURAL CHARGED PARTICLE BEAMS WITH MULTI-AXIS MAGNETIC LENS 有权
标题翻译：具有多轴磁镜的多重充电粒子的装置
公开(公告)号：US20120145900A1
公开(公告)日：2012-06-14
申请号：US12968201
申请日：2010-12-14
申请人： ZHONGWEI CHEN , WEIMING REN , KENICHI KANAI , XUEDONG LIU
发明人： ZHONGWEI CHEN , WEIMING REN , KENICHI KANAI , XUEDONG LIU
IPC分类号： G01N23/04
CPC分类号： G01N23/2251 , G01N2223/6116 , G01N2223/646 , H01J37/141 , H01J2237/2817
摘要： An apparatus basically uses a simple and compact multi-axis magnetic lens to focus each of a plurality of charged particle beams on sample surface at the same time. In each sub-lens module of the multi-axis magnetic lens, two magnetic rings are respectively inserted into upper and lower holes with non-magnetic radial gap. Each gap size is small enough to keep a sufficient magnetic coupling and large enough to get a sufficient axial symmetry of magnetic scale potential distribution in the space near to its optical axis. This method eliminates the non-axisymmetric transverse field in each sub-lens and the round lens field difference among all sub-lenses at the same time; both exist inherently in a conventional multi-axis magnetic lens. In the apparatus, some additional magnetic shielding measures such as magnetic shielding tubes, plates and house are used to eliminate the non-axisymmetric transverse field on the charged particle path from each charged particle source to the entrance of each sub-lens and from the exit of each sub-lens to the sample surface.
摘要翻译：设备基本上使用简单紧凑的多轴磁性透镜来同时将多个带电粒子束中的每一个聚焦在样品表面上。在多轴磁性透镜的每个子透镜模块中，两个磁环分别插入具有非磁性径向间隙的上孔和下孔中。每个间隙尺寸足够小以保持足够的磁耦合并且足够大以在靠近其光轴的空间中获得足够的磁标势电位分布的轴向对称性。该方法同时消除了每个子透镜中的非轴对称横向场和所有子透镜之间的圆透镜场差; 都存在于传统的多轴磁性透镜中。在该装置中，使用一些额外的磁屏蔽措施，例如磁屏蔽管，板和房子来消除带电粒子路径上从每个带电粒子源到每个子透镜的入口和从出口的入口处的非轴对称横向场每个子透镜到样品表面。

9. 发明授权

US07919760B2 Operation stage for wafer edge inspection and review 失效
标题翻译：晶圆边缘检查和检查的操作阶段
公开(公告)号：US07919760B2
公开(公告)日：2011-04-05
申请号：US12331336
申请日：2008-12-09
申请人： Jack Jau , Hong Xiao , Joe Wang , Zhongwei Chen , Yi Xiang Wang , Edward Tseng
发明人： Jack Jau , Hong Xiao , Joe Wang , Zhongwei Chen , Yi Xiang Wang , Edward Tseng
IPC分类号： G21K5/10
CPC分类号： H01J37/28 , H01J37/20 , H01J2237/202 , H01J2237/2817 , H01L21/67288 , H01L21/6831
摘要： The present invention relates to an operation stage of a charged particle beam apparatus which is employed in a scanning electron microscope for substrate (wafer) edge and backside defect inspection or defect review. However, it would be recognized that the invention has a much broader range of applicability. A system and method in accordance with the present invention provides an operation stage for substrate edge inspection or review. The inspection region includes top near edge, to bevel, apex, and bottom bevel. The operation stage includes a supporting stand, a z-stage, an X-Y stage, an electrostatic chuck, a pendulum stage and a rotation track. The pendulum stage mount with the electrostatic chuck has the ability to swing from 0° to 180° while performing substrate top bevel, apex and bottom bevel inspection or review. In order to keep the substrate in focus and avoid a large position shift during altering the substrate observation angle by rotation the pendulum stage, one embodiment of the present invention discloses a method such that the rotation axis of the pendulum stage consist of the tangent of upper edge of the substrate to be inspected. The electrostatic chuck of the present invention has a diameter smaller than which of the substrate to be inspected. During the inspection process the substrate on the electrostatic chuck may be rotated about the central axis on the electrostatic chuck to a desired position, this design insures all position on the bevel and apex are able to be inspected.
摘要翻译：本发明涉及用于基板（晶片）边缘和背面缺陷检查或缺陷检查的扫描电子显微镜中的带电粒子束装置的操作阶段。然而，应当认识到，本发明具有更广泛的应用范围。根据本发明的系统和方法提供了用于衬底边缘检查或审查的操作阶段。检查区域包括顶部近边缘，斜面，顶点和底部斜面。操作台包括支撑台，z台，X-Y台，静电卡盘，摆台和旋转轨道。具有静电卡盘的摆台安装具有从0°摆动到180°的能力，同时执行基板顶部斜面，顶部和底部斜面检查或检查。为了将基板保持在对焦状态，并且通过旋转摆锤台来改变基板观察角度而避免大的位置偏移，本发明的一个实施例公开了一种方法，使得摆台的旋转轴线由上部的切线要检查的基板的边缘。本发明的静电卡盘的直径小于要检查的基板的直径。在检查过程中，静电卡盘上的基板可以围绕静电卡盘上的中心轴线旋转到期望的位置，该设计确保能够检查斜面上的所有位置和顶点。

10. 发明申请

US20100270468A1 SYSTEM AND METHOD FOR A CHARGED PARTICLE BEAM 有权
标题翻译：充电颗粒束的系统和方法
公开(公告)号：US20100270468A1
公开(公告)日：2010-10-28
申请号：US12832127
申请日：2010-07-08
申请人： Xuedong Liu , Xu Zhang , Joe Wang , Edward Tseng , Zhongwei Chen
发明人： Xuedong Liu , Xu Zhang , Joe Wang , Edward Tseng , Zhongwei Chen
IPC分类号： H01J37/145 , H01J37/28
CPC分类号： H01J37/145 , H01J37/28 , H01J2237/0475 , H01J2237/12 , H01J2237/14 , H01J2237/24485 , H01J2237/2807
摘要： System and method for charged particle beam. According an embodiment, the present invention provides a charged particle beam apparatus. The apparatus includes a charged particle source for generating a primary charged particle beam. The apparatus also includes at least one condenser lens for pre-focusing the primary charge particle beam. Furthermore, the apparatus includes a compound objective lens for forming the magnetic field and the electrostatic field to focus the primary charged particle beam onto a specimen in the charged particle beam path. The specimen includes a specimen surface. The compound objective lens includes a conical magnetic lens, an immersion magnetic lens, and an electrostatic lens, the conical magnetic lens including an upper pole piece, a shared pole piece being electrically insulated from the upper pole piece, and an excitation coil.
摘要翻译：带电粒子束的系统和方法。根据实施例，本发明提供一种带电粒子束装置。该装置包括用于产生初级带电粒子束的带电粒子源。该装置还包括用于预聚焦初级充电粒子束的至少一个聚光透镜。此外，该装置包括用于形成磁场的复合物镜和静电场，以将初级带电粒子束聚焦到带电粒子束路径中的样本上。样品包括样品表面。复合物镜包括锥形磁性透镜，浸没式磁透镜和静电透镜，该圆锥形磁性透镜包括上极片，与上极片电绝缘的共用极片和励磁线圈。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式