专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

12. 发明申请

US20060213275A1 MICRO-MACHINED PRESSURE SENSOR WITH POLYMER DIAPHRAGM 有权
标题翻译：具有聚合物膜片的微型压力传感器
公开(公告)号：US20060213275A1
公开(公告)日：2006-09-28
申请号：US10907176
申请日：2005-03-23
申请人： Cornel Cobianu , Mihai Gologanu , Ioan Pavelescu , Bogdan Serban
发明人： Cornel Cobianu , Mihai Gologanu , Ioan Pavelescu , Bogdan Serban
IPC分类号： G01L9/00
CPC分类号： G01L1/18 , G01L1/2287 , G01L9/0052
摘要： A piezoresistive pressure and/or strain sensor micro-machined primarily from plastic and/or glass. In one illustrative embodiment, the piezoresistive pressure sensor is formed on a polymer substrate. A first selectively implanted region is provided in the polymer substrate to create a piezoresistive region in the polymer substrate. A second selectively implanted region is then provided in at least part of the first selectively implanted region to modulate the electrical conductivity of the first selectively implanted region. The illustrative sensor may be selectively implanted with, for example, nitrogen to create the piezoresistive region, and boron to modulate the electrical conductivity of the piezoresistive region. Phosphorus or any other suitable material may also be used to modulate the electrical conductivity of the piezoresistive region, as desired. The piezoresistive pressure/strain sensor may be formed from a single substrate, or two or more substrates, and the resulting pressure/strain sensor may be mounted in a plastic package, if desired.
摘要翻译：主要由塑料和/或玻璃微加工的压阻压力和/或应变传感器。在一个说明性实施例中，压阻式压力传感器形成在聚合物基板上。在聚合物衬底中提供第一选择性注入区域，以在聚合物衬底中产生压阻区域。然后在第一选择性注入区域的至少一部分中提供第二选择注入区域，以调制第一选择性注入区域的电导率。说明性传感器可以选择性地植入例如氮气以产生压阻区域和硼以调节压阻区域的导电性。根据需要，磷或任何其它合适的材料也可用于调节压阻区域的导电性。压阻压力/应变传感器可以由单个基板或两个或更多个基板形成，并且如果需要，所得到的压力/应变传感器可以安装在塑料封装中。

IPRDB

热门服务

关于我们

友情链接

联系方式